Skip to main content
SpringerLink
Log in

Investigation of Adhesion Force of Silver and Gold-Coated Surfaces with Different Thicknesses on Silicon Substrate

  • Original Research Article
  • Published:
Journal of Materials Engineering and Performance Aims and scope Submit manuscript

Abstract

Significant adhesion forces (van der Waals, electrostatic, and capillary) exist at the nanoscale. Knowing the effective forces and influencing factors is crucial to reduce the adhesion force in microelectromechanical systems. In this paper, the effect of silver and gold metal coating in various thicknesses on silicon surfaces' adhesion force was investigated. Silver and gold metals with a thickness of 10, 120, and 500 nm were coated on the silicon substrate <100> by the magnetron sputtering method. Adhesion forces were obtained via Rabinovitch modeling and experimental method. Atomic force microscopy was used to experimentally obtain data on modeling methods. The findings show that coatings of both metals with various thicknesses reduce the adhesion force. Gold further reduced the surface adhesion as compared with the silver and gold coating. Therefore, gold can be a better option for the coating to reduce the adhesion force, especially in applications such as micro assembly.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. D.T. Shivakumar, T. Knežević, and L.K. Nanver, Nanometer-thin Pure Boron CVD Layers as Material Barrier to Au or Cu Metallization of Si, J. Mater. Sci. Mater. Electron., 2021, 32, p 7123–7135.

    Article  CAS  Google Scholar 

  2. T. Lai, Y. Chen, B. Fang, and J. Wang, Decrease in Adhesion Force at Silica-mica Interface with Short Contact Time Due to Dynamic Formation Process of Liquid Bridge Revealed on an AFM, J. Adhes., 2021, 98, p 1–19.

    Google Scholar 

  3. S.S. Hassani, M. Daraee, and Z. Sobat, Application of Atomic Force Microscopy in Adhesion Force Measurements, J. Adhes. Sci. Technol., 2020, 35, p 221–241.

    Article  Google Scholar 

  4. Z. Li, S. Gao, U. Brand, K. Hiller, and H. Wolff, A MEMS Nanoindenter with an Integrated AFM Cantilever Gripper for Nanomechanical Characterization of Compliant Materials, Nanotechnology, 2020, 31, p 1–13.

    Google Scholar 

  5. D. Yang, H. Jiang, R. Ott, K. Minor, J. Grant, L. Varga, J.A. Barnard, and W.D. Doyle, XPS Study of Polycrystalling and Epitaxial FeTaN Films Deposited by DC Reactive Magnetron Sputtering, Surf. Interface Anal, 1999, 27, p 259–272.

    Article  CAS  Google Scholar 

  6. S. Groudeva-Zotova, R.G. Vitchev, and B. Blanpain, Phase Composition of CR-C Thin Films Deposited by a Double Magnetron Sputtering System, Surf. Interface Anal, 2000, 30, p 544–548.

    Article  CAS  Google Scholar 

  7. R. Gouttebaron, D. Cornelissen, R. Snyders, J.P. Dauchot, M. Wautelet, and M. Heuq, XPS Study of Tio Thin Films Prepared by d.c. Magnetron Sputtering in Ar-O Gas Mixtures, Surf. Interface Anal, 2000, 30, p 527–530.

    Article  CAS  Google Scholar 

  8. M. Pustan, F. Rusu, C. Birleanu, R. Muller, R. Voicu, and A. Baracu, Analysis of the Surface Effects on Adhesion in MEMS Structures, Appl. Surf. Sci., 2015, 358, p 634–640.

    Article  Google Scholar 

  9. J. Katainen, M. Paajanen, E. Ahtola, V. Pore, and J. Lahtinen, Adhesion as an Interplay Between Particle Size and Surface Roughness, J. Colloid Interface Sci., 2006, 304, p 524–529.

    Article  CAS  Google Scholar 

  10. N. Balabanava, R. Wierzbiki, M. Zielecka, and Z. Rymuza, Effect of Roughness on Adhesion of Polymeric Coatings used for Microgrippers, Microelectron. Eng., 2007, 84, p 1227–1230.

