Skip to main content
SpringerLink
Log in

Quartz Crystal Microbalance Coated with Vanadium Oxide Thin Film for \(\hbox {CO}_{2}\) Gas Sensor at Room Temperature

  • Research Article - Chemical Engineering
  • Published:
Arabian Journal for Science and Engineering Aims and scope Submit manuscript

Abstract

A gas-sensing device based on quartz crystal microbalance (QCM) covered with vanadium oxide thin film has been elaborated to detect \(\hbox {CO}_{2}\) gas at room temperature. Vanadium oxide thin films were deposited onto QCM substrates by vacuum thermal evaporation technique. The vanadium oxide-coated QCM was heated at \(200\,^{\circ }\hbox {C}\) for different times. The influence of the annealing time on structural and morphological properties of the deposited films was investigated by scanning electron microscopy, atomic force microscopy, and X-ray diffraction. The elaborated QCM/vanadium oxide structures were tested for \(\hbox {CO}_{2}\) gas sensing. The results show that the sensor sensitivity increases with the annealing time due to the increase in the roughness of the surface. Moreover, the structure heated at \(200\,^{\circ }\hbox {C}\) for 3 h exhibited a high resonance frequency shift (\(\Delta f\)) under a \(\hbox {CO}_{2}\) pressure of 40 mbar, fast response time (57 s), short recovery time (43 s), good stability, linearity, reproducibility, and reversibility.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Sun, P.; Jiang, Y.; Xie, G.; Du, X.; Hu, J.: A room temperature supramolecular-based quartz crystal microbalance (QCM) methane gas sensor. Sens. Actuators B 141, 104–108 (2009)

    Article  Google Scholar 

  2. Joo, J.; Lee, D.; Yoo, M.; Jeon, S.: ZnO nanorod-coated quartz crystals as self-cleaning thiol sensors for natural gas fuel cells. Sens. Actuators B 138, 485–490 (2009)

    Article  Google Scholar 

  3. Ayad, M.M.; Torad, N.L.: Quartz crystal microbalance sensor for detection of aliphatic amines vapours. Sens. Actuators B 147, 481–487 (2010)

    Article  Google Scholar 

  4. Minh, V.A.; Tuan, L.A.; Huy, T.Q.; Hung, V.N.; Quy, N.V.: Enhanced \(\text{ NH }_{3}\) gas sensing properties of a QCM sensor by increasing the length of vertically orientated ZnO nanorods. Appl. Surf. Sci. 265, 458–464 (2013)

    Article  Google Scholar 

  5. Banerjee, S.; Konwar, D.; Kumar, A.: Polyaniline nanofiber reinforced nanocomposite based highly sensitive piezoelectric sensors for selective detection of hydrochloric acid: analysis of response mechanism. Sens. Actuators B 190, 199–207 (2014)

    Article  Google Scholar 

  6. Ayad, M.M.; El-Hefnawey, G.; Torad, N.L.: Quartz crystal microbalance sensor coated with polyaniline emeraldine base for determination of chlorinated aliphatic hydrocarbons. Sens. Actuators B 134, 887–894 (2008)

    Article  Google Scholar 

  7. Quy, N.V.; Minh, V.A.; Luan, N.V.; Hung, V.N.; Hieu, N.V.: Gas sensing properties at room temperature of a quartz crystal microbalance coated with ZnO nanorods. Sens. Actuators B 153, 188–193 (2011)

    Article  Google Scholar 

  8. Wang, X.; Cui, F.; Lin, J.; Ding, B.; Yuc, J.; Al-Deyab, S.S.: Functionalized nanoporous \(\text{ TiO }_{2}\) fibers on quartz crystal microbalance platform for formaldehyde sensor. Sens. Actuators B 171–172, 658–665 (2012)

    Article  Google Scholar 

  9. Iwamori, S.; Yoshino, K.; Matsumoto, H.; Noda, K.; Nishiyama, I.: Active oxygen sensors used a quartz crystal microbalance (QCM) with sputter-coated and spin-coated poly(tetrafluoroethylene) thin films. Sens. Actuators B 171–172, 769–776 (2012)

