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Design and Fabrication of Piezoelectric MEMS Sensor for Acoustic Measurements

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Abstract

This study illustrates the design, modeling and fabrication of a piezoelectric acoustic sensor based on ZnO to be utilized for aeroacoustic measurements. In aeroacoustics, measurement of high sound pressure level (SPL) (upto ∼ 180 dB) is a necessary prerequisite. The design of the device was accomplished through a combination of piezoelectric composite plate theory, lumped element modeling (LEM) and MEMS-CAD tool Coventorware. The optimization of Si-diaphragm thickness of the device for the desired SPL range was achieved by using Coventorware. Also, the cavity created after diaphragm development was connected to the outside environment via a microtunnel which was designed for low cut-off frequency. The complete frequency response of the device was determined from LEM using the simulation tool MATLAB. The low cut-off frequency, bandwidth and flat band sensitivity of the sensor have been found to be 48 Hz, 54 kHz and 130 μV/Pa respectively. The designed sensor was fabricated using standard Si-fabrication technology. The testing of the fabricated device was done using Laser Doppler Vibrometer (LDV). The resonance frequency obtained from LDV measurement has been found to be 99.6 kHz.

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Acknowledgments

The authors thank Director, CSIR-CEERI, Pilani, for encouragement and guidance.

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Funding

The authors acknowledge the research project (Ref. no. EMR/2017/005107) funded by Science & Engineering Research Board (SERB), DST, Govt. of India for the financial support in carrying out this work.

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Authors and Affiliations

  1. CSIR-Central Electronic Engineering Research Institute, Rajasthan, Pilani, 333031, India

    Washim Reza Ali & Mahanth Prasad

  2. Academy of Scientific and Innovative Research (AcSIR), Ghaziabad, 201002, India

    Washim Reza Ali & Mahanth Prasad

Authors
  1. Washim Reza Ali
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  2. Mahanth Prasad
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Contributions

Conceptualization: [Washim Reza Ali] and [Mahanth Prasad]; Methodology: [Washim Reza Ali]; Formal analysis and investigation: [Washim Reza Ali]; Writing-original draft preparation: [Washim Reza Ali]; Writing-review and editing: [Mahanth Prasad]; Funding acquisition: [Mahanth Prasad]; Resources: [Mahanth Prasad]; Supervision: [Mahanth Prasad].

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Correspondence to Mahanth Prasad.

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Ali, W.R., Prasad, M. Design and Fabrication of Piezoelectric MEMS Sensor for Acoustic Measurements. Silicon 14, 6737–6747 (2022). https://doi.org/10.1007/s12633-021-01437-1

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