Abstract
We report a fabrication process and characterization measurements of single crystal silicon micro-wire resonators to be used for study of quantum turbulence in superfluid \(^{4}\)He at millikelvin temperatures. Our devices are single standing goal-post-shaped silicon structures with a width and height of the order of 7 microns. Vapour-deposited superconducting aluminium film of 120 nm thickness is used for magneto-motive drive of the resonators. In the window of each chip, two such devices of different dimensions are placed 30 µm to 1 mm apart, with the intent to study interaction due to pinned quantized vortices. With resonant frequencies below 10 kHz, the devices reach quality factors of \(\approx 2 \times 10^4\) in cold helium vapour.
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Acknowledgements
This research is supported by the Czech Science Foundation project GAČR20-13001Y. CzechNanoLab project LM2018110 funded by MEYS CR is gratefully acknowledged for the financial support of the sample fabrication at CEITEC Nano Research Infrastructure.
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Midlik, Š., Sadílek, J., Xie, Z. et al. Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid \(^{4}\)He. J Low Temp Phys 208, 475–481 (2022). https://doi.org/10.1007/s10909-022-02675-2
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DOI: https://doi.org/10.1007/s10909-022-02675-2