Abstract
The effects of temperature on aberrations in the mirrors and lenses of beam delivery systems were analyzed. Aberrations were derived using the Zernike polynomial and a Shack-Hartmann wavefront sensor. As the temperature rose, aberrations became more pronounced; in particular, orthogonal aberrations significantly increased. Computational analysis revealed that the aberrations were attributable to variations in the thermal expansion coefficients of various components of the anisotropic structure. The analytical and experimental results were similar. As the temperature rose, tilt aberrations significantly increased; the y-tilts of mirrors and lenses differed. An optical component realignment method was used to reduce aberrations as the temperature rose. We used the tilting screw to change the position of the second mirror, then used the linear slide to reduce defocusing aberration. These calibrations reduced aberrations to levels comparable with their initial values.
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Yamamuro, Y., Shimoyama, T., & Yan, J. (2022). Microscale surface patterning of zirconia by femtosecond pulsed laser irradiation. International Journal of Precision Engineering and Manufacturing-Green Technology, 9(2), 619–632. https://doi.org/10.1007/s40684-021-00362-3
Park, S., Lee, J., Kwon, E., Kim, D., Shin, S., Jeong, S., & Park, K. (2022). 3D sensing system for laser-induced breakdown spectroscopy-based metal scrap identification. International Journal of Precision Engineering and Manufacturing-Green Technology. https://doi.org/10.1007/s40684-021-00364-1
Yang, D., & Zou, J. (2022). Precision analysis of flatness measurement using laser tracker. International Journal of Precision Engineering and Manufacturing, 23(7), 721–732. https://doi.org/10.1007/s12541-022-00660-z1
Wang, Y., Alharbi, M., Bradley, T. D., et al. (2013). Hollow-core photonic crystal fibre for high power laser beam delivery. High Power Laser Science and Engineering, 1(1), 17–28. https://doi.org/10.1017/hpl.2013.3
Im, H., Oh, K. H., Kim, S. G., & Jeong, S. (2009). Application of etchant jet for laser micro-machining of metal channels. International Journal of Precision Engineering and Manufacturing, 10, 101–105. https://doi.org/10.1007/s12541-009-0077-1
Kong, J. H., & Lee, S. W. (2023). Development of melt-pool monitoring system based on degree of irregularity for defect diagnosis of directed energy deposition process. International Journal of Precision Engineering and Manufacturing-Smart Technology, 1(2), 137–143. https://doi.org/10.57062/ijpem-st.2023.0045
Ma, Y. W., Park, J. H., Lee, S. J., Lee, J., Cho, S., & Shin, B. S. (2023). Fabrication system for large-area seamless nanopatterned cylinder mold using the spiral laser interference exposure method. International Journal of Precision Engineering and Manufacturing-Green Technology, 10(1), 1–7. https://doi.org/10.1007/s40684-022-00423-1
Zhdanov, B. V., & Knize, R. J. (2012). Review of alkali laser research and development. Optical Engineering, 52(2), 021010–021010. https://doi.org/10.1117/1.OE.52.2.021010
Kränkel, C., Marzahl, D. T., Moglia, F., et al. (2016). Out of the blue: Semiconductor laser pumped visible rare-earth doped lasers. Laser & Photonics Reviews, 10(4), 548–568. https://doi.org/10.1002/lpor.201500290
Nadimi, M., Waritanant, T., & Major, A. (2017). High power and beam quality continuous-wave Nd:GdVO_4 laser in-band diode-pumped at 912 nm. Photonics Research, 5(4), 346–349. https://doi.org/10.1364/prj.5.000346
Franko, M., Goljat, L., Liu, M., et al. (2023). Recent progress and applications of thermal lens spectrometry and photothermal beam deflection techniques in environmental sensing. Sensors, 23(1), 472. https://doi.org/10.3390/s23010472
