Abstract
The conventional reverse-conducting lateral insulated-gate bipolar transistor (LIGBT) is mainly used as an inverter in industry, but its snapback effect and trade-off property are not ideal. Based on this, a compound LIGBT embedded separated conduction region, called SCR-LIGBT, is proposed for performance optimization. The electrical properties are investigated by numerical simulation. This device is a hybrid structure of LIGBT and laterally diffused metal–oxide–semiconductor (LDMOS). The LDMOS region is sandwiched by the LIGBT region, and they are isolated by a thin oxide layer. The triple gate is constructed by the trench gate of the LIGBT regions and the planar gate of the LDMOS region. The trench gate also acts as a side gate of the LDMOS region. The planar gate is a dummy gate which is directly connected to the emitter in the LDMOS region. At the forward conduction region, the conduction current is switched from unipolar mode (LDMOS domain) to bipolar mode (LIGBT domain) without snapback, due to the separated conduction regions. At the reverse conduction region, the parasitic P-base/n-drift/N-collector diode and the MOS diode of the LDMOS region realize reverse conduction capability. During the turn-off process, the LDMOS region is used to extract excess electrons. Under the same forward voltage of 1.18 V, the turn-off energy loss of the SCR-LIGBT is 37.3% lower than that of the conventional LIGBT. As a result, the SCR-LIGBT achieves a snapback-free and superior trade-off relationship between the on-state voltage drop (\(V_{\textrm{ON}}\)) and turn-off energy loss \(E_{\textrm{OFF}}\) of the device, and it improves the integration of the chip, with improved reliability.
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Acknowledgments
This work was supported by the National Nature Science Foundation of China (Grants Nos.61604027) and the Key Scientific Research Project of Chongqing Municipal Education Commission under Grants KJZD-K202300610.
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National Nature Science Foundation of China (Grants Nos.61604027). The Key Scientific Research Project of Chongqing Municipal Education Commission under Grants KJZD-K202300610.
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Chen, W., Li, C. & Shen, W. A Compound LIGBT with Separated Conduction Region for Elimination of the Snapback Effect and Improved Trade-Off Property. J. Electron. Mater. 53, 441–448 (2024). https://doi.org/10.1007/s11664-023-10790-3
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DOI: https://doi.org/10.1007/s11664-023-10790-3