Abstract
Moisture absorption in polymer-based electronic packaging materials plays a key role in defining the reliability performance of semiconductor devices. In this study, in-situ measurements of moisture absorption and diffusion behavior of a thin epoxy-based molding compound (EMC) were taken by using thermogravimetric analysis under a controlled temperature and humidity conditions. Based on sample mass increase versus time at a fixed temperature and relative humidity, saturated moisture content and moisture diffusivity can be determined. At 80 °C, non-Fickian moisture diffusion was noticed, especially at the later stage of the diffusion process. At lower temperatures such as 60 and 30 °C, the diffusion process can be described by the Fickian diffusion model, and the diffusion constant follows an Arrhenius temperature dependence. Hygroscopic swelling, or dimensional change of the material due to moisture absorption, has been characterized using a dynamic mechanical analyzer equipped with a moisture delivering system to generate a controlled relative humidity (DMA-RH system) at various isothermal temperatures. The results suggested that the strain due to hygroscopic swelling is on the same order of magnitude comparing with the strain caused by thermal expansion as temperature changes over several tens of degrees Celsius. The results were used for modeling package stress evolution during reliability testing, and for mitigating the adversary effects of moisture absorption in the EMC.
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He, Y., Kabiri, M. In-situ characterization of moisture absorption and hygroscopic swelling of an epoxy molding compound for electronic packaging. J Therm Anal Calorim 147, 5667–5675 (2022). https://doi.org/10.1007/s10973-021-10941-w
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DOI: https://doi.org/10.1007/s10973-021-10941-w