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Transparent \(\mathrm{Pb}\left(\mathrm{Zr},\mathrm{Ti}\right){\mathrm{O}}_{3}\left[\mathrm{PZT}\right]\) thin films on indium tin oxide-coated glass

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Abstract

Transparent piezoelectric thin films on glass are sought after in piezoelectric microdevices. Here we report the fabrication of highly transparent (%T ≥ 70.0) Pb(Zr0.52Ti0.48)O3[PZT] thin films on indium tin oxide (ITO)-coated glass substrate. The effective transverse piezoelectric coefficient, e31,f, determined from both direct and converse piezoelectric effects for the PZT/ITO/glass unimorphs were 3.8 and 9.3 C m−2, respectively. Dielectric permittivity, \({\varepsilon }_{\mathrm{r}}\) and dielectric loss, tan δ were 870 and 0.06, respectively. The high optical transparency and transverse piezoelectric coefficient obtained for the PZT/ITO/glass heterostructure suggest that they have good application potential in transparent piezoelectric thin film devices.

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Acknowledgements

Research support for this work was provided by the core research grant (File no. CRG/2019/003978) from the Science and Engineering Research Board (SERB), Department of Science and Technology, Government of India. Mr Athul Pradeep is grateful to SERB, Government of India, for the financial support.

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Authors and Affiliations

  1. Center for Materials for Electronics Technology(C-MET), Scientific Society, Ministry of Electronics and Information Technology [MeitY], Thrissur, 680581, India

    Athul Pradeep, V Priyadarsini & V Kumar

  2. Department of Mechanical Engineering, Kobe University, Kobe, 657-8501, Japan

    Takumi Nishikado, Yuichi Kanayama & Isaku Kanno

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  1. Athul Pradeep
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  2. V Priyadarsini
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  3. V Kumar
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  4. Takumi Nishikado
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  5. Yuichi Kanayama
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  6. Isaku Kanno
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Correspondence to V Kumar.

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Pradeep, A., Priyadarsini, V., Kumar, V. et al. Transparent \(\mathrm{Pb}\left(\mathrm{Zr},\mathrm{Ti}\right){\mathrm{O}}_{3}\left[\mathrm{PZT}\right]\) thin films on indium tin oxide-coated glass. Bull Mater Sci 46, 197 (2023). https://doi.org/10.1007/s12034-023-03042-x

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  • DOI: https://doi.org/10.1007/s12034-023-03042-x

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