    Article  Google Scholar 

  10. Li, X.; Chen, X.; Yao, Y.; Li, N.; Chen, X.: High-stability quartz crystal microbalance ammonia sensor utilizing graphene oxide isolation layer. Sens. Actuators B 196, 183–188 (2014)

    Article  Google Scholar 

  11. Ihdene, Z.; Mekki, A.; Mettai, B.; Mahmoud, R.; Hamada, B.; Chehimi, M.M.: Quartz crystal microbalance VOCs sensor based on dip coated polyaniline emeraldine salt thin films. Sens. Actuators B 203, 647–654 (2014)

    Article  Google Scholar 

  12. Dhayal Raj, A.; Suresh Kumar, P.; Yang, Q.; Mangalaraj, D.: Synthesis and gas sensors behavior of surfactants free \(\text{ V }_{2}\text{ O }_{5}\) nanostructure by using a simple precipitation method. Phys. E Low-dimens. Syst. Nanostruct. 44, 1490–1494 (2012)

    Article  Google Scholar 

  13. Modafferi, V.; Panzera, G.; Donato, A.; Antonucci, P.L.; Cannilla, C.; Donato, N.; Spadaro, D.; Neri, G.: Highly sensitive ammonia resistive sensor based on electrospun \(\text{ V }_{2}\text{ O }_{5}\) fibers. Sens. Actuators B 163, 61–68 (2012)

    Article  Google Scholar 

  14. Chebout, K.; Iratni, A.; Bouremana, A.; Sam, S.; Keffous, A.; Gabouze, N.: Electrical characterization of ethanol sensing device based on Vanadium oxide/Porous Si/Si structure. Solid State Ionics 253, 164–168 (2013)

    Article  Google Scholar 

  15. Qin, Y.; Fan, G.; Liu, K.; Hu, M.: Vanadium pentoxide hierarchical structure networks for high performance ethanol gas sensor with dual working temperature characteristic. Sens. Actuators B 190, 141–148 (2014)

    Article  Google Scholar 

  16. Jin, W.; Yan, S.; An, L.; Chen, W.; Yang, S.; Zhao, Ch; Dai, Y.: Enhancement of ethanol gas sensing response based on ordered \(\text{ V }_{2}\text{ O }_{5}\) nanowire microyarns. Sens. Actuators B 206, 284–290 (2015)

    Article  Google Scholar 

  17. Mulmi, S.; Kannan, R.; Thangadurai, V.: \(\text{ CO }_{2}\) and \(\text{ SO }_{2}\) tolerant Fe-doped metal oxides for solid state gas sensors. Solid State Ionics 262, 274–278 (2014)

    Article  Google Scholar 

  18. Atamanchuk, D.; Tengberg, A.; Aleynik, D.; Fietzek, P.; Shitashima, K.; Lichtschlag, A.; Hall, P.O.J.; Stahl, H.: Detection of \(\text{ CO }_{2}\) leakage from a simulated sub-seabed storage site using three different types of \(\text{ p }\text{ CO }_{2}\) sensors. Int. J. Greenhouse Gas Control 38, 121–134 (2015)

    Article  Google Scholar 

  19. Wang, H.; Chen, D.; Zhang, M.; Wang, J.: Influence of the sensing and reference electrodes relative size on the sensing properties of \(\text{ Li }_{3}\text{ PO }_{4}\)-based potentiometric \(\text{ CO }_{2}\) sensors. Surf. Coat. Technol. 320, 542–547 (2017)

    Article  Google Scholar 

  20. Hodgkinson, J.; Smith, R.; Ho, W.O.; Saffell, J.R.; Tatam, R.P.: Non-dispersive infra-red (NDIR) measurement of carbon dioxide at 4.2m in a compact and optically efficient sensor. Sens. Actuators B 186, 580–588 (2013)

