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Influence of argon flow rate on structural and optical properties of transparent Nb2O5 thin films

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Abstract

Transparent niobium pentoxide (Nb2O5) thin films deposited on glass substrates by RF sputtering at different argon (Ar) flow rate were contrastively studied. Analytical methods such as X-ray fluorescence, Fourier-transform infrared spectroscopy and field emission scanning electron microscope were utilized to investigate the morphological surface and structural properties of Nb2O5 thin films deposited at different Ar flow rate. UV–Vis–NIR and photoluminescence (PL) spectroscopy were used to explore the optical properties of Nb2O5 thin films deposited at different Ar flow rate. The allowed optical band gap (\( {\text{E}}_{\text{g}}^{\text{d}} \)) of the Nb2O5 thin films varies from 3.88 to 3.80 eV with increasing Ar flow rate from 30 to 90 sccm. The PL of the Nb2O5 thin films showed strong emission peak around 400 nm. The real values of the refractive index are increase with increasing Ar flow rate. Optical quantities related to the optical constants of Nb2O5 thin films thin films such as single oscillator parameters and third-order nonlinear susceptibility were assessed.

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References

  • Al-Baradi, A.M., El-Nahass, M.M., Hassanien, A.M., Atta, A.A., Alqahtani, M.S., Aldawsari, A.O.: Influence of RF sputtering power on structural and optical properties of Nb2O5 thin films. Optik 168, 853–863 (2018)

    ADS  Google Scholar 

  • Alhuthali, A., El-Nahass, M.M., Atta, A.A., El-Raheem, M.M.A., Elsabawy, K.M., Hassanien, A.M.: Study of topological morphology and optical properties of SnO2 thin films deposited by RF sputtering technique. J. Lumin. 158, 165–171 (2015)

    Google Scholar 

  • Basuvalingam, S.B., Macco, B., Knoops, H.C.M., Melskens, J., Kessels, W.M.M., Bol, A.A.: Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films. J. Vac. Sci. Technol. A 36, 041503–041511 (2018)

    Google Scholar 

  • Bayrak, T., Ozgit-Akgun, C., Goldenberg, E.: Structural, optical and electrical characteristics BaSrTiOx thin films: effect of deposition pressure and annealing. J. Non-Cryst. Solids 475, 76–84 (2017)

    ADS  Google Scholar 

  • Burcham, L.J., Datka, J., Wachs, I.E.: In situ vibrational spectroscopy studies of supported niobium oxide catalysts. J. Phys. Chem. B 103, 6015–6024 (1999)

    Google Scholar 

  • Burstein, E.: Anomalous optical absorption limit in InSb. Phys. Rev. 93, 632–633 (1954)

    ADS  Google Scholar 

  • Caglar, Y., Ilican, S., Caglar, M.: Single-oscillator model and determination of optical constants of spray pyrolyzed amorphous SnO2 thin films. Eur. Phys. J. B 58, 251–256 (2007)

    ADS  Google Scholar 

  • Cheong, J.Y., Youn, D.Y., Kim, C., Jung, J.-W., Ogata, A.F., Bae, J.G., Kim, I.-D.: Ag-coated one-dimensional orthorhombic Nb2O5 fibers as high performance electrodes for lithium storage. Electrochim. Acta 269, 388–396 (2018)

    Google Scholar 

  • Di Giulio, M., Micocci, G., Rella, R., Siciliano, P., Tepore, A.: Optical absorption of tellurium suboxide thin film. Phys. Status Solidi A 136, K101–K104 (1993)

    ADS  Google Scholar 

  • El-Nahass, M.M.: Optical properties of tin diselenide films. J. Mater. Sci. 27, 6597–6604 (1992)

    ADS  Google Scholar 

  • El-Nahass, M.M., Atta, A.A., El-Raheem, M.M.A., Hassanien, A.M.: Structural and optical properties of DC Sputtered Cd2SnO4 nanocrystalline films. J. Alloys Compd. 585, 1–6 (2014)

    Google Scholar 

  • Fernandes, S.L., Véron, A.C., Neto, N.F.A., Nüesch, F.A., da Silva, J.H.D., Zaghete, M.A., Graeff, C.F.D.O.: Nb2O5 hole blocking layer for hysteresis-free perovskite solar cells. Mater. Lett. 181, 103–107 (2016)

    Google Scholar 

  • Gimon-Kinsel, M.E., Balkus Jr., K.J.: Pulsed laser deposition of mesoporous niobium oxide thin films and application as chemical sensors. Microporous Mesoporous Mater. 28, 113–123 (1999)

    Google Scholar 

  • Jacob, K.T., Shekhar, C., Vinay, M.: Thermodynamic properties of niobium oxides. J. Chem. Eng. Data 55, 4854–4863 (2010)

    Google Scholar 

  • Jose, R., Thavasi, V., Ramakrishna, S.: Metal oxides for dye-sensitized solar cells. J. Am. Ceram. Soc. 22, 289–301 (2009)

    Google Scholar 

  • Konstantinov, I., Babeva, T., Kitova, S.: Analysis of errors in thin-film optical parameters derived from spectrophotometric measurements at normal light incidence. Appl. Opt. 37, 4260–4267 (1998)

