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CO2 gas sensor based on macro porous silicon modified with trimetallic nanoparticles

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Abstract

Two kinds of modified macro porous silicon (maPsi) layer with trimetallic nanoparticles surface alloying and core–shell forms CO2 gas sensors were fabricated and tested successfully. Trimetallic Au–Ag–Pd nanoparticles were prepared by an ion reduction process of different metallic salts on maPsi layer by a simple immersion process. As-formed maPsi layer was fabricated by a laser assisted etching (LAE) process with laser power density illumination, current density and etching time of about: 25 mW/cm2, 20 mA/cm2 and 20 min, respectively. Immersion process with different immersion times were carried out at a fixed concentration 1 mM of HAuCl4, AgNO3 and PdCl2 to synthesize Au–Ag–PdNPs/maPsi hybrid structures. Trimetallic core–shell nanoparticles form was prepared at (6, 8) min immersion times, while for surface alloying nanoparticles form was prepared at (2, 4) min immersion times in a mixed solution with a fixed ratio 1:1:1 at room temperature. The structural aspects of the as-formed maPsi layer and trimetallic Au–Ag–Pd nanoparticles were demonstrated by field emission-scanning electron microscopy (FE-SEM), X-ray diffraction (XRD) and energy dispersive X-ray analysis (EDS). The electrical properties of the modified maPsi layers with trimetallic nanoparticles with and without CO2 gas sensor were found at room temperature. A specific enhancement in gas sensitivity for trimetallic surface alloying nanoparticles form compared with that of the core–shell nanoparticles form was obtained due to the higher specific area to volume ratio.

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Acknowledgements

The author would like to thank the Department of Applied Sciences - University of Technology, Nanotechnology and Advanced Materials Research Center - University of Technology, and Razi Metallurgical Research Center - Iran for their facility and assistance to use the SEM (MIRA3 TESCAN) device and conducting the EDS analyses. The financial support is also acknowledged.

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This research did not receive any specific grant from funding agencies in the public, commercial, or not-for-profit sectors.

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  1. Department of Applied Sciences, University of Technology, Baghdad, Iraq

    Alwan M. Alwan, Duaa A. Hashim & Muslim F. Jawad

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  1. Alwan M. Alwan
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  2. Duaa A. Hashim
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  3. Muslim F. Jawad
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Alwan, A.M., Hashim, D.A. & Jawad, M.F. CO2 gas sensor based on macro porous silicon modified with trimetallic nanoparticles. J Mater Sci: Mater Electron 30, 7301–7313 (2019). https://doi.org/10.1007/s10854-019-01043-3

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  • DOI: https://doi.org/10.1007/s10854-019-01043-3

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