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Modeling and simulation of non-spiral coil for magnetic sensing applications

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Abstract

Microcoils are essential components in magnetic sensors made using Micro-electro-mechanical systems (MEMS) technology. Nonspiral microcoils have fabrication advantages over conventional spiral coils and can be effectively used in MEMS micro sensors for generation and detection of magnetic fields. In this work, an analytical model of peak flux density, sensitivity, and resolution for the nonspiral planar microcoil is reported for the first time. Self and mutual inductances of a non-spiral coil are used to calculate the flux density at the innermost turn of the coil. The model derived is compared with standard fabrication results, and it is found to be in good agreement with the experimental results.

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Authors and Affiliations

  1. National Institute of Technology, Calicut, India

    S. Krishnapriya & K. J. Suja

  2. Bennett University, Noida, India

    Rama S. Komaragiri

Authors
  1. S. Krishnapriya
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  2. Rama S. Komaragiri
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  3. K. J. Suja
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Correspondence to S. Krishnapriya.

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Recommended by Associate Editor Woo-Tae Park

Krishnapriya S. is a Ph.D. scholar in Department of Electronics & Communication, National Institute of Technology Calicut, India. She received her Master’s degree from the same institution in Microelectronics and VLSI technology. Her research interests are in the areas of modelling and simulation of MEMS Sensors and semiconductor devices.

Rama Komaragiri is presently working as Professor and Head of the Department Electronics and Communication Engineering at Bennett University. Dr. Komaragiri’s research interests are in the areas of MEMS/NEMS Sensors, Semiconductor device modelling and simulation and Low-power CMOS VLSI circuit design.

Suja K. J. is presently working as Assistant Professor in the Department Electronics and Communication Engineering at NIT Calicut, India. Dr. Suja’s research interests are in the areas of modelling, simulation and characterisation of MEMS Sensors and Semiconductor devices.

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Krishnapriya, S., Komaragiri, R.S. & Suja, K.J. Modeling and simulation of non-spiral coil for magnetic sensing applications. J Mech Sci Technol 31, 5415–5421 (2017). https://doi.org/10.1007/s12206-017-1036-x

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  • DOI: https://doi.org/10.1007/s12206-017-1036-x

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