    ADS  Google Scholar 

  • Kukli, K., Ritala, M., Leskela, M.: Development of dielectric properties of niobium oxide, tantalum oxide, and aluminum oxide based nanolayered materials. J. Electrochem. Soc. 148, F35–F41 (2001)

    Google Scholar 

  • Kumar, N., Lee, H.B., Hwang, S., Kim, T.-W., Kang, J.-W.: Fabrication of plasmonic gold-nanoparticle-transition metal oxides thin films for optoelectronic applications. J. Alloys Compd. 775, 39–50 (2019)

    Google Scholar 

  • Lazarova, K., Vasileva, M., Marinov, G., Babeva, T.: Optical characterization of sol–gel derived Nb2O5 thin films. Opt. Laser Technol. 58, 114–118 (2014)

    ADS  Google Scholar 

  • Li, S.Z., Yang, Y.Q., Liu, L., Liu, W.C., Wang, S.B.: The preparation and refractive index of BST thin films. Phys. B 403, 2618–2623 (2008)

    ADS  Google Scholar 

  • Lim, J.H., Choi, J.: Formation of niobium oxide nanowires by thermal oxidation. J. Ind. Eng. Chem. 15, 860–864 (2009)

    Google Scholar 

  • Liu, Y.M., Han, R.Q., Liu, F., Pei, Z.L., Sun, C.: Sputtering gas pressure and target power dependence on the microstructure and properties of DC-magnetron sputtered AlB2-type WB2 films. J. Alloys Compd. 703, 188–197 (2017)

    Google Scholar 

  • Lu, L., Shen, H., Zhang, H., Jiang, F., Li, B., Lin, L.: Effects of Ar flow rate and substrate temperature on the properties of AZO thin films by RF magnetron sputtering. Optoelectron. Adv. Mater. Rapid Commun. 4, 596–600 (2010)

    Google Scholar 

  • Masse, J.P., Szymanowski, H., Zabeida, O., Amassian, A., Klemberg-Sapieha, J.E., Martinu, L.: Stability and effect of annealing on the optical properties of plasma deposited Ta2O5 and Nb2O5 films. Thin Solid Films 515, 1674–1682 (2006)

    ADS  Google Scholar 

  • Mazur, M., Szymanska, M., Kaczmarek, D., Kalisz, M., Wojcieszak, D., Domaradzki, J., Placido, F.: Determination of optical and mechanical properties of Nb2O5 thin films for solar cells applications. Appl. Surf. Sci. 301, 63–69 (2014)

    ADS  Google Scholar 

  • Miller, R.C.: Optical second harmonic generation in piezoelectric crystals. Appl. Phys. Lett. 5, 17–19 (1964)

    ADS  Google Scholar 

  • Morais, L.A., Adán, C., Araujo, A.S., Guedes, A.P.M.A., Marugán, J.: Synthesis, characterization, and photonic efficiency of novel photocatalytic niobium oxide materials. Glob. Challenges 1, 1700066–1700073 (2017)

    Google Scholar 

  • Moss, T.S.: The interpretation of the properties of indium antimonide. Proc. Phys. Soc. Lond. B 67, 775–782 (1954)

    ADS  Google Scholar 

  • Mujawar, S.H., Inamdar, A.I., Patil, S.B., Patil, P.S.: Electrochromic properties of spray deposited niobium oxide thin films. Solid State Ionics 177, 3333–3338 (2006)

    Google Scholar 

  • Murugan, R., Vijayaprasath, G., Mahalingam, T., Hayakawa, Y., Ravi, G.: Effect of RF power on the properties of magnetron sputtered CeO2 thin films. J. Mater. Sci. Mater. Electron. 26, 2800–2809 (2015)

    Google Scholar 

  • Özera, N., Rubinb, M.D., Lampert, C.M.: Optical and electrochemical characteristics of niobium oxide films prepared by sol–gel process and magnetron sputtering: a comparison. Sol. Energy Mater. Sol. Cells 40, 285–296 (1996)

    Google Scholar 

  • Palik, D.E.: Handbook of Optical Constants of Solids, p. 265. Academic Press, New York (1985)

    Google Scholar 

  • Pawlicka, A., Atik, M., Aegerter, M.A.: Synthesis of Nb2O5 films for electro-chromic devices. J. Mater. Sci. Lett. 14, 1568–1570 (1995)

    Google Scholar 

  • Pereira, C.C.M., Lachter, E.R.: Alkylation of toluene and anisole with 1-octen-3-ol over niobium catalysts. Appl. Catal. A 266, 67–72 (2004)

    Google Scholar 

  • Pillis, M., Geribola, G., Scheidt, G., de Araújo, E., de Oliveira, M., Antunes, R.: Corrosion of thin, magnetron sputtered Nb2O5 films. Corros. Sci. 102, 317–325 (2016)

    Google Scholar 

  • Ramírez, G., Rodil, S.E., Muhl, S., Turcio-Ortega, D., Olaya, J.J., Rivera, M., Camps, E., Escobar-Alarcón, L.: Amorphous niobium oxide thin films. J. Non-Cryst. Solids 356, 2714–2721 (2010)

