Abstract
A new technique to accurately determine transmission line (TL) network parameters of surface acoustic wave (SAW) interdigital transducers (IDTs) is presented. Various test IDTs and radio frequency (RF) filters for experimental characterizations are designed and fabricated on a LiTaO3 piezoelectric material. S-parameters for test devices were measured in the broad frequency bands of 50 MHz to 6 GHz. Then decoupling the acoustic waves from electromagnetic waves with an electro-mechanical coupling coefficient (\(k^{2}\)), accurate TL circuit model parameters for SAW devices are determined. The acoustic wave model parameters are determined in an iterative manner by combining the measured S-parameters with a physical model. We show that SAW-based RF filters that operate at the frequency higher than 1 GHz can be very accurately designed using the proposed technique.
Similar content being viewed by others
References
T. Wu, Y. Wong, Y. He, C. Peng, J. Bao and K. Hashimoto, in Proc. IEEE International Ultrasonics Symposium, pp. 1–4 (2021)
J. Liu, X. Tong, J. Zhou, Y. Liu, W. Liu, Y. Cai and C. Sun, in Proc. IEEE International Ultrasonics Symposium, pp. 1–3 (2021)
Y. Yang, L. Gao and S. Gong, in Proc. IEEE International Ultrasonics Symposium, pp 1–4 (2021)
O. L. Balysheva, in Proc. Wave Electronics and its Application in Information and Telecommunication Systems (WECONF), pp. 1–5 (2021)
S. Mahon, IEEE Trans. Semicond. Manuf. 30, 494 (2017)
C.C.W. Ruppel, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 64, 1390 (2017)
T. Takai, H. Iwamoto, Y. Takamine, H. Yamazaki, T. Fuyutsume, H. Kyoya, T. Nakao, H. Kando, M. Hiramoto, T. Toi, M. Koshino, N. Nakajima, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 64, 1382 (2017)
T. Kimura, M. Omura, Y. Kishimoto, H. Kyoya, M. Mimura, H. Okunaga and K. Hashimoto, in Proc. IEEE International Ultrasonics Symposium, pp. 1239–1248 (2019)
F. Z. Bi and B. P. Barber, in Proc. IEEE International Ultrasonics Symposium, pp. 1025–1028 (2007)
T. Pensala, R. Thalhammer, J. Dekker, J. Kaitila, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 56, 2544 (2009)
C. Elachi, in Proc. the IEEE, vol. 64, pp. 1666–1698 (1976)
V. Plessky, Int. J. High Speed Electr. Syst. 10, 867 (2000)
B.A. Auld, Acoustic Fields and Waves in Solids (Krieger, FL, Malabar, 1990)
W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder and H. J. Shaw, IEEE Trans. Microw. Theory Tech. 17, 856 (1969)
G.S. Kino, Acoustic Waves: Devices, Imaging, and Analog Signal Processing (Prentice-Hall, Englewood Cliffs, 1987)
K. Yamanouchi and M. Takeuchi, in Proc. IEEE International Ultrasonics Symposium, pp. 11–18 (1990)
C.K. Campbell, Surface Acoustic Wave Devices for Mobile Wireless Communications (Academic Press, New York, 1998)
C. Dunnrowicz, F. Sandy, and T. Parker, in Proc. IEEE International Ultrasonics Symposium, pp. 386–390 (1976)
O. Ikata, T. Miyashita, T. Matsuda, T. Nishihara and Y. Satoh, in Proc. IEEE International Ultrasonics Symposium, pp. 111–115 (1992)
MATLAB R2020b (2020). Mathworks.
Y. Satoh, O. Ikata, T. Miyashita, T. Matsuda, T. Nishihara, Electr. and Comm. in Jpn. 76, 52 (1993)
Anritsu, ShockLineTM MS46122A/B Series Compact Vector Network Analyzer. (2022). [Online]. Available: https://dl.cdn-anritsu.com/en-us/test-measurement/files/Manuals/Operation-Manual/10410-00340T.pdf
P. J. van Wijnen, H. R. Classen and E. A. Wolsheimer, in Proc. IEEE Bipolar Circuits and Technology Meeting (BCTM), pp. 70–73 (1987)
O. Kawachi, S. Mineyoshi, G. Endoh, M. Ueda, O. Ikata, K. Hashimoto, M. Yamaguchi, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 48, 1442 (2001)
S. Lin, K. Lin, S. Chiu and C. Chen, in Proc. IEEE International Ultrasonics Symposium, vol 2, pp. 2089–2092 (2003)
P. Warder, A. Link, IEEE Micro. Magazine 16, 60 (2015)
J. Kushibiki, I. Takanaga, M. Arakawa, T. Sannomiya, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 46, 1315 (1999)
N.R. Skov, P. Sehgal, B.J. Kirby, H. Bruus, Phys. Rev. Applied 12, 044028 (2019)
D. Mandal, S. Banerjee, Sensors 22, 820 (2022)
G. Chung, D. Phan, J. Korean Phys. Soc. 57, 446 (2010)
V. Yantchev, P. Turner and V. Plessky, in Proc. IEEE International Ultrasonics Symposium, pp. 1–4 (2016)
H. Zhang, H. Wang, Micromachines 12, 1286 (2021)
Acknowledgements
This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT) (NRF-2019R1F1A1056951).
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Shin, J., Yoo, H., Seong, M. et al. High-frequency characterization for SAW interdigital transducers. J. Korean Phys. Soc. 81, 954–964 (2022). https://doi.org/10.1007/s40042-022-00613-9
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40042-022-00613-9