Abstract
Ion implantation is widely used for doping semiconductors or electroceramic materials and probing material behaviors in extreme radiation environments. However, implanted ions can induce compressive stresses into the host material, which can induce plasticity and mesoscopic deformation. However, these phenomena have almost exclusively been observed in brittle ionic and/or covalently bonded materials. Here, we present transmission electron microscopy observations of unusual implantation-induced plasticity in two metallic alloys. First, Fe2+ ions induce dislocation plasticity below the implanted layer in a model Fe-P alloy. Next, He+ ions form pressurized cavities which activate the fcc-to-hcp strain-induced martensitic transformation in Alloy 625. In both cases, the plasticity can be explained by a combination of implanted ions being incorporated into the lattice and the creation of irradiation defects. These findings have significant implications for mechanical testing of ion-implanted layers, while also opening pathways for using ion implantation to tune stress distributions in metallic alloys.
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M.J. Tadjer, J.L. Lyons, N. Nepal, J.A. Freitas, A.D. Koehler, and G.M. Foster, ECS J. Solid State Sci. Technol. 8, Q3187 (2019).
A. Das and D. Basak, ACS Appl. Electron. Mater. 3, 3693 (2021).
M. Kaur, S. Gautam, and N. Goyal, Mater. Lett. 309, 131356 (2022).
S.-M. Ma, T.-X. Wang, Z.-Y. Deng, X.-S. Zheng, B.-B. Wang, and H.-J. Feng, Phys. Lett. A 451, 128400 (2022).
Y. Wang, X. Cheng, K. Zhang, G. Chen, R. Wang, and J. Zhang, Mater Adv 3, 7384 (2022).
J. P. Wharry, H. (Claire) Xiong, T. Olsen, and C. Yang, in Encyclopedia of Energy Storage (Elsevier, 2022), pp. 243–255.
M.M. Rahman, W.-Y. Chen, L. Mu, Z. Xu, Z. Xiao, M. Li, X.-M. Bai, and F. Lin, Nat. Commun. 11, 4548 (2020).
D. Garoli, L.V. Rodriguez De Marcos, J.I. Larruquert, A.J. Corso, R. Proietti Zaccaria, and M.G. Pelizzo, Appl. Sci. 10, 7538 (2020).
S. Peracchi, B. James, F. Pagani, V. Pan, J. Vohradsky, D. Bolst, D.A. Prokopovich, S. Guatelli, M. Petasecca, M.L.F. Lerch, S.H. Lee, T. Inaniwa, N. Matsufuji, M. Povoli, A. Kok, M. Jackson, T. Squire, A.B. Rosenfeld, and L.T. Tran, IEEE Trans. Nucl. Sci. 68, 897 (2021).
H. Huang, X. Yuan, L. Ma, J. Lin, G. Zhang, and B. Cai, Nucl. Eng. Technol. 55, 2298 (2023).
M. Naito, S. Kodaira, R. Ogawara, K. Tobita, Y. Someya, T. Kusumoto, H. Kusano, H. Kitamura, M. Koike, Y. Uchihori, M. Yamanaka, R. Mikoshiba, T. Endo, N. Kiyono, Y. Hagiwara, H. Kodama, S. Matsuo, Y. Takami, T. Sato, and S. Orimo, Life Sci. Space Res. (Amst) 26, 69 (2020).
S. Taller, G. VanCoevering, B.D. Wirth, and G.S. Was, Sci. Rep. 11, 2949 (2021).
R.W. Harrison, Vacuum 160, 355 (2019).
D. Rafaja, W. Valvoda, A.J. Perry, and J.R. Treglio, Surf. Coat. Technol. 92, 135 (1997).
T. Wohlenberg and W.A. Grantt, Phase Transitions 1, 23 (1979).
C. A. Volkert, MRS Proc. 157, (1989).
G.W. Arnold, G.B. Krefft, and C.B. Norris, Appl. Phys. Lett. 25, 540 (1974).
T. Hioki, A. Itoh, S. Noda, H. Doi, J.-I. Kawamoto, and O. Kamigaito, Nucl. Inst. Methods Phys. Res. B 39, 657 (1989).
D. Manova, G. Thorwarth, S. Mändl, H. Neumann, B. Stritzker, and B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 242, 285 (2006).
