Abstract
Nano-sized ferroelectric Ba(Zr0.15Ti0.85)O3 (BZT) thin films were deposited on Pt/Ti/SiO2/Si<111> substrates using pulsed LASER deposition technique. X-ray diffraction results highlighted the formation of single phase perovskite structure and Atomic Force Microscopy analyses revealed the uniform distribution of the nanometer sized grains. Enhanced properties were observed by in situ annealing of deposited BZT thin films in oxygen rich environment. The observed values of saturation polarization, remanent polarization are several orders higher than those reported in literature. The possible mechanisms for enhanced properties were discussed. Annealing in oxygen rich atmosphere decreased oxygen vacancies which in turn helped in realizing high dielectric constant and better tunability. A low leakage current density was observed in 125 nm thick BZT films. The underlying transport mechanism of leakage current was found to be of Poole–Frenkel type, an interface related phenomenon. Tunability as high as 62 % was observed corresponding to in situ annealed thin films.
Similar content being viewed by others
References
B. Jaffe, W. Cook, H. Jaffe, Piezoelectric Ceramics (Academic Press, London, 1971)
André Chanthbouala, Vincent Garcia, Ryan O. Cherifi, Karim Bouzehouane, Stéphane Fusil, Xavier Moya, Stéphane Xavier, Hiroyuki Yamada, Cyrile Deranlot, Neil D. Mathur, Manuel Bibes, Agnès Barthélémy, Julie Grollier, Nat. Mater. 11, 860–864 (2012)
D. Roy, S.B. Krupanidhi, Appl. Phys. Lett. 61, 2057–2059 (1992)
S.B. Majumder, M. Jain, A. Martinez, R.S. Katiyar, F.W. Van Keuls, F.A. Miranda, J. Appl. Phys. 90, 896–903 (2001)
M. Jain, S.B. Majumder, R.S. Katiyar, A.S. Bhalla, F.A. Miranda, F.W. Van Keuls, Appl. Phys. A 80, 645–647 (2005)
Montserrat Fernández-Bolaños, Catherine Dehollain, Pierre Nicole, Adrian M. Ionescu, Solid State Electron. 54, 1033–1040 (2010)
O.Yu. Buslov, Chong-Yun Kang, V.N. Keis, I.V. Kotelnikov, A. Yu Shimko, M.F. Ivanova, A.V. Tumarkin, S.F. Karmanenko, A.B. Kozyrev, Integr. Ferroelectr. 86, 171–179 (2006)
C.S. Hwang, S.O. Park, H.J. Cho, C.S. Kang, H.K. Kang, S.I. Lee, M.Y. Lee, Appl. Phys. Lett. 67, 2819–2821 (1995)
T.S. Kim, C.H. Kim, M.H. Oh, J. Appl. Phys. 75, 7998–8003 (1994)
F. Moura, A.Z. Simoes, B.D. Stojanovic, M.A. Zaghete, E. Longoa, J.A. Varela, J. Alloys Compd. 462, 129–134 (2008)
W.J. Jie, J. Zhu, W.F. Qin, X.H. Wei, J. Xiong, Y. Zhang, A. Bhalla, Y.R. Li, J. Phys. D Appl. Phys. 40, 2854–2857 (2007)
A.R. James, C. Prakash, Appl. Phys. Lett. 84, 1165–1167 (2004)
Kai-Huang Chen, Ting-Chang Chang, Guan-Chang Chang, Yung-En Hsu, Ying-Chung Chen, Xu Hong-Quan, Appl. Phys. A 99, 291–295 (2010)
J. Ventura, I. Fina, C. Ferrater, E. Langenberg, L.E. Coy, M.C. Polo, M.V. García-Cuenca, L. Fàbrega, M. Varela, Thin Solid Films 518, 4692–4695 (2010)
