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High sensitivity micro-displacement sensor based on fiber Bragg grating and amplification substrate

基于光纤布拉格光栅和放大基片的高灵敏度微位移传感器

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Abstract

A micro-displacement sensor based on fiber Bragg grating (FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0–50 µm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/µm. In addition, the cascaded FBG is used to compensate the temperature.

摘要

提出了一种基于光纤布拉格光栅(FBG)的微位移传感器。该器件由一对中心波长不同的光纤布 拉格光栅和一个杠杆结构的金属衬底组成，布拉格光栅采用飞秒激光相位掩模法制作。被测物体的位 移由杠杆结构放大，并转换为布拉格光栅的轴向拉力。通过理论分析和有限元模拟获得的放大系数分 别为2.67 和2.5。实验结果表明，在0 至50 μm范围内，光纤光栅中心波长的偏移与被测物体的位移呈 线性关系，位移灵敏度达到121 pm/μm。级联的布拉格光栅可用于温度补偿。

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Funding

Projects(51875585, 51875584, 51935013) supported by the National Natural Science Foundation of China; Project (2020JJ4247) supported by the Natural Science Foundation of Hunan Province, China; Project(ZHD202001) supported by the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, China

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Authors and Affiliations

  1. State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha, 410083, China

    Li Zeng  (曾理), Xiao-yan Sun  (孙小燕), You-wang Hu  (胡友旺) & Ji-an Duan  (段吉安)

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  1. Li Zeng  (曾理)
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  2. Xiao-yan Sun  (孙小燕)
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  3. You-wang Hu  (胡友旺)
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  4. Ji-an Duan  (段吉安)
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Corresponding author

Correspondence to Xiao-yan Sun  (孙小燕).

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Contributors

ZENG Li provided the concept, performed the experiment and edited the draft of manuscript. SUN Xiao-yan performed simulation analysis, experimental data processing and manuscript modification. HU You-wang provided the visualization, supervision and funding acquisition. DUAN Ji-an provided the project administration and funding acquisition.

Conflict of interest

ZENG Li, SUN Xiao-yan, HU You-wang, and Duan Ji-an declare that they have no conflict of interest.

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Zeng, L., Sun, Xy., Hu, Yw. et al. High sensitivity micro-displacement sensor based on fiber Bragg grating and amplification substrate. J. Cent. South Univ. 29, 3361–3367 (2022). https://doi.org/10.1007/s11771-022-5161-z

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  • DOI: https://doi.org/10.1007/s11771-022-5161-z

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