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Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance

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Abstract

In this work, Shape-memory alloy (SMA)-based micromirrors were fabricated and the actuation was controlled through thermal stimulus. The micromirrors play a significant role in scanning and light deflection in the MEMS field. The SMA micromirrors were developed by coating CuAlNi thin film on strained kapton polyimide substrate using thermal evaporation. Later patterns were made on micromirrors for transmission and reflection of the light beam during actuation. The displacement of each distinct pattern was explored at different voltages ranging from 1 to 3 V through Joule heating technique. The maximum displacement observed was 1.9 mm for deltoid-patterned micromirror at 3 V. The ladder pattern recorded the minimum deflection of 1.1 mm at 3 V. The shape recovery ratio analysis showed that deltoid pattern bimorph had the highest recovery of 1.656. Energy-Dispersive X-ray Spectroscopy (EDS) analysis showed that the composition was maintained after the deposition.

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Acknowledgements

The authors thank the sophisticated instrumentation center of IIT Indore for their continuous support in providing characterization facilities. We also thank the Core Research Grant (CRG/2020/1600) scheme under the Science and Engineering Research Board (SERB) and Indo-Russian joint project (DST/INT/RUS/RSF/P-36) for providing financial support for the work.

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Authors and Affiliations

  1. Mechatronics and Instrumentation Lab, Department of Mechanical Engineering, Indian Institute of Technology Indore, Indore, Madhya Pradesh, India

    S. Jayachandran, Pravin Karna, Kaushal Gangwar, Ankit Kaithwas & I. A. Palani

  2. Saint-Petersburg State University, Saint Petersburg, Russia

    N. Resnina & S. Belyaev

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  1. S. Jayachandran
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  2. Pravin Karna
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  3. Kaushal Gangwar
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  7. I. A. Palani
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Correspondence to I. A. Palani.

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Jayachandran, S., Karna, P., Gangwar, K. et al. Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance. Trans Indian Inst Met 74, 2471–2480 (2021). https://doi.org/10.1007/s12666-021-02403-6

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