Abstract
Magnetic thin films of Ta/NiO/Ni81Fe19/NiO/Ta were fabricated by a magnetron sputtering method. The effects of NiO layer thickness and substrate temperature on the anisotropic magnetoresistance (AMR) and the magnetic field sensitivity of these Ni81Fe19 films have been investigated. The results show that the AMR of 20-nm Ni81Fe19 film with 4-nm NiO achieves 5.02% at 450°C, while the magnetic field sensitivity achieves 9.00% × 10−3 m A−1 at the same conditions. These enhanced 40% and 230% comparing with the film without NiO layer, respectively.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
P. Dimitrova, S. Andreev, and L. Popova, Sensors Actuators A 147, 387 (2008).
H. Hauser, P.L. Fulmek, P. Haumer, M. Vopalensky, and P. Ripka, Sensors Actuators A 106, 121 (2003).
L. Ding, J. Teng, X.C. Wang, C. Feng, Y. Jiang, G.H. Yu, S.G. Wang, and R.C.C. Ward, Appl. Phys. Lett. 96, 052515 (2010).
Shuyun Wang, Cuntao Wang, Yuanmei Gao, Tiejun Gao, and Jianfang He, J. Alloy Compd. 575, 419 (2013).
Shuyun Wang, Tiejun Gao, Cuntao Wang, and Jianfang He, J Alloy Compd. 554, 405 (2013).
J. Singh, S.K. Gupta, A.K. Singha, P. Kotharia, R.K. Kotnalab, and J. Akhtaa, J. Magn. Magn. Mater. 324, 999 (2012).
C.J. Zhao, Lei Ding, J.S. HuangFu, J.Y. Zhang, and Yu GuangHua, Rare Met. 32, 213 (2013).
G.H. Yu, H.C. Zhan, M.H. Li, F.W. Zhu, and W.Y. Lai, Appl. Phys. Lett. 80, 455 (2002).
Dongwei Wang, Lei Ding, Le Wang, Jiao Teng, and Yu Guanghua, Vac. Electron. 3, 63 (2007).
Lei Ding, Jiao Teng, Qian Zhan, Chun Feng, Minghua Li, Gang Han, Lijin Wang, Yu Guanghua, and Shuyun Wang, Appl. Phys. Lett. 94, 162506 (2009).
L. Wang, J. Zhang, and L. Wang, Rare Met. 28, 624 (2009).
Chongjun Zhao, Yang Liu, Jingyan Zhang, Li Sun, Lei Ding, Peng Zhang, Baoyi Wang, Xingzhong Cao, and Yu Guanghua, Appl. Phys. Lett. 101, 072404 (2012).
M. Li, G. Han, L. Ding, X. Wang, Y. Liu, C. Feng, H. Wang, and G. Yu, J Magn. Magn. Mater. 324, 1 (2012).
Jiashun Huangfu, Chongjun Zhao, Jingyan Zhang, Baohe Li, and Yu Guanghua, J. Appl. Phys. 111, 123903 (2012).
B. Dieny, M. Li, S.H. Liao, C. Horng, and K. Ju, J. Appl. Phys. 88, 4140 (2000).
S. Soeya, M. Fuyama, S. Tadokoro, and T. Imagawa, J. Appl. Phys. 79, 1604 (1996).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Wang, S., Zhang, H. & Yao, Y. Effects of NiO Layer on Anisotropic Magnetoresistance and Sensitivity of Ni81Fe19 Films. J. Electron. Mater. 43, 3493–3498 (2014). https://doi.org/10.1007/s11664-014-3174-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11664-014-3174-6