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Effect of Annealing Temperature and Thickness of Magnetron Sputtered Ni/Ti Film on Its Microstructure and Nanoindentation Behavior

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Metal Science and Heat Treatment Aims and scope

The dependence of microstructure and mechanical properties on the thickness of Ni/Ti coatings deposited on a Si(100) substrate by magnetron sputtering and on the temperature of their subsequent annealing is studied. The thickness and the surface roughness of the coatings are determined using profilometry and atomic force microscopy. Nanoindentation is used to determine the penetration resistance, the hardness, and the modulus of elasticity. The layers with minimum thickness are shown to possess the highest mechanical properties. Annealing conducted after the sputtering results in gradual retardation of the process of coarsening of atomic clusters and improvement of the mechanical properties of the layer.

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Authors and Affiliations

  1. School of Mechanical Engineering, Kalinga Institute of Industrial Technology, Bhubaneswar, India

    Sudhansu Patro

  2. Department of Mechanical Engineering, GLA University, Mathura, India

    Kuldeep Kumar Saxena

  3. Department of Metallurgical and Materials Engineering, National Institute of Technology, Rourkela, India

    Ajit Behera

Authors
  1. Sudhansu Patro
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  2. Kuldeep Kumar Saxena
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  3. Ajit Behera
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Correspondence to Ajit Behera.

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Translated from Metallovedenie i Termicheskaya Obrabotka Metallov, No. 3, pp. 40 – 45, March, 2023.

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Patro, S., Saxena, K.K. & Behera, A. Effect of Annealing Temperature and Thickness of Magnetron Sputtered Ni/Ti Film on Its Microstructure and Nanoindentation Behavior. Met Sci Heat Treat 65, 167–172 (2023). https://doi.org/10.1007/s11041-023-00909-y

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  • DOI: https://doi.org/10.1007/s11041-023-00909-y

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