Abstract
The purpose of this study is to explore if nanostructured WO3 particles can replace traditional, bulkier materials in gas sensing applications. Then, use a Nd-YAG laser with a wavelength of 1064 nm, number of shot 300, 440, 640 mJ, and 840 mJ laser ablated energy, the pulsed laser deposition technique has been widely used to prepare and characterize Tungsten Trioxide nanoparticles on Porous Silicon substrate produced on n-type Silicon wafer. The crystal structure and morphological characteristics of the WO3NPs are studied using X-ray diffraction and field emission-scanning electron microscopy. J–V and Jph–V characteristic in the dark and photocurrent densities, responsivity, quantum efficiency and sensing properties also be investigated. With increasing pulse laser energy, the peaks of the WO3 thin film become sharper, implying enhanced crystallinity. The size of the surface grains grew larger and energy gab as the energy pulse was increased, increasing homogeneity. A detector measurement is based on spectrum responsiveness and quantum efficiency curves, which are divided into three parts, the first of which causes WO3NPs absorption. The second section is in sync with the PS layer’s visible light absorption and due to the silicon surface’s absorption of light; the third area's responsivity emerges in the near infrared range. Changes in operation temperature had an effect on the sensitivity, recovery time, and reaction time of H2S and NO2 gas sensors made from prepared samples. For each of the gases tested, the highest sensitivity was 329% at 640 mJ for H2S gas 444 ppm and 114% at 840 mJ for NO2 gas 226 ppm at 300 °C.
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Harb, N.H., Mutlak, F.AH. Gas sensing characteristics of WO3NPs sensors fabricated by pulsed laser deposition on PS n-type. J Opt 52, 323–331 (2023). https://doi.org/10.1007/s12596-022-00877-1
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DOI: https://doi.org/10.1007/s12596-022-00877-1