C. Blawert, B.L. Mordike, Y. Jirásková, and O. Schneeweiss, Surf. Coat. Technol. 116–119, 189 (1999).
S. Mandl and B. Rauschenbach, J. Appl. Phys. 91, 9737 (2002).
T. Hioki, A. Itoh, M. Ohkubo, S. Noda, H. Doi, J. Kawamoto, and O. Kamigaito, J. Mater. Sci. 21, 1321 (1986).
W. Primak and E. Monahan, J. Appl. Phys. 54, 435 (1983).
A. Benyagoub and S. Klaumünzer, Radiat. Eff. Defects Solids 126, 105 (1993).
S. Klaumünzer, Radiat. Eff. Defects Solids 110, 79 (1989).
A. Benyagoub, S. Löffler, M. Rammensee, S. Klaumünzer, and G. Saemann-Ischenko, Nucl. Instrum. Methods Phys. Res. B 65, 228 (1992).
T. van Dillen, M.J.A. de Dood, J.J. Penninkhof, A. Polman, S. Roorda, and A.M. Vredenberg, Appl. Phys. Lett. 84, 3591 (2004).
C. Yang, T. Olsen, M.L. Lau, K.A. Smith, K. Hattar, A. Sen, Y. Wu, D. Hou, B. Narayanan, M. Long, J.P. Wharry, and H. Xiong, J. Mater. Res. 37, 1144 (2022).
W.J. Arora, H.I. Smith, and G. Barbastathis, Microelectron. Eng. 84, 1454 (2007).
B.D. Chalifoux, Y. Yao, K.B. Woller, R.K. Heilmann, and M.L. Schattenburg, Opt. Express 27, 11182 (2019).
T.G. Bifano, H.T. Johnson, P. Bierden, and R.K. Mali, J. Microelectromech. Syst. 11, 592 (2002).
T. Motooka and O.W. Holland, Appl. Phys. Lett. 58, 2360 (1991).
C. Koroni, T. Olsen, J.P. Wharry, and H. Xiong, Materials 15, 5924 (2022).
Y.P. Sharkeev, A.N. Didenko, and E.V. Kozlov, Surf. Coat. Technol. 65, 112 (1994).
Y.P. Sharkeev, E.V. Kozlov, A.N. Didenko, S.N. Kolupaeva, and N.A. Vihor, Surf. Coat. Technol. 83, 15 (1996).
Y. P. Sharkeev, B. P. Gritsenko, S. V. Fortuna, A. J. Perry, in International Conference on Ion Implantation Technology, IEEE (The Institute of Electrical and Electronics Engineers, Inc, 1998), pp. 873–876.
Y.P. Sharkeev and E.V. Kozlov, Surf. Coat. Technol. 158–159, 219 (2002).
A. Misra, S. Fayeulle, H. Kung, T.E. Mitchell, and M. Nastasi, Nucl. Inst. Methods Phys. Res. B 148, 211 (1999).
A. Misra, S. Fayeulle, H. Kung, T.E. Mitchell, and M. Nastasi, Appl. Phys. Lett. 73, 891 (1998).
D.J. Bacon, A.F. Calder, and F. Gao, Radiat. Eff. Defects Solids 141, 283 (1997).
K. Dahmen, M. Giesen, J. Ikonomov, K. Starbova, and H. Ibach, Thin Solid Films 428, 6 (2003).
P.H. Warren, C.D. Clement, C. Yang, A. Sen, W.-Y. Chen, Y. Wu, L. Wang, and J.P. Wharry, J. Nucl. Mater. 583, 154531 (2023).
C. Clement, Y. Zhao, P. Warren, X. Liu, S. Xue, D.W. Gandy, and J.P. Wharry, J. Nucl. Mater. 558, 153390 (2022).
D.P. Guillen, J.P. Wharry, G. Housley, C.D. Hale, J. Brookman, and D.W. Gandy, Nucl. Eng. Des. 402, 112114 (2023).
J.P. Wharry, C.D. Clement, Y. Zhao, K. Baird, D. Frazer, J. Burns, Y. Lu, Y.Q. Wu, C. Knight, D.P. Guillen, and D.W. Gandy, Data Brief 48, 109092 (2023).
C. Clement, S. Panuganti, P.H. Warren, Y. Zhao, Y. Lu, K. Wheeler, D. Frazer, D.P. Guillen, D.W. Gandy, and J.P. Wharry, Mater. Sci. Eng., A 857, 144058 (2022).
