Abstract
The ac electrical conduction of Cr-doped SrTiO3 thin films with an oxygen-deficient interface layer was investigated as a function of temperature and frequency. The Cr-doped SrTiO3 (Cr-STO) thin films with an ultra-thin (∼2 nm) oxygen-deficient layer inserted between the top electrode and the Cr-STO layer exhibited two ac conduction mechanisms, i.e., variable-range hopping and small-polaron hopping conduction, accompanied by a relaxation process. Since high oxygen deficiency induces large lattice distortion in the depletion layer, the first relaxation process occurs at low frequencies in the thin oxygen depletion layer Cr-SrTiO3−δ , and the corresponding conduction behavior follows the small-polaron tunneling model. In the high frequency range, an additional relaxation process is involved and is associated with the variable-range hopping between the localized states in the band gap of the thick Cr-SrTiO3 layer.
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Acknowledgements
This work is supported by the Basic Science Research Program through National Research Foundation of Korea (2009-0092809) and National Foundation of Science and Technology Development of Vietnam (NAFOSTED—103.99-2010.12).
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Phan, B.T., Eom, K.T. & Lee, J. AC Electrical Conduction of Cr-Doped SrTiO3 Thin Films with an Oxygen-Deficient Interface Layer. J. Electron. Mater. 46, 3796–3800 (2017). https://doi.org/10.1007/s11664-016-5243-5
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DOI: https://doi.org/10.1007/s11664-016-5243-5