Skip to main content
SpringerLink
Log in

Spectroscopic study of the effect of annealing temperature and atmosphere on the opto-electrical properties of sputtered ITO thin films

  • Published:
Bulletin of Materials Science Aims and scope Submit manuscript

Abstract

The effect of annealing temperature and atmosphere on structural, optical and electrical properties of indium tin oxide (ITO) thin films with a nanoscale thickness, grown on glass substrates by radio frequency sputtering, was investigated. X-ray diffraction, grazing incidence X-ray reflectivity, scanning electron microscopy, energy dispersive X-ray spectroscopy, optical transmission and electrical resistivity measurements were performed to study the prepared films. Under both, air and vacuum atmospheres, the films start crystallization from a temperature of 100°C, and show an average transmittance of 83%. From the figure of merit, which takes into account the optical and electrical properties, it is found that the films annealed under vacuum generally show much better performance than those annealed in air.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8
Figure 9
Figure 10
Figure 11
Figure 12

Similar content being viewed by others

References

  1. Ahmed N M, Sabah F A, Abdulgafour H I, Alsadig A, Sulieman A and Alkhoaryef M 2019 Results Phys. 13 102159

    Article  Google Scholar 

  2. Agdad A, Tchenka A, Chaik M, Kaotar S and Mustapha H 2022 Appl. Phys. A 128 338

    Article  CAS  Google Scholar 

  3. Yudar H H, Korkmaz Ş, Özen S, Şenay V and Pat S 2016 Appl. Phys. A Mater. Sci. Process. 122 1

    Article  CAS  Google Scholar 

  4. Zalkepali N U H H, Awang N A, Yuzaile Y R, Zakaria Z, Latif A A, Ali A H et al 2021 Indian J. Phys. 95 733

    Article  CAS  Google Scholar 

  5. Kim H J, Maeng M J, Park J H, Kang M G, Kang C Y, Park Y et al 2019 Curr. Appl. Phys. 19 168

    Article  Google Scholar 

  6. Jaya T P and Pradyumnan P P 2017 Jpn. J. Appl. Phys. 56 1

    Article  Google Scholar 

  7. Chaikeeree T, Nuchuay P, Kasayapanand N, Mungkung N, Arunrungrusmi S, Horprathum M et al 2017 Mater. Today Proc. 4 6060

    Article  Google Scholar 

  8. Atabaev I G 2016 Int. J. Thin Film Sci. Technol. 5 13

    Google Scholar 

  9. Chen X, Zhang H, Wang T, Wang F and Shi W 2012 Phys. Status Solidi Appl. Mater. Sci. 209 1456

    Article  CAS  Google Scholar 

  10. Nicolescu M, Anastasescu M, Calderon-Moreno J M, Maraloiu A V and Teodorescu V S 2021 Opt. Mater. (Amst) 114 110999

    Article  CAS  Google Scholar 

  11. Kosarian A, Shakiba M and Farshidi E 2018 IEEJ Trans. Electr. Electron. Eng. 13 27

    Article  CAS  Google Scholar 

  12. Li J, Jiang Z, Lin P, Chen X, Zhong L, Zhang L et al 2019 Mod. Phys. Lett. B 33 1

    CAS  Google Scholar 

  13. Tchenka A, Agdad A, Cheikh M, Vall S, Hnawi S K, Narjis A et al 2021 Adv. Mater. Sci. Eng. 2021 1

    Article  Google Scholar 

  14. Tchenka A, Agdad A, Mellalou A, Chaik M and Ait D 2022 J. Electron. Mater. 51 1401

    Article  CAS  Google Scholar 

  15. Wan D, Chen P, Liang J, Li S and Huang F 2011 ACS Appl. Mater. Interfaces 3 4751

    Article  CAS  Google Scholar 

  16. Lee K H, Jang H W, Kim K B, Tak Y H and Lee J L 2004 J. Appl. Phys. 95 586

    Article  CAS  Google Scholar 

  17. Ahmed M, Bakry A, Qasem A and Dalir H 2021 Opt. Mater. (Amst) 113 110866

    Article  CAS  Google Scholar 

  18. Tchenka A, Agdad A, Bousseta M, El A, Amiri L, Nkhaili L et al 2022 Opt. Mater. (Amst) 131 112634

    Article  CAS  Google Scholar 

  19. Abdulkadir A, Abdul Aziz A and Pakhuruddin M Z 2020 Results Phys. 19 103405

    Article  Google Scholar 

  20. Balasundaraprabhu R, Monakhov E V, Muthukumarasamy N, Nilsen O and Svensson B G 2009 Mater. Chem. Phys. 114 425

    Article  CAS  Google Scholar 

  21. Marikkannu S, Sanjeeviraja C, Piraman S and Ayeshamariam A 2015 J. Mater. Sci. Mater. Electron. 26 2531

    Article  CAS  Google Scholar 

  22. Ech-Chamikh E, Essafti A and Youssef I 2006 Afrique Sci. 02 255

    Google Scholar 

  23. Coban A, Khawaja E E and Durrani S M A 2002 Nucl. Instrum. Methods Phys. Res. B 194 171

    Article  CAS  Google Scholar 

  24. Wang K, Xin Y, Zhao J, Song M, Chen S, Lu Y et al 2018 Ceram. Int. 44 6

    Google Scholar 

  25. Hamberg I, Granqvist C G, Berggren K F, Sernelius B E and Engström L 1984 Phys. Rev. B 30 3240

    Article  CAS  Google Scholar 

  26. Kerkache L, Layadi A and Mosser A 2009 J. Alloys Compd. 485 46

    Article  CAS  Google Scholar 

  27. Bhagwat S and Howson R P 1999 Surf. Coatings Technol. 111 163

    Article  CAS  Google Scholar 

  28. Shigesato Y and Paine D C 1993 Appl. Phys. Lett. 62 1268

    Article  CAS  Google Scholar 

  29. Adurodija F O, Izumi H, Ishihara T, Yoshioka H, Matsui H and Motoyama M 1999 Jpn. J. Appl. Phys. 38 2710

    Article  CAS  Google Scholar 

  30. Haacke G 1976 J. Appl. Phys. 47 4086

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Nanomaterials for Energy and Environment Laboratory, Physics Department, Faculty of Science Semlalia, Cadi Ayyad University, P.O. Box 2390, 40000, Marrakech, Morocco

    Abdelali Agdad, Abdelaziz Tchenka, Mounir Chaik, Salma Kaotar Hnawi, Cheikh Mohamed Samba Vall, Lahcen Nkhaili, Mustapha Azizan, Elmaati Ech-chamikh & Youssef Ijdiyaou

  2. Renewable Energy and Environment Laboratory, Faculty of Science Kenitra, Ibn Tofail University, P.O. Box 133, 40000, Kenitra, Morocco

    Cheikh Mohamed Samba Vall

Authors
  1. Abdelali Agdad
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Abdelaziz Tchenka
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Mounir Chaik
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Salma Kaotar Hnawi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Cheikh Mohamed Samba Vall
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Lahcen Nkhaili
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Mustapha Azizan
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Elmaati Ech-chamikh
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Youssef Ijdiyaou
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Abdelaziz Tchenka.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Agdad, A., Tchenka, A., Chaik, M. et al. Spectroscopic study of the effect of annealing temperature and atmosphere on the opto-electrical properties of sputtered ITO thin films. Bull Mater Sci 46, 72 (2023). https://doi.org/10.1007/s12034-023-02907-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s12034-023-02907-5

Keywords

Search

Navigation