Abstract
In this work, the intensity distribution formula of the focused femtosecond (fs) laser beam is derived. MATLAB was used to establish the light intensity distribution model of the focused fs laser under the processing condition, and the light intensity of focused fs laser under different laser power was simulated. Then the fs laser processing platform was built. The glass was etched by fs laser, and the SU-8 photoresist was processed by fs laser two-photon polymerization (2PP). By adjusting the change of laser power, the etching and polymerization lines of different sizes are obtained. Based on the simulation results and experimental results, the estimated etching threshold of the glass using the fs laser is 5.096 6×1016 W/m2, and the estimated processing threshold of SU-8 photoresist by 2PP using the fs laser is 1.194 2×1014 W/m2. This work is helpful to further analyze the applications of fs laser processing. It provides guidance and reference for different kinds of fs laser processing methods.
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References
Qian X S, Optronics Lasers 4, 104 (1993). (in Chinese)
Kawata S, Sun H B, Tanaka T and Takada K, Nature 412, 697 (2001).
Maruo S, Nakamura O and Kawata S, Optics Letters 22, 132 (1997).
Sun H B, Kawakami T, Xu Y, Ye J Y, Matuso S, Misawa H, Miwa M and Kaneko R, Optics Letters 25, 1110 (2000).
Sun H B, Suwa T, Takada K, Zaccaria R P, Kim M S, Lee K S and Kawata S, Applied Physics Letters 85, 3708 (2004).
Takada K, Sun H B and Kawata S, Applied Physics Letters 86, 132 (2005).
Juodkazis S, Mizeikis V, Seet K K, Miwa M and Mi-sawa H, Nanotechnology 16, 846 (2005).
Gan Z S, Cao Y Y, Evans R A and Gu M, Nature Communications 4, 2061 (2013).
Li W, Cao T X, Zhai Z, Yu X Y, Zhang X Z and Xu J J, Nanotechnology 24, 215301 (2013).
Wu Y E, Ren M X, Wang Z H, Li W H, Wu Q, Yi S M, Zhang X Z and Xu J J, AIP Advances 4, 365 (2014).
Chen Z J, Yao J, Xu Q J and Wang Z H, Optoelectronics Letters 13, 56 (2017).
Zhang X Z, Xia F and Xun J J, Acta Physica Sinica 66, 144207 (2017). (in Chinese)
Liu F X, Sun S F, Wang D X and Jiang J L, Journal of Applied Optics 39, 442 (2018). (in Chinese)
Cao J, Poumellec B, Brisset F and Lancry M, Optics Express 26, 7460 (2018).
Chu W, Tan Y X, Wang P, Xu J, Li W B, Qi J and Cheng Y, Advanced Materials Technologies 3, 1700396 (2018).
Rulliere C, Femtosecond Laser Pulses-Principles and Experiments, Science Press, 2005.
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This work has been supported by the Tianjin Technical Expert Project (No.19JCTPJC42700).
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Chen, Zj., Zhang, L., Ma, Zh. et al. Analysis and research on the processing threshold of femtosecond laser. Optoelectron. Lett. 16, 343–348 (2020). https://doi.org/10.1007/s11801-020-0043-9
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DOI: https://doi.org/10.1007/s11801-020-0043-9