Abstract
A detailed study is done on the growth of microstructures and sub-wavelength laser-induced periodic surface structures (LIPSSs) on silicon (Si) surface using nitrogen (\(\hbox {N}_{2})\) nanosecond (ns) laser processing in air. The period of LIPSS is found to be as small as 37 nm which is close to \(\lambda /9\) times the irradiated laser wavelength (337 nm). In the optimised condition the sums total of reflectance (specular reflectance \(+\) diffuse reflectance) was found to be as low as 10% for a broad wavelength range. The reflectance behaviour has been correlated with the morphology of the generated microstructures.
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V V Iyengar, B K Nayak and M C Gupta, Sol. Energy Mater. Sol. Cells 94, 2251 (2010)
R A Myers, R Farrell, A M Karger, J E Carey and E Mazur, Appl. Opt. 45(35), 8825 (2006)
J E Carey, C H Crouch, M Shen and E Mazur, Opt. Lett. 30, 1773 (2005)
K Xu, C Zhang, R Zhou, R Ji and M Hong, Opt. Express 24(10), 10352 (2016)
I Gnilitskyi, L Orazi, T White and V Gruzdev, Ultrafast laser texturing on Si with burst-mode picosecond laser pulses, Conference on Lasers and Electro-Optics (CLEO) (San Jose, CA, USA, 13–18 May 2018)
S Kontermann, T Gimpel, A L Baumann, K M Guenther and W Schade, Laser processed black silicon for photovoltaic applications, Energy Procedia 27 (Silicon PV, Leuven, Belgium, 3–5 April 2012) pp. 390–395
Z Huang, J E Carey, M Liu, X Guo, E Mazur and J C Campbell, Appl. Phys. Lett. 89, 033506 (2006)
T Chen, J Si, X Hou, S Kanehira, K Miura and K Hirao, J. Appl. Phys. 110, 073106 (2011)
J Yang, J Li, Z Du, Q Gong, J Teng and M Hong, Sci. Rep. 4(1), 1 (2014)
J Lv, T Zhang, P Zhang, Y Zhao and S Li, Nanoscale Res. Lett. 13(1), 1 (2018)
V V Iyengar, B K Nayak, K L More, H M Meyer, M D Biegalski, J V Li and M C Gupta, Sol. Energy Mater. Sol. Cells 95, 2745 (2011)
Y E B Vidhya and N J Vasa, J. Photon. Energy 6(1), 014001 (2016)
O García, J García-Ballesteros, D Munoz-Martin, S Núnez-Sánchez, M Morales, J Carabe, I Torres, J Gandía and C Molpeceres, Appl. Surf. Sci. 278, 214 (2013)
C Wu, C Crouch, L Zhao, J Carey, R Younkin, J Levinson, E Mazur, R Farrell, P Gothoskar and A Karger, Appl. Phys. Lett. 78(13), 1850 (2001)
C H Crouch, J E Carey, J M Warrender, M J Aziz, E Mazur and F Y Génin, Appl. Phys. Lett. 84(11), 18501852 (2004)
M Halbwax, T Sarnet, P Delaporte, M Sentis, H Etienne, F Torregrosa, V Vervisch, I Perichaud and S Martinuzzi, Thin Solid Films 516(20), 6791 (2008)
X C Wang, H Y Zheng, C W Tan, F Wang, H Y Yu and K L Pey, Opt. Express 18(18), 19379 (2010)
X Zhu, H Zhu, D Liu, Y Huang, X Wang, H Yu, S Wang, X Lin and P Han, Adv. Mater. Res. 418–420, 217 (2012)
D A Zuev, O A Novodvorsky, E V Khaydukov, O D Khramova, A A Lotin, L S Parshina, V V Rocheva, V Y Panchenko, V V Dvorkin, A Y Poroykov, G G Untila, A B Chebotareva, T N Kost and M A Timofeyev, Appl. Phys. B 105(3), 545 (2011)
D Differt, B Soleymanzadeh, F Lükermann, C Strüber, W Pfeiffer and H Stiebig, Sol. Energy Mater. Sol. Cells 135, 72 (2015)
B K Nayak and M C Gupta, Appl. Opt. 51, 114 (2011)
E D Diebold, N H Mack, S K Doorn and E Mazur, Langmuir 25(3), 1790 (2009)
S Hamad, S S B Moram, B Yendeti, G K Podagatlapalli, S V S Nageswara Rao, A P Pathak, M A Mohiddon and V Rao Soma, ACS Omega 3(12), 18420 (2018)
A Y Vorobyev and C Guo, Opt. Express 19(S5), A1036 (2011)
S Sarbada, Z Huang, Y C Shin and X Ruan, Appl. Phys. A 122(4), 453 (2016)
T Tavera, N Pérez, A Rodríguez, P Yurrita, S M Olaizola and E Castano, Appl. Surf. Sci. 258, 1175 (2011)
