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Study on the fast tool servo-assisted milling of microlens arrays

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Abstract

In order to reduce the cost of milling ultra-precision microlens arrays and improve its efficiency, a fast tool servo-assisted microlens milling method is proposed which combines a fast tool servo (FTS) and a traditional three-axis displacement platform. The FTS-assisted microlens arrays milling path generation algorithm is established and the milling surface simulation model based on milling kinematics and grid discretization principle is constructed. A high precision FTS system is developed based on which a FTS-assisted microlens arrays milling platform is built. For verifying the effectiveness of this new method, a series of experiments are carried out. The minimum surface roughness and surface PV error of the machined micro-lenses are 0.046 µm and 0.673 µm, respectively. The results of tests with various cutting parameters illustrate that feed rate is the main cutting parameter to affect the milling quality of micro-lens array.

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Abbreviations

r :

The radius of the tool

ω :

The angular speed of rotation of the milling spindle

t :

Machining time

θ :

The tilt angle of tool

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Acknowledgments

The study was supported by the National Natural Science Foundation of China (52105454, and U2013211, 52275437), the Fundamental Research Funds for the Central Universities (30921013102), and the Special funding for Jiangsu Province Innovation Support Program (BZ2023058).

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Authors and Affiliations

  1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China

    Tianxiao Chang, Dongran Shen, Zhiwei Zhu & Peng Huang

Authors
  1. Tianxiao Chang
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  2. Dongran Shen
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  3. Zhiwei Zhu
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  4. Peng Huang
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Corresponding author

Correspondence to Peng Huang.

Additional information

Tianxiao Chang received the B.E. degree in Weapon System & Engineering from Nanjing University of Science and Technology, Nanjing, China, in 2019. He is currently working towards his Ph.D. degree in Mechanical Engineering in Nanjing University of Science and Technology. His research interests include fabrication of microstructures, brittle material cutting and measurement.

Dongran Shen received the B.E. degree in Mechanical Engineering from Jiangxi University of Science and Technology, Ganzhou, China, in 2019, and M.S. degree in Mechanical Engineering in Nanjing University of Science and Technology, Nanjing, China, in 2022. His research interest is micro nano actuation and control.

Zhiwei Zhu (Member, IEEE) is currently a Full Professor with the School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China. He received the B.E. and M.S. degrees in mechanical engineering from Jilin University, Changchun, China, in 2010 and 2013, respectively, and the Ph.D. degree in industrial and systems engineering from the Hong Kong Polytechnic University, Hong Kong, in 2016. His research interests include the ultraprecision machining of freeform optics, and the design, modeling, and control of precision mechatronic systems for the measurement, as well as the manufacturing.

Peng Huang is an associate professor of the School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China. He received his Ph.D. in Mechanical Engineering from Hong Kong Polytechnic University. His research interests include fabrication of microstructures, brittle material cutting and measurement.

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Chang, T., Shen, D., Zhu, Z. et al. Study on the fast tool servo-assisted milling of microlens arrays. J Mech Sci Technol 38, 2537–2545 (2024). https://doi.org/10.1007/s12206-024-0432-2

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  • DOI: https://doi.org/10.1007/s12206-024-0432-2

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