Abstract
In this paper, we propose the use of metal layer in the oxide region of charge plasma based dopingless transistor for the suppression of band to band tunneling induced leakage current. Using 2-D TCAD simulations, the device behavior of metal layer inserted dopingless transistor (hereafter referred to as ML-DLT) is analyzed and compared with the conventional DLT. We observe that the ML-DLT offers significant improvement in terms of OFF-current reduction by ~5 orders as compared to DLT. The low workfunction metal layer inserted under the drain electrode at the tunneling junction modulates the carrier concentration at the junction, thereby, widening the tunnel barrier at the gate-drain interface in OFF-state. The ON-current is only marginally affected for ML-DLT as metal layer plays a significant role only in the OFF-state. The ION to IOFF ratio is increased by ~5 orders which increases its utility for digital circuits. Gate length scaling demonstrates that, even for LG=5nm, ML-DLT offers better performance in terms of IOFF and ION/IOFF ratio. The ML-DLT shows smaller DIBL and SS values for all gate lengths scaled from LG=20 nm to LG=5 nm. To consider the practical scenario, a misalignment study has also been carried out. Misalignment study reveals that after a misalignment of metal layer towards the channel side by 20nm the device performance is comparable to DLT. We observe that ML-DLT shows superior performance in terms of parameters such as VEA, GM/ID, GM/ID x fT and intrinsic delay τ. Thus, it proves to be a useful technique to suppress the leakage current and enrich the device performance.
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Acknowledgments
This work was carried out under the project of “Visvesvaraya PhD Scheme for Electronics and IT” at Aligarh Muslim University, by Media Lab Asia (A Sect. 25 Company of Department of Electronics and Information Technology, Ministry of Communications and Information Technology, Govt. of India). The revised Implementation Order No is ‘PhD-MLA/4(39)/2015-16/ Dated 30.05·2016’. The authors are also thankful to the UGC of India for DSA-I grant and Start-Up grant.
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“Visvesvaraya PhD Scheme for Electronics and IT” at Aligarh Muslim University, by Media Lab Asia (A Sect. 25 Company of Department of Electronics and Information Technology, Ministry of Communications and Information Technology, Govt. of India).
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Raushan, M.A., Bashir, M.Y., Alam, N. et al. Performance Improvement of Dopingless Transistor for Low Power Applications. Silicon 14, 8009–8020 (2022). https://doi.org/10.1007/s12633-021-01556-9
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DOI: https://doi.org/10.1007/s12633-021-01556-9