    ADS  Google Scholar 

  • Rawal, S.K., Chawla, A.K., Jayaganthan, R., Chandra, R.: The influence of various sputtering parameters on structural, wettability and optical properties of Zr2ON2 thin films. Mater. Sci. Eng. B 45, 16–23 (2014)

    Google Scholar 

  • Sarkar, J.: Sputtering Materials for VLSI and Thin Film Devices, pp. 1–92. William Andrew (Elsevier), Oxford (2014)

    Google Scholar 

  • Shaltout, A.A., Welz, B., Ibrahim, M.A.: Influence of the grain size on the quality of standardless WDXRF analysis of river Nile sediments. Microchem. J. 99(2), 356–363 (2011)

    Google Scholar 

  • Shaltout, A.A., Gomma, M.M., Ali-Bik, M.W.: Utilization of standardless analysis algorithms using WDXRF and XRD for Egyptian iron ore identification. X-Ray Spectrom. 41(6), 355–362 (2012a)

    ADS  Google Scholar 

  • Shaltout, A.A., Moharram, M.A., Mostafa, N.Y.: Wavelength dispersive X-ray fluorescence analysis using fundamental parameter approach of Catha edulis and other related plant samples. Spectrochim. Acta Part B: At. Spectrosc. 67, 74–78 (2012b)

    ADS  Google Scholar 

  • Sheikin, E.G.: The pressure dependence of the deposition rate in a magnetron sputtering system. Thin Solid Films 574, 52–59 (2015)

    ADS  Google Scholar 

  • Silvaa, G., Nogueira, A.E., Oliveira, J.A., Torres, J.A., Lopes, O.F., Ribeiro, C.: Acidic surface niobium pentoxide is catalytic active for CO2 photoreduction. Appl. Catal. B: Environ. 242, 349–357 (2019)

    Google Scholar 

  • Solomon, I., Schmidt, M.P., Sénémaud, C., Khodja, M.D.: Band structure of carbonated amorphous silicon studied by optical, photoelectron, and X-ray spectroscopy. Phys. Rev. B 38, 13263–13270 (1988)

    ADS  Google Scholar 

  • Song, D.: Effects of RF power on surface-morphological, structural and electrical properties of aluminium-doped zinc oxide films by magnetron sputtering. Appl. Surf. Sci. 254, 4171–4178 (2008)

    ADS  Google Scholar 

  • Stormer, H., Weber, A., Fischer, V., Ivers-Tiffee, E., Gerthsen, D.: Anodically formed oxide films on niobium: microstructural and electrical properties. J. Eur. Ceram. Soc. 29, 1743–1753 (2009)

    Google Scholar 

  • Sun, F., Qiao, X., Tan, F., Wang, W., Qiu, X.: One-step microwave synthesis of Ag/ZnO nanocomposites with enhanced photocatalytic performance. J. Mater. Sci. 47, 7262–7268 (2012)

    ADS  Google Scholar 

  • Tichý, L., Tichá, H., Nagels, P., Callaerts, R., Mertens, R., Vlček, M.: Optical properties of amorphous As–Se and Ge–As–Se thin films. Mater. Lett. 39, 122–128 (1999)

    Google Scholar 

  • Usha, N., Sivakumar, R., Sanjeeviraja, C., Arivanandhan, M.: Niobium pentoxide (Nb2O5) thin films: RF power and substrate temperature induced changes in physical properties. Optik 126, 1945–1950 (2015)

    ADS  Google Scholar 

  • Wang, C.C.: Empirical relation between the linear and the third-order nonlinear optical susceptibilities. Phys. Rev. B 2, 2045–2048 (1970)

    ADS  Google Scholar 

  • Wang, Y.D., Yang, L.F., Zhou, Z.L., Li, Y.F., Wu, X.H.: Effects of calcining temperature on lattice constants and gas-sensing properties of Nb2O5. Mater. Lett. 49, 277–281 (2001)

    Google Scholar 

  • Wasa, K., Kanno, I., Kotera, H.: Handbook of Sputter Deposition Technology, pp. 1–39. William Andrew (Elsevier), Oxford (2012)

    Google Scholar 

  • Wemple, S.H.: Refractive-index behavior of amorphous semiconductors and glasses. Phys. Rev. B 7, 3767–3777 (1973)

    ADS  Google Scholar 

  • Wemple, S.H., DiDomenico Jr., M.: Behavior of the electronic dielectric constant in covalent and ionic materials. Phys. Rev. B 3, 1338–1350 (1971)

    ADS  Google Scholar 

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Acknowledgements

Prof. Dr. Ahmed Atta is thankful to the support of Deanship of Scientific Research, in Taif University for funding the Future Researcher Program in the Project No. 1-439-6089.

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Atta, A.A., Hassanien, A.M., El-Nahass, M.M. et al. Influence of argon flow rate on structural and optical properties of transparent Nb2O5 thin films. Opt Quant Electron 51, 341 (2019). https://doi.org/10.1007/s11082-019-2054-y

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