D.P. Guillen, D.C. Pagan, E.M. Getto, and J.P. Wharry, Mater. Sci. Eng., A 738, 380 (2018).
J.F. Ziegler, The Stopping and Range of Ions in Matter (SRIM), http://www.srim.org/ (2013).
R.E. Stoller, M.B. Toloczko, G.S. Was, A.G. Certain, S. Dwaraknath, and F.A. Garner, Nucl. Instrum. Methods Phys. Res. B 310, 75 (2013).
S. Han, L. Zhao, Q. Jiang, and J. Lian, Sci. Rep. 2, 1 (2012).
F. Walsh, M. Zhang, R.O. Ritchie, A.M. Minor, and M. Asta, Nat. Mater. 22, 926 (2023).
B.H. Savitzky, S.E. Zeltmann, L.A. Hughes, H.G. Brown, S. Zhao, P.M. Pelz, T.C. Pekin, E.S. Barnard, J. Donohue, L. Rangel Da Costa, E. Kennedy, Y. Xie, M.T. Janish, M.M. Schneider, P. Herring, C. Gopal, A. Anapolsky, R. Dhall, K.C. Bustillo, P. Ercius, M.C. Scott, J. Ciston, A.M. Minor, and C. Ophus, Microsc. Microanal. 27, 712 (2021).
C.D. Clement, C. Yang, and J.P. Wharry, Mater. Sci. Eng. A 892, 146029 (2024).
L. He, T. Yao, K. Bawane, M. Jin, C. Jiang, X. Liu, W. Chen, J.M. Mann, D.H. Hurley, J. Gan, and M. Khafizov, J. Am. Ceram. Soc. 105, 5419 (2022).
J. Wang, M.B. Toloczko, N. Bailey, F.A. Garner, J. Gigax, and L. Shao, Nucl. Inst. Methods Phys. Res. B 387, 20 (2016).
I. Kuryliszyn-Kudelska, J.Z. Domagała, T. Wojtowicz, X. Liu, E. Łusakowska, W. Dobrowolski, and J.K. Furdyna, J. Appl. Phys. 95, 603 (2004).
C.W. Tucker and J.B. Sampson, Acta Metall. 2, 433 (1954).
C. Liu, B. Mensching, K. Volz, and B. Rauschenbach, Appl. Phys. Lett. 71, 2313 (1997).
B.H. Sencer, G.S. Was, H. Yuya, Y. Isobe, M. Sagisaka, and F.A. Garner, J. Nucl. Mater. 336, 314 (2005).
I.M. Ghauri and N. Afzal, J. Phys. D Appl. Phys. 40, 6044 (2007).
E. Snoeks, K.S. Boutros, and J. Barone, Appl. Phys. Lett. 71, 267 (1997).
Y.C. Ku, H.I. Smith, and I. Plotnik, J. Vacuum Sci. Technol. B Microelectron. Nanometer Struct. 6, 2174 (1988).
B. Window and G.L. Harding, J. Vacuum Sci. Technol. A Vacuum Surf. Films 11, 1447 (1993).
Q. Wang, K. Ozaki, H. Ishikawa, S. Nakano, and H. Ogiso, Nucl. Inst. Methods Phys. Res. B 242, 88 (2006).
H. Zhu, J. Davis, and Z. Li, Nucl. Instrum. Methods Phys. Res. B 455, 83 (2019).
E. Hasenhuetl, Z. Zhang, K. Yabuuchi, P. Song, and A. Kimura, Nucl. Instrum. Methods Phys. Res. B 397, 11 (2017).
C. Lu, K. Jin, L.K. Béland, F. Zhang, T. Yang, L. Qiao, Y. Zhang, H. Bei, H.M. Christen, R.E. Stoller, and L. Wang, Sci. Rep. 6, 19994 (2016).
E. Getto, Z. Jiao, A.M. Monterrosa, K. Sun, and G.S. Was, J. Nucl. Mater. 462, 458 (2015).
M.R. Castell, Phys. Rev. B Condens. Matter. Mater. Phys. 68, 1 (2003).
K.S. Mao, C. Sun, C.-H. Shiau, K.H. Yano, P.D. Freyer, A.A. El-Azab, F.A. Garner, A. French, L. Shao, and J.P. Wharry, Scr. Mater. 178, 1 (2020).
