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Oxidation of Nano-multilayered TiAlSiN Films at 800–900 °C in Air

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Abstract

Thin films of Ti0.26Al0.163Si0.012N0.565, with alternating nanocrystalline TiSiN and AlSiN nanolayers were deposited on steel by arc ion plating. Oxidation at 800–900 °C for up to 75 h led to the formation of rutile-TiO2 and α-Al2O3. Silicon accumulated around the interface between the film and oxide scale. The scale structure changed from Al2O3/TiO2 bilayers, through TiO2/Al2O3/TiO2 triple layers, to TiO2/Al2O3/(TiO2, Al2O3, SiO2)-mixed triple layers, as the oxidation time increased.

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References

  1. H. Ichimura and A. Kawana, Journals of Materials Research 8, 1093 (1993).

    Article  Google Scholar 

  2. S. H. Yao, Y. L. Su, W. H. Kao and T. H. Liu, Tribology International 39, 332 (2006).

    Article  Google Scholar 

  3. C. Feng, M. Li, L. Xin, S. Zhu, Z. Shao and Q. Zhao, Surface and Coatings Technology 232, 88 (2013).

    Article  Google Scholar 

  4. F. Vaz, L. Rebouta, M. Andritschky, M. F. Da Silva and J. C. Soares, Surface and Coatings Technology 98, 912 (1998).

    Article  Google Scholar 

  5. A. Vennemann, H. R. Stock, J. Kohlscheen, S. Rambadt and G. Erkens, Surface and Coatings Technology 174–175, 408 (2003).

    Article  Google Scholar 

  6. M. Pfeiler, J. Zechner, M. Penoy, C. Michotte, C. Mitterer and M. Kathrein, Surface and Coatings Technology 203, 3104 (2009).

    Article  Google Scholar 

  7. N. Fukumoto, H. Ezura and T. Suzuki, Surface and Coatings Technology 204, 902 (2009).

    Article  Google Scholar 

  8. Y. Y. Chang and S. M. Yang, Thin Solid Films 518, s34 (2010).

    Article  Google Scholar 

  9. A. Flink, J. M. Andersson, B. Alling, R. Daniel, J. Sjölén, L. Karlsson and L. Hultman, Thin Solid Films 517, 714 (2008).

    Article  Google Scholar 

  10. M. Parlinska-Wojtan, A. Karimi, O. Coddet, T. Cselle and M. Morstein, Surface and Coatings Technology 188–189, 344 (2004).

    Article  Google Scholar 

  11. O. Durand-Drouhin, A. E. Santana, A. Karimi, V. H. Derflinger and A. Schütze, Surface and Coatings Technology 163–164, 260 (2003).

    Article  Google Scholar 

  12. L. Xin, Q. Chen, Y. Teng, W. Wang, A. Sun, S. Zhu and F. Wang, Surface and Coatings Technology 228, 48 (2013).

    Article  Google Scholar 

  13. N. Birks, G. H. Meier and F. S. Pettit, Introduction to the High-Temperature Oxidation of Metals, 2nd edn. (Cambridge University Press, England, 2006), p. 62.

    Book  Google Scholar 

  14. Y. M. Chiang, D. P. Birnie III and W. D. Kingery, Physical Ceramics, (Wiley, New York, 1996), p. 107.

    Google Scholar 

  15. J. C. Lee, S. K. Kim, T. D. Nguyen and D. B. Lee, Journal of Nanoscience and Nanotechnology 11, 6563 (2011).

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy (No. 20143030050070).

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Authors and Affiliations

  1. School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 440-746, South Korea

    Sang Hwan Bak & Dong Bok Lee

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  1. Sang Hwan Bak
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  2. Dong Bok Lee
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Correspondence to Dong Bok Lee.

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Bak, S.H., Lee, D.B. Oxidation of Nano-multilayered TiAlSiN Films at 800–900 °C in Air. Oxid Met 84, 345–352 (2015). https://doi.org/10.1007/s11085-015-9558-z

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