Scaggs, M., & Haas, G. (2015). Optical alignment influenced aberrations in laser beam delivery systems and their correction. In Laser Resonators, Microresonators, and Beam Control XVII, 9343, 99–108. https://doi.org/10.1117/12.2076630
Yu, X., Gillmer, S. R., & Ellis, J. D. (2015). Beam geometry, alignment, and wavefront aberration effects on interferometric differential wavefront sensing. Measurement Science and Technology, 26(12), 125203. https://doi.org/10.1088/0957-0233/26/12/125203
Kim, W. B., Moon, S. D., Kim, H. S., et al. (2009). Optical design and manufacturing technology for high resolution laser scanning unit. International Journal of Precision Engineering and Manufacturing, 10, 141–146. https://doi.org/10.1007/s12541-009-0105-1
Kligman, B. E., Baartman, B. J., & Dupps, W. J., Jr. (2016). Errors in treatment of lower order aberrations and induction of higher order aberrations in laser refractive surgery. International Ophthalmology Clinics, 56(2), 19. https://doi.org/10.1097/IIO.0000000000000113
Lutzmann, P., Göhler, B., Hill, C. A., & Putten, F. V. (2017). Laser vibration sensing at Fraunhofer IOSB: Review and applications. Optical Engineering, 56(3), 031215–031215. https://doi.org/10.1117/1.OE.56.3.031215
Meng, L., Huang, Z., Han, Z., et al. (2018). Simulation and experiment studies of aberration effects on the measurement of laser beam quality factor (M2). Optics and Lasers Engineering, 100, 226–233. https://doi.org/10.1016/j.optlaseng.2017.09.005
Köhler, M., Tóth, T., Kreybohm, A., et al. (2020). Effects of reduced ambient pressure and beam oscillation on gap bridging ability during solid-state laser beam welding. Journal of Manufacturing and Materials Processing, 4(2), 40. https://doi.org/10.3390/jmmp4020040
Lo, J. I., Peng, Y. C., Lu, H. C., et al. (2022). Monitoring the temperature of a Mo/Si mirror with photoluminescence in extreme-ultraviolet lithography. ACS Applied Electronic Materials, 4(7), 3435–3439. https://doi.org/10.1021/acsaelm.2c00347
Zhu, Z., Liu, L., Liu, Z., et al. (2017). Surface-plasmon-resonance-based optical-fiber temperature sensor with high sensitivity and high figure of merit. Optics Letter, 42(15), 2948–2951. https://doi.org/10.1364/ol.42.002948
Schkolnik, V., Leykauf, B., Hauth, M., et al. (2015). The effect of wavefront aberrations in atom interferometry. Applied Physics B, 120, 311–316. https://doi.org/10.1007/s00340-015-6138-5
Karcher, R., Imanaliev, A., Merlet, S., & Santos, F. P. D. (2018). Improving the accuracy of atom interferometers with ultracold sources. New Journal of Physics, 20(11), 113041. https://doi.org/10.1088/1367-2630/aaf07d
Fujishima, Y., Ishiyama, S., Isago, S., et al. (2013). Comprehensive thermal aberration and distortion control of lithographic lenses for accurate overlay. In Optical Microlithography XXVI., 8683, 493–499. https://doi.org/10.1117/12.2010908
Hsu, M. Y., Chen, C. Y., Chang, S. T., et al. (2014). The refractive lens heat absorption from light source caused thermal aberration analysis. Novel Optical Systems Design and Optimization XVII, 9193, 148–154. https://doi.org/10.1117/12.2060770
De Santi, C., Meneghini, M., Meneghesso, G., & Zanoni, E. (2016). Degradation of InGaN laser diodes caused by temperature- and current-driven diffusion processes. Microelectronics Reliability, 64, 623–626. https://doi.org/10.1016/j.microrel.2016.07.118
Al-Marhaby, F. A., Al-Ghamdi, M. S., & Zekry, A. (2022). Effect of temperature on the electrical parameters of indium phosphide/aluminum gallium indium phosphide (InP/AlGaInP) quantum dot laser diode with different cavity lengths. Engineered Science, 18, 132–140. https://doi.org/10.30919/es8d647
Zhang, J., Li, D., Chen, R., & Xiong, Q. (2013). Laser cooling of a semiconductor by 40 kelvin. Nature, 493(7433), 504–508. https://doi.org/10.1038/nature11721
