Skip to main content
SpringerLink
Log in

Assessing, surface morphology, optical, and electrical performance of ZnO thin film using ALD technique

  • Research paper
  • Published:
Journal of Nanoparticle Research Aims and scope Submit manuscript

Abstract

In this study, we focus on the influence of the deposition process of ZnO thin films with a thickness of 250 nm—grown on glass and silicon substrates by atomic layer deposition (ALD) technique—on morphology, optical properties, AC conductivity, and dielectric properties. The atomic structure of the ZnO film was analyzed using scanning electron microscopy (SEM), energy dispersive X-ray spectrometer (EDX), and incident X-ray diffraction pattern (XRD). The XRD pattern confirms the presence of a crystalline phase, which is clearly observed in the SEM image. The crystallite size value was found to be equal to 35.41 nm. Transparency study was performed by UV-vis spectroscopy. A key element of this study was to prove that it is impossible to attribute the optical energy gap (Eg) and refractive index (n) dependence to any typical thin film material because these parameters depend on the deposition condition and growth temperature. The values of the optical energy gap and the refractive index estimated from the absorption spectrum (Eg = 3.32eV, n = 2.29) were compared with those obtained from the transmittance and reflectance measurements (Eg = 3.36, n = 2.272). A new relation has been proposed based on the best fit for calculating the refractive index, which has been determined and compared with the values estimated by different researchers, showing excellent agreement. Electrical parameters such as dielectric characteristics and AC conductivity were also estimated at different temperatures ranging from 303 to 413 K versus the frequency ranging from 1 kHz to 1 MHz. AC conductivity behavior was studied to explore the mechanism of conduction. Further analysis revealed that the correlated barrier hopping (CBH) model is the predominant theoretical model for elucidating the conduction mechanism existing in our ZnO thin film. This article contains recent advances in the modified ZnO metal oxide prepared by ALD, which is an efficient approach for sensor device fabrication, mainly depending on the estimated parameters.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14

Similar content being viewed by others

Data and code availability

All data generated or analyzed during this study are included in this published article.

References

  1. Zaka H, Parditka B, Erdélyi Z, Atyia HE, Sharma P, Fouad SS (2020) Investigation of dispersion parameters, dielectric properties and opto–electrical parameters of ZnO thin film grown by ALD. Optik 203:163933

    Article  CAS  Google Scholar 

  2. Shaba EY, Jacob JO, Tijani JO, Suleiman MAT (2021) A critical review of synthesis parameters affecting the properties of zinc oxide nanoparticle and its application in wastewater treatment. Appl Water Sci 11(2):1–41

    Article  Google Scholar 

  3. Bandeira M, Giovanela M, Roesch-Ely M, Devine DM, da Silva J, Crespo (2020) Green synthesis of zinc oxide nanoparticles: a review of the synthesis methodology and mechanism of formation. Sustain Chem Pharm 15:100223

    Article  Google Scholar 

  4. Ealia S, Anu Mary, Saravanakumar MP (2017) "A review on the classification, characterisation, synthesis of nanoparticles and their application." In IOP conference series: materials science and engineering, vol. 263, 3, p. 032019. IOP Publishing

    Google Scholar 

  5. Ahmadipour M, Ain MF, Ahmad ZA (2016) Effect of thickness on surface morphology, optical and humidity sensing properties of RF magnetron sputtered CCTO thin films. Appl Surf Sci 385:182–190

    Article  CAS  Google Scholar 

  6. Ahmadipour M, Ayub SN, Ain MF, Ahmad ZA (2017) Structural, surface morphology and optical properties of sputter-coated CaCu3Ti4O12 thin film: influence of RF magnetron sputtering power. Mater Sci Semicond Process 66:157–161

    Article  CAS  Google Scholar 

  7. Ahmadipour M, Ain MF, Ahmad ZA (2017) Effects of annealing temperature on the structural, morphology, optical properties and resistivity of sputtered CCTO thin film. J Mater Sci Mater Electron 28:12458–12466

    Article  CAS  Google Scholar 

  8. Ahmadipour M, Cheah WK, Ain MF, Rao KV, Ahmad ZA (2018) Effects of deposition temperatures and substrates on microstructure and optical properties of sputtered CCTO thin film. Mater Lett 210:4–7