D.Y. Wang, P. Yun, Y. Wang, H.L.W. Chan, C.L. Choy, Thin Solid Films 517, 2092–2098 (2009)
A. Dixit, S.B. Majumder, A. Savvinov, R.S. Katiyar, R. Guo, A.S. Bhalla, Mater. Lett. 56, 933–940 (2002)
W.C. Xu, D.Y. Wang, X.G. Tang, Y. Wang, H.L.W. Chan, Integr. Ferroelectr. 80, 443–449 (2006)
X.G. Tang, H.Y. Tian, J. Wang, K.H. Wong, H.L.W. Chan, Appl. Phys. Lett. 89, 142911–142913 (2006)
Lina Gao, Jiwei Zhai, Sangnian Song, Xihong Hao, Xi Yao, J. Cryst. Growth 311, 299–303 (2009)
J. Miao, J. Yuan, H. Wu, S.B. Yang, B. Xu, L.X. Cao, B.R. Zhao, Appl. Phys. Lett. 90, 022903–022905 (2007)
M.L.V. Mahesh, V.V. Bhanuprasad, A.R. James, J. Electron. Mater. 42, 3547–3551 (2013)
M.L.V. Mahesh, V.V. Bhanuprasad, A.R. James, J. Mater. Sci. Mater. Electron. 24, 4684–4692 (2013)
M.L.V. Mahesh, A.R. James, J. Nanopart. Res. (2015) communicated
Joint Committee on Powder Diffraction Standards 2001 Diffraction Data File no.36-0019, International Centre for Diffraction Data (ICDD, formerly JCPDS), Newton Square, PA
B. Riehl, G. Subramanyam, R. Biggers, A. Campbell, F.W. van Keuls, F.A. Miranda, D. Tomlin, Integr. Ferroelectr. 55, 825–837 (2003)
G. Subramanyam, B. Riehl, F. Ahamed, R. Biggers, A. Campbell, D. Kuylenstierna, A. Vorobiev, S. Gevorgian, Integr. Ferroelectr. 66, 139–151 (2004)
Cătălina A. Vasilescu, Maria Crişan, Adelina C. Ianculescu, Mălina Răileanu, Măriuca Gartner, Mihai Anastasescu, Nicolae Drăgan, Dorel Crişan, Raluca Gavrilă, Roxana Truşcă, Appl. Surf. Sci. 265, 510–518 (2013)
X.G. Tang, X.X. Wang, K.H. Wong, H.L.W. Chan, Appl. Phys. A 81, 1253–1256 (2005)
X.G. Tang, R.K. Zheng, Y.P. Jiang, H.L.W. Chan, J. Phys. D Appl. Phys. 39, 3394–3399 (2006)
J.Z. Xin, C.W. Leung, H.L.W. Chan, Thin Solid Films 519, 6313–6318 (2011)
Kai-Huang Chen, Ying-Chung Chen, Cheng-Fu Yang, Ting-Chang Chang, J. Phys. Chem. Solids 69, 461–464 (2008)
Cheng Gao, Jiwei Zhai, Xi Yao, Integr. Ferroelectr. 74, 147–153 (2005)
A. Dixit, S.B. Majumder, R.S. Katiyar, A.S. Bhalla, Integr. Ferroelectr. 70, 45–59 (2005)
Yanting Lin, Wu Guangheng, Ni Qin, Dinghua Bao, Thin Solid Films 520, 2800–2804 (2012)
Acknowledgments
The authors acknowledge the financial support from the Defence Research and Development Organization, Ministry of Defence, New Delhi for carrying out the present work. Also, the authors would like to thank the Director of Defence Metallurgical Research laboratory (DMRL) for his continuous support and for the permission to publish this work.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Mahesh, M.L.V., James, A.R. & Bhanu Prasad, V.V. In-situ post deposition annealing of lead-free ferroelectric thin films in oxygen rich atmosphere. J Mater Sci: Mater Electron 26, 4930–4935 (2015). https://doi.org/10.1007/s10854-015-3004-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-015-3004-5