K.S. Mao, A.J. French, X. Liu, Y. Wu, L.A. Giannuzzi, C. Sun, M. Dubey, P.D. Freyer, J.K. Tatman, F.A. Garner, L. Shao, and J.P. Wharry, Mater. Des. 206, 109764 (2021).
G.S. Was, Fundamentals of Radiation Materials Science: Metals and Alloys, 2nd edn. (Springer, New York, 2017).
W. Zhang, Y. Xiong, J. Wu, W. Cheng, C. Du, S. Jin, B. Sun, and T. Shen, Nucl. Fusion 62, 126034 (2022).
X. Xiao, and L. Yu, Nucl. Mater. Energy 22, 100721 (2020).
G. S. WAS and G. S. Was, Fundamentals of Radiation Materials Science (2017).
A. Debelle and A. Declémy, Nucl. Instrum. Methods Phys. Res. B 268, 1460 (2010).
E. A. Clark, R. Yeske, and H. K. Birnbaum, Metall. Trans. A 11, (1980).
K.S. Mao, C. Sun, X. Liu, H.J. Qu, A.J. French, P.D. Freyer, F.A. Garner, L. Shao, and J.P. Wharry, J. Nucl. Mater. 528, 151878 (2020).
K.S. Mao, C. Sun, Y. Huang, C.-H. Shiau, F.A. Garner, P.D. Freyer, and J.P. Wharry, Materialia (Oxf) 5, 100208 (2019).
J.P. Wharry and K.S. Mao, J. Mater. Res. 35, 1660 (2020).
T. Masumura, K. Fujino, T. Tsuchiyama, S. Takaki, and K. Kimura, ISIJ Int. 61, 546 (2021).
C. Yang, Y. Pachaury, A. El-Azab, and J. Wharry, Scr. Mater. 209, 114394 (2022).
P. Hosemann, M. Sebastiani, M.Z. Mughal, X. Huang, A. Scott, and M. Balooch, J. Mater. Res. 36, 2349 (2021).
N.W. Phillips, H. Yu, S. Das, D. Yang, K. Mizohata, W. Liu, R. Xu, R.J. Harder, and F. Hofmann, Acta Mater. 195, 219 (2020).
C. Heintze, F. Bergner, and M. Hernández-Mayoral, J. Nucl. Mater. 417, 980 (2011).
M. Saleh, A. Xu, C. Hurt, M. Ionescu, J. Daniels, P. Munroe, L. Edwards, and D. Bhattacharyya, Int. J. Plast. 112, 242 (2019).
T. Miura, K. Fujii, K. Fukuya, and K. Takashima, J. Nucl. Mater. 417, 984 (2011).
S. Li, Y. Wang, X. Dai, F. Liu, J. Li, and X. Wang, J. Nucl. Mater. 478, 50 (2016).
T. Miyazawa, T. Nagasaka, R. Kasada, Y. Hishinuma, T. Muroga, H. Watanabe, T. Yamamoto, S. Nogami, and M. Hatakeyama, J. Nucl. Mater. 455, 440 (2014).
P. Hosemann, C. Vieh, R.R. Greco, S. Kabra, J.A. Valdez, M.J. Cappiello, and S.A. Maloy, J. Nucl. Mater. 389, 239 (2009).
C.D. Hardie, S.G. Roberts, and A.J. Bushby, J. Nucl. Mater. 462, 391 (2014).
C. Heintze, F. Bergner, S. Akhmadaliev, and E. Altstadt, J. Nucl. Mater. 472, 1 (2015).
R. Kasada, S. Konishi, K. Yabuuchi, S. Nogami, M. Ando, D. Hamaguchi, and H. Tanigawa, Fusion Eng. Des. 89, 1637 (2014).
Y. Takayama, R. Kasada, Y. Sakamoto, K. Yabuuchi, A. Kimura, and M. Ando, D. Hamaguchi 442, 23 (2013).
A. Reichardt, A. Lupinacci, D. Frazer, N. Bailey, H. Vo, C. Howard, Z. Jiao, A.M. Minor, P. Chou, and P. Hosemann, J. Nucl. Mater. 486, 323 (2017).
