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Multi-physics field simulation and parametric optimization of a medium-power inductively coupled plasma torch

  • Original Paper - Fluids, Plasma and Phenomenology
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Abstract

In this study, a two-dimensional model of a medium-power inductively coupled plasma (ICP) torch was established to investigate the effects of different geometric parameters on the plasma properties, such as the temperature, velocity and electromagnetic field by performing multi-physical field-coupling simulations. The effects of the coil position, number of coil turns, input power and inductive current frequency on the plasma properties were studied and discussed in detail for a medium-power ICP torch. The results show that the coil position can affect the plasma uniformity, i.e., with increasing distance between the coil and the middle quartz tube, the plasma uniformity increases. When the number of coil turns is small, the electromagnetic field intensity is strong. In addition, when the input power and the current frequency are enhanced, the plasma temperature and volume both increase. Due to the effect of E–H mode conversion hysteresis, as the input power is increased, the temperature changes little, but the electromagnetic field intensity and the plasma velocity increase significantly.

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References

  1. X. Wu, J. Zhang, X. Kang, P. Jing, Rare Metal Mater. Eng. 36(S3), 562–566 (2007)

    Google Scholar 

  2. X. Xia, X. Zheng, F. Wang, H. Liu, X. Cai, R. Bai, China Tungsten Ind. 29(04), 45–48 (2014)

    Google Scholar 

  3. Y. Chen, J. Xie, Q. Jan et al., Trans. Mater. Heat Treat. 41(7), 14–24 (2020)

    Google Scholar 

  4. X. Liu, Q. Wang, P. Hu, Q. Chen, Heat Treat. Met. 40(10), 76–80 (2015)

    Google Scholar 

  5. H. Zhu, H. Tong, F. Yang, G. Ye, C. Cheng, L. Chen, Nucl. Fus. Plasma Phys. 33(02), 181–186 (2013)

    Google Scholar 

  6. R. Jia, T. Luo, L. Chen et al., Nucl. Fus. Plasma Phys. 38(04), 473–481 (2018)

    Google Scholar 

  7. W. Chen, L. Chen, C. Liu, C. Cheng, H. Tong, H. Zhu, Chin. J. Vacuum Sci. Technol. 37(06), 591–599 (2017)

    Google Scholar 

  8. W. Chen, L. Chen, C. Liu et al., High Voltage Engineering 45(1), 316–323 (2019)

    Google Scholar 

  9. Z. Hao, Y. Hua, J. Song, C. Ren., Phys. Plasmas, 27 (4), 043502 (2020)

  10. S.B. Punjabi, N. K. Joshi, H.A. Mangalvedekar, B.K. Lande, A.K. Das, D.C. Kothari., Phys. Plasmas, 19 (1), 821 (2012)

  11. I.K. Vladimir, A.G. Valery et al., Plasma Sour. Sci. Technol. 26(7), 075013 (2017)

    Google Scholar 

  12. V.A. Godyak, R.B. Piejak, B.M. Alexandrovich, Plasma Sour. Sci. Technol. 11(4), 525–543 (2002)

    Article  ADS  Google Scholar 

  13. S.W. Xue, P. Proulx, M.I. Boulos, J. Phys. D: Appl. Phys. 34, 1897 (2001)

    Article  ADS  Google Scholar 

  14. C. Zhao, Lanzhou University of Technology [M], (2014)

  15. H. Zhu, H. Tong, G. Ye, L. Chen, Nucl. Fus. Plasma Phys. 32(03), 199–205 (2012)

    Google Scholar 

  16. X. Liu, Q. Wang, P. Hu et al., Rare Metal Mater. Eng. 45(05), 1325–1329 (2016)

    Google Scholar 

  17. Y. Gao, X. Wang et al., Guangzhou Chem. Ind. 45(03), 29–31 (2017)

    Google Scholar 

  18. Y. Gao, M. Li, Y. Zhang et al., Ordnance Mater. Sci. Eng. 34(06), 90–92 (2011)

    Google Scholar 

  19. S.B. Punjabi, S.N. Sahasrabudhe, N.K. Joshi et al., Phys. Plasmas 21(1), 013506 (2014)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

This study was supported by the National Natural Science Foundation of China (Grant No. 12175177) and by the China Postdoctoral Science Foundation (Grant No. 2021M693889).

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Authors and Affiliations

  1. School of Mechanical and Precision Instrument Engineering, Xi’an University of Technology, Xi’an, 710048, China

    Minghao Yu, Bo Lv, Zeyang Qiu & Zhe Wang

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  1. Minghao Yu
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  2. Bo Lv
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  3. Zeyang Qiu
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  4. Zhe Wang
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Correspondence to Minghao Yu.

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Yu, M., Lv, B., Qiu, Z. et al. Multi-physics field simulation and parametric optimization of a medium-power inductively coupled plasma torch. J. Korean Phys. Soc. 80, 221–232 (2022). https://doi.org/10.1007/s40042-021-00362-1

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  • DOI: https://doi.org/10.1007/s40042-021-00362-1

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