    Article  CAS  Google Scholar 

  9. Ahmadipour M, Ain MF, Goutham S, Ahmad ZA (2018) Effects of deposition time on properties of CaCu3Ti4O12 thin film deposited on ITO substrate by RF magnetron sputtering at ambient temperature. Ceram Int 44(15):18817–18820

    Article  CAS  Google Scholar 

  10. Mohammadihooyeh M, Karamian E, Emadi R (2019) The impact of MgAl2O4 nano-particles on the hydration-resistance improvement of dolomite-based refractories. Ceram Int 45(16):20674–20677

    Article  CAS  Google Scholar 

  11. Mohsen A, Arjmand M, Ain MF, Ahmad ZA, Pung S-Y (2019) Effect of Ar: N2 flow rate on morphology, optical and electrical properties of CCTO thin films deposited by RF magnetron sputtering. Ceram Int 45(12):15077–15081

    Article  Google Scholar 

  12. Ahmadipour M, Ain MF, Ahmad ZA (2016) Fabrication of resistance type humidity sensor based on CaCu3Ti4O12 thick film. Measurement 94:902–908

    Article  Google Scholar 

  13. Zhai C-H, Zhang R-J, Chen X, Zheng Y-X, Wang S-Y, Liu J, Dai N, Chen L-Y (2016) Effects of Al doping on the properties of ZnO thin films deposited by atomic layer deposition. Nanoscale Res Lett 11(1):1–8

    Article  Google Scholar 

  14. Raha S, Ahmaruzzaman M (2022) ZnO nanostructured materials and their potential applications: progress, challenges and perspectives. Nanoscale Adv 4(8):1868–1925

    Article  CAS  Google Scholar 

  15. Adhikari A, Przezdziecka E, Mishra S, Sybilski P, Sajkowski J, Guziewicz E (2021) Optical properties of ZnO deposited by atomic layer deposition on sapphire: a comparison of thin and thick films. Phys Status Solidi A 218(17):2000669

    Article  CAS  Google Scholar 

  16. Yadav SK, Atyia HE, Fouad SS, Sharma A, Mehta N (2023) Study of linear and non-linear optoelectronic properties of thermally grown thin films of amorphous selenium doped with graphene, multiwalled carbon nanotubes, and silver nanoparticles. Diam Relat Mater 136:110030

    Article  CAS  Google Scholar 

  17. Fouad SS, Parditka B, Nabil M, Baradács E, Negm S, Atyia HE, Erdélyi Z (2021) Bilayer number driven changes in polarizability and optical property in ZnO/TiO2 nanocomposite films prepared by ALD. Optik 233:166617

    Article  CAS  Google Scholar 

  18. Jiang J, Pi J, Cai J (2018) The advancing of zinc oxide nanoparticles for biomedical applications. Bioinorg Chem Appl 2018:1–18

    Article  Google Scholar 

  19. Kim JY, Liu G, Shim GY, Kim H, Lee JK (2020) Functionalized Zn@ ZnO hexagonal pyramid array for dendrite-free and ultrastable zinc metal anodes. Adv Funct Mater 30(36):2004210

    Article  CAS  Google Scholar 

  20. Benhaliliba M (2021) ZnO a multifunctional material: physical properties, spectroscopic ellipsometry and surface examination. Optik 241:167197

    Article  CAS  Google Scholar 

  21. El-Radaf IM, Al-Zahran HYS, Fouad SS, El-Bana MS (2020) Profound optical analysis for novel amorphous Cu2FeSnS4 thin films as an absorber layer for thin film solar cells. Ceram Int 48(11):18778–18784

    Article  Google Scholar 

  22. Nabil M, Mohamed SA, Easawi K, Obayya SSA, Negm S, Talaat H, El-Mansy MK (2020) Surface modification of CdSe nanocrystals: application to polymer solar cell. Curr Appl Phys 20(3):470–476

    Article  Google Scholar 

  23. Fouad SS, Eszter Baradács M, Nabil BP, Negm S, Erdélyi Z (2022) Microstructural and optical duality of TiO2/Cu/TiO2 trilayer films grown by atomic layer deposition and DC magnetron sputtering. Inorg Chem Commun 145:110017