    Article  Google Scholar 

  21. Lee, H.J.; Park, K.K.; Kupnik, M.; Khuri-Yakub, B.T.: Functionalization layers for \(\text{ CO }_{2}\) sensing using capacitive micromachined ultrasonic transducers. Sens. Actuators B Chem. 174, 87–93 (2012)

    Article  Google Scholar 

  22. Satyanarayana, L.; Noh, W.S.; Kim, G.H.; Lee, W.Y.; Park, J.S.: A low temperature potentiometric \(\text{ CO }_{2}\) sensor combined with \(\text{ SiO }_{2}:\text{ B }_{2}\text{ O }_{3}:\text{ Li }_{2}\text{ O:Bi }_{2}\text{ O }_{3}\) composite metal oxide. IEEE Sens. J. 8, 1565–1570 (2008)

    Article  Google Scholar 

  23. Pasierb, P.; Rekas, M.: Solid-state potentiometric gas sensors current status and future trends. J. Solid State Electrochem. 13, 3–25 (2009)

    Article  Google Scholar 

  24. Wang, H.; Ren, J.; Zhang, H.; Sun, G.; Jiang, Z.: Solid potentiometric \(\text{ CO }_{2}\) sensor using \(\text{ Li }_{3}\text{ PO }_{4}\) film as the electrolyte. IEEE Sens. J. 12, 2001–2005 (2012)

    Article  Google Scholar 

  25. Gabouze, N.; Belhousse, S.; Cheraga, H.; Ghellaib, N.; Ouadah, Y.; Belkacema, Y.; Keffous, A.: \(\text{ CO }_{2}\) and \(\text{ H }_{2}\) detection with a CHx/ porous silicon-based sensor. Vacuum 80, 986–989 (2006)

    Article  Google Scholar 

  26. Mardare, D.; Cornei, N.; Mitab, C.; Florea, D.; Stancu, A.; Tiron, V.; Manole, A.; Adomnitei, C.: Low temperature TiO\(_2\) based gas sensors for CO\(_2\). Ceram. Int. 42, 7353–7359 (2016)

    Article  Google Scholar 

  27. Sauerbrey, G.W.: The use of quartz crystal oscillators for weighing thin layer and for microweighing. Z. Phys. 155, 206–222 (1959)

    Article  Google Scholar 

  28. Boutamine, M.; Bellel, A.; Sahli, S.; Segui, Y.; Raynaud, P.: Hexamethyldisiloxane thin films as sensitive coating for quartz crystal microbalance based volatile organic compounds sensors. Thin Solid Films 552, 196–203 (2014)

    Article  Google Scholar 

  29. Shankar, P.; Rayappan, J.B.B.: Gas sensing mechanism of metal oxides: the role of ambient atmosphere, type of semiconductor and gases—a review. ScienceJet 4, 126–143 (2015)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laboratoire de Génie Electrique, Université Abderrahmane Mira Bejaia, 06000, Béjaïa, Algeria

    Malika Berouaken & Rezak Alkama

  2. Division Couches Minces Surfaces et Interfaces, Centre de Recherche en Technologie des Semi-conducteurs pour l’Energétique, 2, Bd Frantz Fanon, Alger 7-Merveilles, BP 140, Algiers, Algeria

    Malika Berouaken, Lamia Talbi, Sabrina Sam, Hamid Menari, Katia Chebout, Amar Manseri, Abdelghani Boucheham & Noureddine Gabouze

Authors
  1. Malika Berouaken
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Lamia Talbi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Rezak Alkama
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Sabrina Sam
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Hamid Menari
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Katia Chebout
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Amar Manseri
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Abdelghani Boucheham
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Noureddine Gabouze
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Malika Berouaken.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Berouaken, M., Talbi, L., Alkama, R. et al. Quartz Crystal Microbalance Coated with Vanadium Oxide Thin Film for \(\hbox {CO}_{2}\) Gas Sensor at Room Temperature. Arab J Sci Eng 43, 5957–5963 (2018). https://doi.org/10.1007/s13369-018-3153-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13369-018-3153-y

Keywords

Search

Navigation