Skip to main content
SpringerLink
Log in

Improvements in Fabrication of 3D SU-8 Prisms for Low-Coupling-Loss Interconnections Between Fibers and Waveguides

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Fabrication of three-dimensional (3D) SU-8 (an epoxy-based negative photoresist from MicroChem) prisms as low-loss couplers for interconnection between optical components, particularly optical fibers and silicon-on-isolator waveguides (SOI WGs), which have mismatched mode sizes, has been investigated. With an interfacial structure formed by a 3D SU-8 prism partly overlaying an SOI WG end with a portion of buried oxide (BOX) removed under the interface, low-loss coupling is ensured and the transmission efficiency can reach 70%. To fabricate these 3D SU-8 prisms, a simple method with two photolithography steps was used for SU-8 hinges and CYTOP (an amorphous fluoropolymer from AGC Chemicals) prism windows, with mild soft and hard bakes, to define the prism profiles with diluted SU-8 filled in the CYTOP prism windows. A buffered oxide etchant is used to remove BOX parts under the interfaces. Some of the fabricated structures were tested, demonstrating the contribution of overlaying SU-8 prisms to the transmission efficiency of optical interconnections between fibers and SOI WGs.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M.M. Tilleman, A. Kozhekin, R. Cohen, D. Haronian, and I. Nusinsky, IEE Proc. Optoelectron. 152, 145 (2005).

    Article  Google Scholar 

  2. H. Yamada, PIERS Online 6, 165 (2010).

    Article  Google Scholar 

  3. H.P. Hsu, A.F. Milton, and W.K. Burns, Appl. Phys. Lett. 33, 63 (1978).

    Google Scholar 

  4. L. Nieradko, C. Gorecki, M. Józwik, and A. Sabac, J. Microlithogr. Microfabr. Microsyst. 5, 023009-1 (2006).

    Google Scholar 

  5. R. Yanga, S.A. Soperb, and W. Wanga, Sens. Actuators A Phys. 127, 123 (2006).

    Article  Google Scholar 

  6. W. Bogaerts, W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx, Opt. Express 12, 1583 (2004).

    Article  Google Scholar 

  7. W.A. Pasmooij, P.A. Mandersloot, and M.K. Smit, J. Lightwave Technol. 1, 175 (1989).

    Article  Google Scholar 

  8. M.H. Nguyen, C.-J. Chang, M.-C. Lee, and F.-G. Tseng, Opt. Express 19, 18956 (2011).

    Article  Google Scholar 

  9. M.-H. Nguyen, T.-H. Nguyen, H.-B. Nguyen, F.-G. Tseng, J.-R. Lai, M.-C. Lee, K.-N. Ku, in Proceedings of International Conference 3M-NANO 2014 (2014).

  10. J.J. Kim, S.P. Yang, D.M. Keum, and K.H. Jeong, Opt. Express 22, 22089 (2014).

    Article  Google Scholar 

  11. S. Keller Stephan, G. Blagoi, M. Lillemose, D. Haefliger, and A. Boisen, J. Micromech. Microeng. 18, 125020 (2008).

    Article  Google Scholar 

Download references

Acknowledgements

The authors are grateful for financial support of this work by a Vietnam–Taiwan Joint Research Grant (Code 25/2014/HĐ-NĐT) and the Taiwan NSC Project (Code 102WFA0400674). We also greatly appreciate the help and cooperation from our colleagues in the Nano-/Micro-Bio-Opto-Electro-Mechanical Systems and Fluidics Laboratory (Department of Engineering and System Science) and Microscopic Optical System Lab (Institute of Photonics Technologies), National Tsing Hua University, Taiwan, for their assistance with lens fabrication and optical measurements.

Author information

Authors and Affiliations

  1. Center for Microelectronic and Information Technology, National Center for Technological Progress, Hanoi, Vietnam

    Minh-Hang Nguyen

  2. International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Vietnam

    Thi-Xuan Chu & Long Nguyen

  3. Institute of Materials Science, Vietnam Academy of Science and Technology, Hanoi, Vietnam

    Hai-Binh Nguyen

  4. Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan

    Chun-Wei Lee & Fan-Gang Tseng

  5. Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan

    Te-Chang Chen & Ming-Chang Lee

Authors
  1. Minh-Hang Nguyen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Thi-Xuan Chu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Long Nguyen
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Hai-Binh Nguyen
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Chun-Wei Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Fan-Gang Tseng
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Te-Chang Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Ming-Chang Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Minh-Hang Nguyen.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Nguyen, MH., Chu, TX., Nguyen, L. et al. Improvements in Fabrication of 3D SU-8 Prisms for Low-Coupling-Loss Interconnections Between Fibers and Waveguides. J. Electron. Mater. 45, 5630–5637 (2016). https://doi.org/10.1007/s11664-016-4796-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-016-4796-7

Keywords

Search

Navigation