    Article  CAS  Google Scholar 

  24. Nabil M, Easawi K, Abdallah T, Abdallah S, Elmancy MK, Negm S, Talaat H (2019) Performance enhancement of TBAI capped CdSe-quantum dot sensitized solar cells by an interlayer gold nanoparticles. Am Acad Sci Res J Eng Technol Sci 53(1):27–42

    Google Scholar 

  25. Fouad SS, Parditka B, Nabil M, Baradács E, Negm S, Erdélyi Z (2022) Effect of Cu interlayer on opto-electrical parameters of Zno thin films. J Mater Sci Mater Electron 33:20594–20603

    Article  CAS  Google Scholar 

  26. Fouad SS, Parditka B, Atyia HE, Baradács E, Erdélyi Z (2022) The real role of Cu metallic interlayer on the dielectric dispersion and conduction mechanism of TiO2/Cu/TiO2 nanolaminates. Optik 260:169078

    Article  CAS  Google Scholar 

  27. Atyia HE, Fouad SS, Pal SK, Srivastava A, Mehta N (2022) Study of optical bandgap and other related optical properties in amorphous thin films of some optical materials of Se-Te-Sn-Ag system. Opt Laser Technol 150:107985

    Article  CAS  Google Scholar 

  28. Fouad SS, Parditka B, Atyia HE, Baradács E, Bekheet AE, Erdélyi Z (2022) AC conductivity and dielectric parameters studies in multilayer TiO2/ZnO thin films produced via ALD technique. Chin J Phys 77:73–80

    Article  CAS  Google Scholar 

  29. Atyia HE, Fouad SS, Pal SK, Mehta N (2022) Peculiarities of resistive switching in thin films of glassy SeTeSnGe system. Mater Sci Eng B 276:115561

    Article  CAS  Google Scholar 

  30. Fouad SS, Atyia HE, Bekheet AE, Kumar A, Mehta N (2021) Phenomenology of electrical switching behavior of SeTeSnCd thin films for memory applications. J Non-Cryst Solids 571:121025

    Article  CAS  Google Scholar 

  31. Fouad SS, Parditka B, Bekheet AE, Atyia HE, Erdélyi Z (2021) ALD of TiO2/ZnO mutilayers towards the understanding of optical properties and polarizability. Opt Laser Technol 140:107035

    Article  CAS  Google Scholar 

  32. El-Metwally EG, Assim EM, Fouad SS (2020) Optical characteristics and dispersion parameters of thermally evaporated Ge50In4Ga13Se33 chalcogenide thin films. Opt Laser Technol 131:106462

    Article  CAS  Google Scholar 

  33. Zaka H, Fouad SS, Parditka B, Bekheet AE, Atyia HE, Medhat M, Erdélyi Z (2020) Enhancement of dispersion optical parameters of Al2O3/ZnO thin films fabricated by ALD. Sol Energy 205:79–87

    Article  CAS  Google Scholar 

  34. Pal SK, Mehta N, Fouad SS, Atyia HE (2020) Dielectric behavior of amorphous thin films of Se–Te–Sn-Ge system. Solid State Sci 104:106289

    Article  CAS  Google Scholar 

  35. Hegab NA, Atyia HE (2007) Dielectric studies of amorphous As45Te33Ge10 Si12 films. J Ovonic Res 3(5):93–102

    CAS  Google Scholar 

  36. Atyia HE, Hegab NA, Affi MA, Ismail MI (2013) Influence of temperature and frequency on the AC conductivity and dielectric properties for Ge15Se60Bi25 amorphous films. J Alloys Compd 574:345–353

    Article  CAS  Google Scholar 

  37. Fouad SS, Soliman LI, Baradács E, Sayed ME, Parditka B, Osman NF, Nabil M, Zoltán Erdélyi (2023) Advances for enhancing the electrical properties and microhardness activity of ZnO/Cu/ZnO thin films prepared by ALD. J Mater Sci pp 1–11. https://doi.org/10.1007/s10853-023-08411-9

  38. Atyia HE, Hegab NA (2016) Dielectric relaxation behavior and conduction mechanism of Te46As32Ge10Si12 films. Optik 127(15):6232–6242

