Abstract
α-Si3N4 powders with 91% α content and no impurity of Si2N2O were prepared by combustion synthesis using diamond wire Si cutting waste. The effects of H2O, SiO2 and NH4Cl additives on the nitridation mechanism, phase composition and microstructure of Si3N4 powder prepared by combustion synthesis were investigated. The results showed that the synergistic effect of H2O and SiO2 in Si cutting waste and NH4Cl improved the product α-Si3N4 content and no Si2N2O formation. The thermodynamic calculation shows that NH4Cl, H2O and SiO2 can promote the gasification of Si, and in the presence of HCl, the SiO gas produced by the reaction of H2O and Si powder transforms into SiCl4 at high temperature, thus reducing the Si2N2O content of the product.
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The work was supported by the National Key Research and Development Program of China (No. 2017YFB0310303).
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The work was supported by the National Key Research and Development Program of China (No. 2017YFB0310303). None of these organizations influenced the study design, the collection, analysis, and interpretation of data, the writing of the report, or the decision to submit the manuscript for publication.
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All authors contributed to the study conception and design. Material preparation, data collection and analysis were performed by Liang Wang, Honghua Li, Zengchao Yang and Jiangtao Li. The first draft of the manuscript was written by Liang Wang and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.
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Wang, L., Li, H., Yang, Z. et al. Preparation and Reaction Mechanism of Combustion Synthesis of α-Si3N4 Powder from Si Cutting Waste. Silicon 15, 3159–3163 (2023). https://doi.org/10.1007/s12633-022-02253-x
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DOI: https://doi.org/10.1007/s12633-022-02253-x