Effect of annealing Co-W-P metallization substrate onto its resin adhesion

Abstract

The use of a Co-W-P metallization substrate in SiC power modules is expected to improve high temperature reliability because Co-W-P metallization has been found to induce strong bonding strength to both sintered Ag joints and encapsulation resins. To progress in the development of this technology, the successful applicability of Co-W-P metallization into the module fabrication process is of critical importance. In this paper, the effects of annealing a Co-W-P metallization substrate in the die attach process onto its resin adhesion was studied with representative annealing conditions for Ag sintering. Initially, mild annealing at 200 °C for 1 h was applied and showed strong resin adhesion greater than 15 MPa at 225 °C and an ideal cohesion fracture mode of resin, the same as that found in that of the fresh Co-W-P case. However, more severe annealing resulted in lower resin adhesion. For example, annealing at 280 °C for 1 h resulted in a poor resin adhesion below 15 MPa, as well as a delamination fracture mode between the resin and the Co-W-P metallization. This mechanism was investigated with the use of SEM–EDS and XPS analysis. It was observed that annealing at 200 °C induced a slight oxidization of Co, but Co(OH)₂ for the chemical reaction to resin, still remained on the Co-W-P surface. On the other hand, annealing at 280 °C formed an alternative main component (CoO). The shortage of Co(OH)₂ on the top surface created by severe oxidization was found to induce poor resin adhesion. The results from this research are significant to future designs and applications of a module fabrication process using Co-W-P metallization substrates, as well as to the fundamental understanding of adhesion behavior on Co-W-P metallization.