    Article  CAS  Google Scholar 

  11. M. Kolahdoozan, M. Hamedi, and M. Nikkhah-Bahrami, A Novel Model for the Effect of Geometric Properties of Micro/Nanoscale Asperities on Surface Adhesion, Int. J. Adhes. Adhes., 2014, 48, p 280–287.

    Article  CAS  Google Scholar 

  12. M. Kolahdoozan, A. Kiani, P. Heidari, and S. Oveissi, Investigating the Effect of Varying Coating Thickness on the Surface Roughness and Adhesion Forces of MEMS Surfaces Utilizing a Theoretical and Experimental Approach, Appl. Surf. Sci., 2019, 481, p 531–539.

    Article  CAS  Google Scholar 

  13. L. Si and X. Wang, Nano-Adhesion Influenced by Atomic-Scale Asperities: A Molecular Dynamics Simulation Study, Appl. Surf. Sci., 2014, 317, p 710–717.

    Article  CAS  Google Scholar 

  14. Y.I. Rabinovich, J.J. Adler, A. Ata, R.K. Singh, and B.M. Moudgil, Adhesion Between Nanoscale Rough Surfaces: I. Role of Asperity Geometry, J. Colloid Interface Sci., 2000, 232, p 10–16.

    Article  CAS  Google Scholar 

  15. S.H. Tamboli, V. Puri, and R.K. Puri, Adhesion and Stress of Magnesium Oxide Thin Films: Effect of Thickness Oxidation Temperature and Duration, Appl. Surf. Sci., 2010, 256, p 4582–4585.

    Article  CAS  Google Scholar 

  16. M. Joulaei, M. Kolahdoozan, M. Salehi, M. Zadsar, and M. Vahabi, Comparison of the Adhesion Forces in Single and Double-Layer Coatings on the MEMS Surfaces by JKR and DMT Models, Surf. Interface Anal., 2019, 52, p 1–8.

    Google Scholar 

  17. M. Joulaei, M. Kolahdoozan, M. Salehi, M. Zadsar, and M. Vahabi, Experimental Investigation of the Adhesion Force of Single and Double-Layer Coatings on MEMS Surfaces, Surf. Interface Anal., 2018, 51, p 419–426.

    Article  Google Scholar 

  18. S. Ahmadi, M.A. Nilofar Asim, F.Y. Alghoul, K.S. Hammadi, N.A. Ludin, S.H. Zaidi, and K. Sopian, The Role of Physical Techniques on the Preparation of Photoanodes for Dye Sensitized Solar Cells, Int. J. Photoenergy, 2014, 2014, p 1–19. https://doi.org/10.1155/2014/198734

    Article  CAS  Google Scholar 

  19. H.J. Butt, B. Cappella, and M. Kappl, Force Measurements with the Atomic Force Microscope: Technique, Interpretation and Applications, Surf. Sci. Rep., 2005, 59, p 1–152.

    Article  CAS  Google Scholar 

  20. B. Cappella and G. Dietler, Force-Distance Curves by Atomic Force Microscopy, Surf. Sci. Rep., 1999, 34, p 1–104.

    Article  CAS  Google Scholar 

  21. J.A. Greenwood and J.B.P. Williamson, Contact of Nominally Flat Surfaces, Proc. R. Soc. Lond. Ser. A Math. Phys. Sci., 1966, 295, p 300–319.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, Iran

    B. Molaei & M. Kolahdoozan

Authors
  1. B. Molaei
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Kolahdoozan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to B. Molaei.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Molaei, B., Kolahdoozan, M. Investigation of Adhesion Force of Silver and Gold-Coated Surfaces with Different Thicknesses on Silicon Substrate. J. of Materi Eng and Perform (2023). https://doi.org/10.1007/s11665-023-08652-4

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11665-023-08652-4

Keywords

Search

Navigation