Abstract
In this study, we evaluated an atomically layered ZnO film that interface damage on a silicon-based solar cell caused by the deterioration of the passivation layer cells due to sputtered plasma. The optical properties of atomically layered ZnO films showed an average value of over 90% from the visible to NIR range, and the reflectance in the solar cell was reduced as a function of the rear reflector. The carrier concentration of ZnO films (8.2 × 1019 cm−3) was better than that of ITO film (4.15 × 1020 cm−3), however, the hall mobility was for ZnO film (16.18 cm2/V-s) was low as compared with that of ITO film (49 cm2/V-s). We proved that ZnO film can reduce interface damage caused by sputtered plasma while maintaining the open-circuit voltage (VOC of 723 mV, FF: 76.4%) by measuring the carrier lifetime and Suns VOC. An efficiency of 22.6% was determined for silicon heterojunction solar cells; the ALD-ZnO film limited damage to the p-type silicon layer and subsequently, contributed toward reduced defect creation, resulting in an enhanced JSC. In addition, we showed that the mitigation of plasma damage through an atomic layer can be beneficial for the efficiency of sensitive optoelectronic devices.
Similar content being viewed by others
References
H.-S. Kim, J.E. Park, M. Patel, H. Kim, D. Kim, S.K. Byeon, D. Lim, J. Kim, Mater. Lett. 174, 10 (2016)
J. Lee, D. Lim, K. Yang, W. Choi, J. Cryst. Growth 326, 50 (2011)
H.S. Park, Y.-J. Lee, J.J. Park, Y.K. Kim, J.S. Yi, Y.S. Lee, S.H. Kim, C.-K. Park, K.-J. Lim, Trans. Electr. Electron. Mater. 19, 165 (2018)
W.J. Maeng, S.-J. Kim, J.-S. Park, K.-B. Chung, H.J. Kim, J. Vac. Sci. Technol., B 30, 031210 (2012)
X. Jiang, F.L. Wong, M.K. Fung, S.T. Lee, Appl. Phys. Lett. 83, 1875 (2003)
S. Mandal, R.K. Singha, A. Dhar, S.K. Ray, Mater. Res. Bull. 43, 244 (2008)
R. Pietruszka, B.S. Witkowski, S. Gieraltowska, P. Caban, L. Wachnicki, E. Zielony, K. Gwozdz, P. Bieganski, E. Placzek-Popko, M. Godlewski, Sol. Energy Mater. Sol. Cells 143, 99 (2015)
L. Znaidi, G.J.A.A. Soler Lllia, S. Benyahia, C. Sanchez, A.V. Kanaev, Thin Solid Films 428, 257 (2003)
V. Galstyan, E. Comini, C. Baratto, G. Faglia, G. Sberveglieri, Ceram. Int. 41, 14239 (2015)
R.W. Johnson, A. Hultqvist, S.F. Bent, Mater. Today 17(5), 236 (2014)
B. Macco, D. Deligannis, S. Smit, R.A.C.M.M. van Swaaij, M. Zeman, W.M.M. Kessels, Semicond. Sci. Technol. 29, 122001 (2014)
V. Quemener, M. Alnes, L. Vines, P. Rauwel, O. Nilsen, H. Fjellvag, E.V. Monakhov, B.G. Svensson, J. Phys. D Appl. Phys. 45, 315101 (2012)
B.-M. Meiners, S. Holinski, P. Schäfer, S. Hohage, D. Borchert, in: The 31st European PV Solar Energy Conference and Exhibition (EU PVSEC 2015), Hamburg, Germany (2015)
M. Huang, Z. Hameiri, A.G. Aberle, T. Mueller, Vacuum 119, 68 (2015)
A. Illiberi, P. Kudlacek, A. Smets, M. Creatore, M. Van De Sanden, Appl. Phys. Lett. 98, 242115 (2011)
H.S. Park, S.M. Iftiquar, T.T. Thuy, J.Y. Jang, S.H. Ahn, S.B. Kim, J.H. Lee, J.H. Jung, C.H. Shin, M.B. Kim, J. Yi, J. Nanosci. Nanotechnol. 14, 7710 (2014)
R. Rößler, C. Leendertz, L. Korte, N. Mingirulli, B. Rech, J. Appl. Phys. 113, 144513 (2013)
W. Favre, J. Coignus, N. Nguyen, R. Lachaume, R. Cabal, D. Muñoz, Appl. Phys. Lett. 102, 181118 (2013)
B. Demaurex, S. De Wolf, A. Descoeudres, Z.C. Holman, C. Ballif, Appl. Phys. Lett. 101, 171604 (2012)
B. Demaurex, J.P. Seif, S. Smit, B. Macco, W.M.M. (Erwin) Kessels, J. Geissbühler, S.D. Wolf, C. Ballif, IEEE J. Photovolt. 4(6), 1387 (2014)
S.B. Kim, S.M. Iftiquar, D.H. Lee, H.J. Lee, J.H. Kim, J.H. Jung, D.H. Oh, V.A. Dao, J. Yi, IEEE J. Photovolt. 6(4), 837 (2016)
J. Iqbal, A. Jilani, P.M. ZiaulHassan, S. Rafique, R. Jafer, A.A. Alghamdi, J. King Saud University Sci. 28, 347 (2016)
P.G. Gordon, G. Bacic, G.P. Lopinski, S.T. Barry, Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition. ChemRxiv. Preprint (2018)
S. Sheng, H. Hao, H. Diao, X. Zeng, Y. Xu, X. Liao, T.L. Monchesky, Appl. Surf. Sci. 253, 1677 (2006)
Z.C. Holman, M. Filipič, A. Descoeudres, S.D. Wolf, F. Smole, M. Topič, J. Appl. Phys. 113, 013107 (2013)
R.S. Bonilla, P.R. Wilshaw, J. Appl. Phys. 121, 135301 (2017)
P. Lenahan, T. Mishima, J. Jumper, T. Fogarty, R. Wilkins, IEEE Trans. Nucl. Sci. 48(6), 2131 (2001)
J.P. Campbell, P.M. Lenahan, Appl. Phys. Lett. 80, 1945 (2002)
Acknowledgements
This research was supported by Korea Initiative for fostering University of Research and Innovation Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (No. 2020M3H1A1077095).
Author information
Authors and Affiliations
Corresponding authors
Ethics declarations
Competing interest
The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Appendix 1
Appendix 1
See Table 3.
Rights and permissions
About this article
Cite this article
Park, H., Kim, Y., Song, J.C. et al. Application of rear-emitter silicon heterojunction solar cells with mitigation of the damage on the amorphous silicon by an atomic-layered ZnO. J Mater Sci: Mater Electron 32, 3912–3919 (2021). https://doi.org/10.1007/s10854-020-05134-4
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-020-05134-4