We consider mathematical models of two microelectromechanical systems describing the motion of a movable electrode in a micro-gap under the action of the repetitive pulse electrostatic field between movable and fixed electrodes. We formulate boundary value problems with periodicity conditions and found the range of parameters corresponding to the existence of two solutions such that one of them is stable, whereas the other is unstable. Bibliography: 11 titles. Illustrations: 9 figures.
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References
D. A. Mendels et al., “Dynamic properties of AFM cantilevers and the calibration of their spring constants,” J. Micromech. Microeng. 16, No. 8, 1720–1733 (2006).
H. Takamatsu and T. Sugiura, “Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage,” ICMENS, 2005, 423–424 (2005).
E. G. Kostsov, Status and prospects of micro- and nanoelectromechanics [in Russian], Avtometriya 45, No. 3, 3–52 (2009); English transl.: Optoelectronics, Instrumentation and Data Processing 45, No. 3, 189–226 (2009).
V. P. Dragunov and E. G. Kostsov, “Specific features of operation of electrostatic microgenerators of energy,” [in Russian], Avtometriya 45, No. 3, 62–73 (2009); English transl.: Optoelectronics, Instrumentation and Data Processing 45, No. 3, 234–242 (2009).
C van der Avoort et al. “Amplitude saturation of MEMS resonators explained by autoparametric resonance,” J. Micromech. Microeng. 20, No. 10, 105012 (2009).
Ya. Grinberg, Yu. A. Pashkin, and E. V. Il’ichev, “Nanomechanical resonators” [in Russian], Usp. Fiz, Nauk 182, No. 4, 407–436 (2012); English transl.: Phys. Usp. 55, 382–407 (2012).
E. G. Kostsov and S. I. Fadeev, “New microelectromechanical cavities for gigahertz frequencies” [in Russian], Avtometriya 49, No. 2, 115–1222 (2013); English transl.: Optoelectronics, Instrumentation and Data Processing 49, No. 2, 204–210 (2013).
I. S. Berezin and N. P. Zhidkov, Methods of Computations. II [in Russian], Fiz.-Mat. Lit., Moscow (1959).
V. V. Voevodin and Yu. A. Kuznetsov, Matrices and computations [in Russian], Nauka, Moscow (1984).
M. Holodniok, A. Klič, M. Kubiček, and M. Marek, Methods of Analysis of Nonlinear Dynamical Models [in Czech], Academia, Prague (1986),
S. I. Fadeev et al., Program Package “STEP” for Numerical Study of Systems of Nonlinear Equations and Autonomous Systems of General Form, Novosibirsk (1998).
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Translated from Vestnik Novosibirskogo Gosudarstvennogo Universiteta: Seriya Matematika, Mekhanika, Informatika 13, No. 3, 2013, pp. 122–140.
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Fadeev, S.I., Pimanov, D.O. Periodic Solutions of Mathematical Models of Micromechanics Under Periodic Impulse Action. J Math Sci 205, 473–489 (2015). https://doi.org/10.1007/s10958-015-2261-4
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DOI: https://doi.org/10.1007/s10958-015-2261-4