Abstract
Wear and adhesion properties of single-layer graphene deposited on a silicon wafer were investigated in this study. Wear characteristics was studied at nanoscale by using friction force microscopy (FFM) while adhesion property was measured at microscale with a scratch tester. The microscratch test was performed on a single-layer graphene by linearly increasing normal load from 0 to 200 mN. The Kelvin probe force microscopy (KPFM) was used to locally measure surface potential in the tested surface to quantitatively measure the area of damage of graphene layer. The nanoscale wear test results showed two stages of damage of graphene layer; a steady increase at low loads and a relatively rapid increase at high loads. The microscratch test results revealed that severe damage of the layer occurred without introduction of minor damage stage. We demonstrated that the KPFM was highly effective in quantifying the damage of graphene layer.
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Chanhyung Park M.Sc. Graduate in the Graduate School, Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology. His research interest is Lithography. Currently he is a Researcher at ASML Korea.
Juhee Kim M.Sc. Graduate in the Graduate School, Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology. Her research interest is Energy and Environment. Currently she is a Ph.D. Candidate in the Department of Energy Policy at Seoul National University of Science and Technology.
Hyo-Sok Ahn Professor in the Manufacturing Systems and Design Engineering Programme, Seoul National University of Science and Technology. His research interest is Nanotribology and Scanning Probe Microscopy.
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Park, C., Kim, J. & Ahn, HS. Wear and Adhesion Properties of Single-Layer Graphene. Int. J. Precis. Eng. Manuf. 19, 1539–1544 (2018). https://doi.org/10.1007/s12541-018-0181-1
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DOI: https://doi.org/10.1007/s12541-018-0181-1