    Article  CAS  Google Scholar 

  39. Mehta N, Fouad SS, Baradacs E, Parditka B, Atyia HE, Pal SK, Erdelyi Z (2023) Multilayer stack structural designing of titania and zinc white using atomic layer deposition (ALD) technique and study of thermally governed dielectric dispersion and conduction under alternating electric fields. J Mater Sci Mater Electron 34(8):708

    Article  CAS  Google Scholar 

  40. Fouad SS, Atyia HE (2016) Investigation of Ac conductivity, dielectric and thermodynamics properties of Se Te Pb glassy system. J Alloys Compd 688:1206–1213

    Article  CAS  Google Scholar 

  41. Elliott SR (1987) Ac conduction in amorphous chalcogenide and pnictide semiconductors. Adv Phys 36(2):135–217

    Article  CAS  Google Scholar 

  42. El-Barry AMA, Atyia HE (2005) Dielectric relaxation and AC conductivity of XS (X ¼ Cd, Zn) compounds. Physica B 368:1–7

    Article  CAS  Google Scholar 

  43. Sharma A, Kumar A, Mehta N (2015) Determination of density of defect states in glassy Se98M2 (M= Ag, Cd and Sn) alloys using ac conductivity measurements. Measurement 75:69–75

    Article  Google Scholar 

  44. Ganaie M, Zulfequar M (2021) Dielectric investigation of In4Se96-xSx semiconductor: relaxation and conduction mechanism. Microelectron Reliab 116:114018

    Article  CAS  Google Scholar 

  45. Elliott SR (1978) Temperature dependence of a.c. conductivity of chalcogenide glasses. Philos Mag B 37:553

    Article  CAS  Google Scholar 

  46. Afifi MA, Bekheet AE, Elwahhab EA, Atyia HE (2001) Ac conductivity and dielectric properties of amorphous In2Se3 films. Vacuum 61(1):9–17

    Article  CAS  Google Scholar 

Download references

Acknowledgements

The samples used in this study were prepared, and their morphology and uniformity were measured at the University of Debrecen, Hungary, according to the agreement between the Faculty of Education, Ain Shams University, “Coordinator and Supervisor Prof. Dr. Suzan Fouad” and the Faculty of Science and Technology, University of Debrecen, “Coordinator and Supervisor Prof. Dr. Zoltán Erdélyi.” The optoelectrical parameters were measured at the central lab of physics department, Faculty of Education Ain Shams University. Project No. TKP2021-NKTA-34 has been implemented with the support provided from the National Research, Development and Innovation Fund of Hungary, financed under the TKP2021-NKTA funding scheme.

Author information

Authors and Affiliations

  1. Department of Physics, Faculty of Education, Ain Shams University, Cairo, 11566, Egypt

    S.S. Fouad, A.M. Ismail & H.E. Atyia

  2. Department of Basic Engineering Sciences, Faculty of Engineering (Shoubra), Benha University, Benha, 13511, Egypt

    M. Nabil

  3. Department of Solid-State Physics, Faculty of Science and Technology, University of Debrecen, P.O. Box 400, Debrecen, 4002, Hungary

    B. Parditka, E. Baradács & Zoltán Erdélyi

  4. Department of Environmental Physics, Faculty of Science and Technology, University of Debrecen, Poroszlay u.6, Debrecen, 4026, Hungary

    E. Baradács

Authors
  1. S.S. Fouad
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Nabil
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. B. Parditka
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A.M. Ismail
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. E. Baradács
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. H.E. Atyia
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Zoltán Erdélyi
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

S.S. Fouad: idea, writing revision, and data analysis. Eszter Baradács and Bence Parditka: sample preparation and XRD measurements. H.E. Atyia, A.M. Ismail, and M. Nabil: optical, SEM, AC conductivity measurements, and calculation parameters. Zoltán Erdélyi: preparation, writing, revision, XRD data analysis, spectroscopic ellipsometry measurements, and data analysis.

Corresponding author

Correspondence to M. Nabil.

Ethics declarations

Ethical approval

Not applicable.

Conflict of interest

The authors declare no competing interests.

Additional information

Publisher’s note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Fouad, S., Nabil, M., Parditka, B. et al. Assessing, surface morphology, optical, and electrical performance of ZnO thin film using ALD technique. J Nanopart Res 25, 172 (2023). https://doi.org/10.1007/s11051-023-05816-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11051-023-05816-0

Keywords

Search

Navigation