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Light emitting enhancement and angle-resolved property of surface textured GaN-based vertical LED

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Abstract

The performances of GaN-based vertical light emitting diodes with surface texture of GaN cones were studied. The cones were fabricated by inductively coupled plasma reactive ion etching with Cr mask, which can enhance the light intensity by about 95 % at injection current of 350 mA. Angle and wavelength-resolved far-field spectra were measured, and the maximum light enhancement lies at about ±15°–50° respect to normal direction. This is because of the successive reflection of light by the sidewall of cones, which can be concluded from the far-field pattern that the Fabry-Perot like resonance of patterned LED disappears compared to the original device. The polarization property of patterned LED was also analyzed, which can explain the increasing of enhancement ratio with injection current.

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Acknowledgments

This work was supported by the National Basic Research Program of China (Grant No.2009CB930502) and National Natural Science Foundation of China (Grants Nos 91323304, 11174362, 61390503, 11574369, 11434017 and 11504414) and the Knowledge Innovation Project of CAS (Grant No. KJCX2-EW-W02).

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Authors and Affiliations

  1. Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China

    Zhe Liu, Chuanrui Zhu, Yujin Wang, Haifang Yang, Changzhi Gu, Junjie Li & Baoli Liu

  2. State Key Laboratory of Crystal Materials, Shandong University, 27 South Shanda Road, Jinan, Shandong, 250100, China

    Yan Shen & Xiangang Xu

  3. Collaborative Innovation Center of Quantum Matter, Beijing, China

    Changzhi Gu

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  1. Zhe Liu
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  2. Chuanrui Zhu
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  4. Yan Shen
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Correspondence to Haifang Yang or Changzhi Gu.

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Liu, Z., Zhu, C., Wang, Y. et al. Light emitting enhancement and angle-resolved property of surface textured GaN-based vertical LED. J Opt 45, 81–86 (2016). https://doi.org/10.1007/s12596-015-0304-3

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  • DOI: https://doi.org/10.1007/s12596-015-0304-3

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