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Calibration of a step height standard for dimensional metrology using phase-shift interferometry and Hamming window: band-pass filter

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Abstract

In this paper, asynchronous dual-wavelength phase-shift interferometry is used to calibrate a line structure of a step height of 400 mm nominally standard based on the ISO 5436 profile analysis. The Hamming window: band-pass filter is used to assign accurately the detected point edge from the intersection of the experimental line edge from its simulation. The shifted off-axis interferograms are captured and corrected from noise. The corrected interferograms are wrapped by using the four-frame algorithm. The extracted phases at each wavelength are subtracted and the obtained phase map is converted to a height map. Experimental results show that the detected point edge of the step height standard being measured is assigned at filter order N = 901, cut-off frequency f0 = 0.39, and frequency bandwidth fb = 0.25.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Authors and Affiliations

  1. Engineering and Surface Metrology Laboratory, National Institute of Standards, Tersa St., El Haram, El Giza, Egypt

    Dahi Ghareab Abdelsalam Ibrahim

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  1. Dahi Ghareab Abdelsalam Ibrahim
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Correspondence to Dahi Ghareab Abdelsalam Ibrahim.

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Ibrahim, D.G.A. Calibration of a step height standard for dimensional metrology using phase-shift interferometry and Hamming window: band-pass filter. J Opt 53, 1420–1428 (2024). https://doi.org/10.1007/s12596-023-01279-7

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  • DOI: https://doi.org/10.1007/s12596-023-01279-7

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