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Study of the Synthesis Process of MoO3 to MoS2 Thin Films Deposited by Spray Pyrolysis: The Effect of [S/Mo] Mole Concentration and Sulfurization Process

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Abstract

In this paper, molybdenum disulfide (MoS2) thin films were deposited using an initial solution of molybdenum trioxide (MoO3) and thiourea (SC(NH2)2) on glass substrate with various mole concentrations by spray pyrolysis. The films were deposited in two steps (a) [S/ Mo] mole concentration ratio (x) varied at values of 0, 1, 2, 3, 5 and 10 at substrate temperature of Ts = 400ºC and (b) under post sulfurization process in the presence of argon gas at an annealing temperature of Ta = 450ºC. We applied x-ray diffraction (XRD), scanning electron microscopy (SEM), and ultraviolet-visible (UV-Vis) spectra for characterization of the MoS2 thin films in terms of morphology, crystal structure and optical properties. The effect of [S/Mo] mole concentration ratio and post sulfurization processes on the structural conversion, morphology, x-ray diffraction and optical properties of these films have been studied. In non-sulfurization conditions it is found that the films are polycrystalline with a MoO3 single phase and in post sulfurization conditions have hexagonal crystal structure corresponding to MoS2 phase with preferred orientation along the (002) plane. The intensity of peaks increased with sulfurization and increase of mole concentration. The morphology of films obtained by scanning electron microscopy (SEM) appears as bar-shaped nano-grains. The average grain size increases with increasing mole concentration of S, in solution. Optical transparency of films changed in the range of 20% to 50% and 20% to 5%, in the visible region before and after sulfurization, respectively. The energy band gap (Eg) of films hardly depends to post sulfurization process, band gap decreased from 3.2 eV to 1.2 eV.

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Authors and Affiliations

  1. School of Physics, Damghan University, Damghan, Iran

    S. Faraji & M.-M. Bagheri-Mohagheghi

  2. Department of Physics, Faculty of Basic Science, University of Bojnord, Bojnord, Iran

    M. Mousavi

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  1. S. Faraji
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  2. M.-M. Bagheri-Mohagheghi
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  3. M. Mousavi
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Correspondence to M.-M. Bagheri-Mohagheghi.

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I am Dr M.- M. Bagheri-Mohagheghi the Corresponding author of "Study of synthesis process from MoO3 to MoS2 thin films deposited by spray pyrolysis:The effect of [S/Mo] mole concentration and sulfurization process''. I confirm that there is no conflict of interest to declare.

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Faraji, S., Bagheri-Mohagheghi, MM. & Mousavi, M. Study of the Synthesis Process of MoO3 to MoS2 Thin Films Deposited by Spray Pyrolysis: The Effect of [S/Mo] Mole Concentration and Sulfurization Process. J. Electron. Mater. 50, 3341–3347 (2021). https://doi.org/10.1007/s11664-021-08826-7

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