H. Vo, A. Reichardt, C. Howard, M.D. Abad, D. Kaoumi, P. Chou, and P. Hosemann, Jom 67, 2959 (2015).
T. Ajantiwalay, H. Vo, R. Finkelstein, P. Hosemann, A. Aitkaliyeva, JOM (2019).
Y. Pachaury, G. Warren, J. P. Wharry, A. El-Azab, Int. J. Plast. Submitted (n.d.).
A. Barnoush, P. Hosemann, J. Molina-Aldareguia, and J.M. Wheeler, MRS Bull. 44, 471 (2019).
N. Bibhanshu, M.N. Gussev, C.P. Massey, and K.G. Field, Mater. Sci. Eng., A 832, 142373 (2022).
M.A. Haque and M.T.A. Saif, Exp. Mech. 42, 123 (2002).
D. Kiener, C. Motz, G. Dehm, and R. Pippan, Int. J. Mater. Res. 100, 1074 (2009).
K.H. Yano, M.J. Swenson, Y. Wu, and J.P. Wharry, J. Nucl. Mater. 483, 107 (2017).
K.H. Yano, Y.Q. Wu, and J.P. Wharry, JOM 72, 2065 (2020).
H.J. Qu, K.H. Yano, P.V. Patki, M.J. Swenson, and J.P. Wharry, J. Mater. Res. 35, 1037 (2020).
J.P. Wharry and K.H. Yano, Microsc. Microanal. 23, 738 (2017).
P.H. Warren, G. Warren, M. Dubey, J. Burns, Y.Q. Wu, and J.P. Wharry, JOM 72, 2057 (2020).
D.C. Bufford, C.M. Barr, B. Wang, K. Hattar, and A. Haque, JOM 71, 3350 (2019).
C. Chisholm, Quantitative In Situ TEM Studies of Small-Scale Plasticity in Irradiated and Unirradiated Metals (University of California, Berkeley, 2015).
G.S. Jawaharram, P.M. Price, C.M. Barr, K. Hattar, R.S. Averback, and S.J. Dillon, Scr. Mater. 148, 1 (2018).
D. Kiener, P. Hosemann, S.A. Maloy, and A.M. Minor, Nat. Mater. 10, 608 (2011).
C. Robertson, B.K.K. Panigrahi, S. Balaji, S. Kataria, Y. Serruys, M.-H.H. Mathon, and C.S.S. Sundar, J. Nucl. Mater. 426, 240 (2012).
D. Kramer, H. Huang, M. Kriese, J. Robach, J. Nelson, A. Wright, D. Bahr, and W.W. Gerberich, Acta Mater. 47, 333 (1998).
S.H. Chen, L. Liu, and T.C. Wang, Int. J. Solids Struct. 44, 4492 (2007).
C.K. Dolph, D.J. da Silva, M.J. Swenson, and J.P. Wharry, J. Nucl. Mater. 481, 33 (2016).
Acknowledgements
The authors thank Dr. Yaqiao Wu, Dr. Yu Lu, Megha Dubey, Jeremy Burgener, and the staff at CAES for their assistance with microscopy, specimen handling, and work coordination, and Dr. Rosa Diaz and Dr. Zhongxia Shang at Purdue University for assistance with microscopy. This work was partially supported by the National Science Foundation award DMR-17-52636 and partially supported by the U.S. Department of Energy, Office of Science, Basic Energy Sciences, under award DE-SC0020150. P.H.W. and C.D.C. also acknowledge fellowship support from the United States Nuclear Regulatory Commission under grant 31310021M0035. Alloy 625 He implantation experiments and characterization were supported by the US Department of Energy, Office of Nuclear Energy, through the Nuclear Science User Facilities (NSUF) experiment award 22-4415.Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.
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JC: Investigation, writing- review and editing. CDC: conceptualization, funding acquisition, investigation, formal analysis, writing- original draft, writing- review and editing. CO: investigation, writing- review and editing. YS: formal analysis, writing- review and editing. PW: conceptualization, investigation, data curation, formal analysis, writing- original draft. JPW: conceptualization, funding acquisition, writing- original draft, writing- review and editing. YY: formal analysis, writing- review & editing.
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Warren, P.H., Clement, C.D., Sun, Y. et al. Ion Implantation-Induced Plastic Phenomena in Metallic Alloys. JOM (2024). https://doi.org/10.1007/s11837-024-06418-4
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DOI: https://doi.org/10.1007/s11837-024-06418-4