H Varel, M Wahmer, A Rosenfeld, D Ashkenasi and E Campbell, Appl. Surf. Sci. 128, 127 (1998)
R Buividas, M Mikutis and S Juodkazis, Prog. Quant. Electron. 38, 119 (2014)
J Bonse, S Hohm, S V Kirner, A Rosenfeld and J Kruger, IEEE J. Sel. Top. Quantum Electron. 23(3), 1 (2017)
N Yasumaru, K Miyazaki and J Kiuchi, Appl. Phys. A 76(6), 983 (2003)
S K Das, H Messaoudi, A Debroy, E McGlynn and R Grunwald, Opt. Mater. Express 3(10), 1705 (2013)
J Bonse, S Hohm, A Rosenfeld and J Kruger, Appl. Phys. A 110(3), 547 (2013)
M Hashida, L Gemini, T Nishii, Y Miyasaka, H Sakagami and M Shimizu, J. Laser Micro/Nanoeng. 9, 234 (2014)
X Li, C Zhang, H Li, Q Dai, S Lan and S Tie, Opt. Express 22(23), 28086 (2014)
P Nurnberger, M H M Reinhardt, H Kim, E Pfeifer, M Kroll, S Muller, F Yang and N A Hampp, Appl. Surf. Sci. 425(15), 682 (2017)
H Angermann, J Rappich and C Klimm, Open Phys. 7(2), 363 (2009)
M A Goslvez and R M Nieminen, New J. Phys. 5, 100 (2003)
R Einhaus, E Vazsonyi, J Szlufcik, J Nijs and R Mertens, Isotropic texturing of multicrystalline silicon wafers with acidic texturing solutions, Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference (Anaheim, CA, Sept. 30–Oct. 3, 1997) pp. 167–170
P K Singh, R Kumar, M Lal, S N Singh and B K Das, Sol. Energy Mater. Sol. Cells 70(1), 103 (2001)
B Vallejo, M Gonzalez-Manas, J Martínez-Lopez and M A Caballero, Sol. Energy 81(5), 565 (2007)
P Panek, M Lipinski and J Dutkiewicz, J. Mater. Sci. 40(6), 1459 (2005)
N Ximello, A D Shirazi, S Scholz and G Hahn, Influence of pyramid size of chemically textured silicon wafers on the characteristics of industrial solar cells, 25th European Photovoltaic Solar Energy Conference and Exhibition/5th World Conference on Photovoltaic Energy Conversion (Valencia, Spain, 6–10 September 2010) pp. 1761–1764
A M Al-Husseini and B Lahlouh, J. Appl. Sci. 17, 374 (2017)
Y Wang, R Luo, J Ma and S Q Man, Fabrication of the pyramidal microstructure on silicon substrate using KOH solution, Proceedings of the 5th International Conference on Advanced Engineering Materials and Technology (China, 22–23 August 2015) pp. 302–307
Y Si Ahmed, T Hadjersi and R Chaoui, Fabrication of pyramid/nanowire binary structure on n-type silicon using chemical etching, Special issue of the 2nd International Conference on Computational and Experimental Science and Engineering (ICCESEN 2015) pp. 385–387
C L Su, C H Hsu, K H Lan, R Leron, A Soriano and M H Li, Texturization of silicon wafers for solar cells by anisotropic etching with sodium silicate solutions, International Conference on Renewable Energies and Power Quality (ICREPQ’12) (Santiago de Compostela, Spain, 28–30 March 2012) pp. 1334–1337
Z Xi, D Yang, W Dan, C Jun, X Li and D Que, Renew. Energy 29(13), 2101 (2004)
Z Xi, Sol. Energy Mater. Sol. Cells 77(3), 255 (2003)
Y E B Vidhya and N J Vasa, Mater. Res. Express 5(6), 066410 (2018)
Acknowledgements
SKD thanks Science & Engineering Research Board (SERB), Govt. of India (Project File Number: EMR/2015/ 001175) for the financial support.
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Singh, P.C., Das, S.K. Generation of microstructures and extreme sub-wavelength laser-induced periodic structures on the Si surface using \(\hbox {N}_{2}\) nanosecond pulsed laser for the reduction of reflectance. Pramana - J Phys 95, 11 (2021). https://doi.org/10.1007/s12043-020-02051-3
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DOI: https://doi.org/10.1007/s12043-020-02051-3
Keywords
- Nitrogen laser
- microstructures
- sub-wavelength laser-induced periodic surface structures
- total reflectance