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ALD-Assisted Graphene Functionalization for Advanced Applications

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Abstract

Graphene is a promising candidate for optical and electronic applications due to its outstanding electronic, optical and thermal properties. The combination of graphene with different materials, such as metals or metal oxides, realizes a smoother surface and lower contact resistance than single-layer graphene. Atomic layer deposition (ALD) is based on atomic level manipulation of gaseous phase reactants, which can be employed to fabricate high-performance graphene composites for advanced applications. However, ALD-assisted graphene functionalization faces numerous challenges, such as preferred growth on wrinkles, grain boundaries and defect sites due to the absence of abundant reactive sites on graphene surface. Herein, we summarize recent work on ALD-based graphene modification from the process and application viewpoints. In particular, mechanistic insights into the ALD process parameters and the influence of ALD conditions on film quality are discussed in detail. Moreover, a brief overview of several applications of ALD-assisted graphene-based electronic devices is presented.

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Copyright 2016, ACS AMI Publishing.

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Acknowledgments

This study was supported by the National Natural Science Foundation of China (Grant Nos. 61974054 and 61675088), the International Science & Technology Cooperation Program of Jilin (Grant No. 20190701023GH), the Scientific and Technological Developing Scheme of Jilin Province (Grant No. 20200401045GX), and the Project of Science and Technology Development Plan of Jilin Province (Grant No. 20190302011G).

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Authors and Affiliations

  1. College of Science, Changchun University of Science and Technology, Changchun, 130012, People’s Republic of China

    Yibin Zhou, Jintao Wang, Shuming Chen, Zheng Chen, Ye Li & Yu Duan

  2. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, 130012, People’s Republic of China

    Yibin Zhou, Jintao Wang & Yu Duan

  3. Department of Gastroenterology, First Hospital of Jilin University, Changchun, 130021, Jilin, People’s Republic of China

    Ping He

  4. Western Christian Schools, 100 W. Ninth Street, Upland, CA, 91786, USA

    Yingqi Zang

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  1. Yibin Zhou
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Zhou, Y., Wang, J., He, P. et al. ALD-Assisted Graphene Functionalization for Advanced Applications. J. Electron. Mater. 51, 2766–2785 (2022). https://doi.org/10.1007/s11664-021-09266-z

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