Bykov, D. S., Schmidt, O. A., Euser, T. G., & Russell, P. S. J. (2015). Flying particle sensors in hollow-core photonic crystal fibre. Nature Photonics, 9(7), 461–465. https://doi.org/10.1038/NPHOTON.2015.94
Leahy, Z. N., & Magner, A. J. (2013). Athermal mounting of optics in metallic housings. In Optomechanical Engineering, 2013(8836), 194–201. https://doi.org/10.1117/12.2025266
Briggs, J. A., Naik, G. V., Zhao, Y., et al. (2017). Temperature-dependent optical properties of titanium nitride. Applied physics Letters. https://doi.org/10.1063/14977840
Ramos-López, D., Sánchez-Granero, M. A., Fernández-Martínez, M., & Martínez-Finkelshtein, A. (2016). Optimal sampling patterns for Zernike polynomials. Applied Mathematics and Computation, 274, 247–257. https://doi.org/10.1016/j.amc.2015.11.006
Svechnikov, M. V., Chkhalo, N. I., Toropov, M. N., & Salashchenko, N. N. (2015). Resolving capacity of the circular Zernike polynomials. Optics Express, 23(11), 14677–14694. https://doi.org/10.1364/OE.23.014677
Lakshminarayanan, V., & Fleck, A. (2011). Zernike polynomials: A guide. Journal of Modern Optics, 58(7), 545–561. https://doi.org/10.1080/09500340.2011.554896
Niu, K., & Tian, C. (2022). Zernike polynomials and their applications. Journal of Optics, 24, 123001. https://doi.org/10.1088/2040-8986/ac9e08
Wang, J. Y., & Silva, D. E. (1980). Wave-front interpretation with Zernike polynomials. Applied Optics, 19(9), 1510–1518. https://doi.org/10.1364/JOSA.66.000207
Mcalinden, C., Mccartney, M., & Moore, J. (2011). Mathematics of Zernike polynomials: A review. Clinical and Experimental Ophthalmology, 39(8), 820–827. https://doi.org/10.1111/j.1442-9071.2011.02562.x
Ruoff, J., & Totzeck, M. (2009). Orientation Zernike polynomials: A useful way to describe the polarization effects of optical imaging systems. Journal of Micro/Nanolithography, MEMS and MOEMS, 8(3), 031404. https://doi.org/10.1117/1.3173803
Huang, J., Yao, L., Wu, S., & Wang, G. (2023). Wavefront Reconstruction of Shack-Hartmann with Under-Sampling of Sub-Apertures. Photonics, 10(1), 65. https://doi.org/10.3390/photonics10010065
Pandey, A. K., Larrieu, T., Dovillaire, G., et al. (2022). Shack-hartmann wavefront sensing of ultrashort optical vortices. Sensors, 22(1), 132. https://doi.org/10.3390/s22010132
Zhao, M., Zhao, W., Yang, K., et al. (2022). Shack-Hartmann wavefront sensing based on four-quadrant binary phase modulation. Photonics, 9(8), 575. https://doi.org/10.3390/photonics9080575
Nikitin, A., Sheldakova, J., Kudryashov, A., Borsoni, G., Denisov, D., Karasik, V., & Sakharov, A. (2016). A device based on the Shack-Hartmann wave front sensor for testing wide aperture optics. In Photonic Instrumentation Engineering III, 9754, 117–125. https://doi.org/10.1117/12.2219282
Dai, G.-M. (1994). Modified Hartmann-Shack Wavefront Sensing and Iterative Wavefront Reconstruction. Adaptive Optics in Astronomy, 2201, 562–573. https://doi.org/10.1117/12.176040
Hwang, J. G., Kim, E. S., Kim, C., Huang, J. Y., & Kim, D. (2016). Effects of mirror distortion by thermal deformation in an interferometry beam size monitor system at PLS-II. Nuclear Instruments and Methods in Physics Research Section A, 833, 156–164. https://doi.org/10.1016/j.nima.2016.07.012
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This study was supported by the Research Program funded by the SeoulTech (Seoul National University of Science and Technology).
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Kim, J.H., Woo, S.C. & Kim, J. Effects of Temperature on Optical Aberrations in Beam Delivery Components. Int. J. Precis. Eng. Manuf. 25, 527–538 (2024). https://doi.org/10.1007/s12541-023-00934-0
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DOI: https://doi.org/10.1007/s12541-023-00934-0