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Preparation, characterization, and application of Nd-doped ceria-coated silica nanoparticles for chemical mechanical polishing

  • Ceramics
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Abstract

Owing to the development of electronic semiconductors and optical systems, semiconductor wafers, ceramics, and optical glass increasingly need to have higher surface quality and processing accuracy, which is placing higher demands on chemical mechanical polishing (CMP). In this paper, nano-sized ceria particles coated on the silica surface with different doping ratios of Nd3+ were designed as an abrasive and synthesized by the precipitation method. The structures and properties of binary particles were characterized using X-ray diffraction (XRD), field-emission scanning microscopy (FE-SEM), energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM), UV–vis spectroscopy, and Raman spectra. CMP using the abrasives on silicon wafers was investigated and the results demonstrated an increase in polishing efficiency due to doping. The material removal rate (MRR) improved by 105% from 67.34 ± 11.66 to 138.05 ± 5.83 nm/min at a doping ratio of Nd3+ up to 9.1% compared with undoped abrasives.

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Data availability

The datasets used or analysed during the current study are available from the corresponding author on reasonable request.

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Acknowledgements

This work was financially supported Jilin Province Science and Technology Development Program (Grants YDZJ202201ZYTS518) and Special science and technology project of Northern rare earth (BFXT-2022-D-0021 and BFXT-2023-D-0014).

Funding

This work was financially supported Jilin Province Science and Technology Development Program (Grants YDZJ202201ZYTS518) and Special science and technology project of Northern rare earth (BFXT-2022-D-0021 and BFXT-2023-D-0014).

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Authors and Affiliations

  1. State Key Laboratory of Rare Earth Resource Utilization, Changchun, Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun, 130022, Jilin, People’s Republic of China

    Jie Jiao, Yongyu Fan, Lang Zhao & Jinkui Tang

  2. School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, Anhui, People’s Republic of China

    Jie Jiao, Yongyu Fan & Jinkui Tang

  3. Baotou Research Institute of Rare Earths, Inner Mongolia, 014030, People’s Republic of China

    Chuandong Chen & Na Fan

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  1. Jie Jiao
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  2. Yongyu Fan
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  3. Chuandong Chen
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  4. Na Fan
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  5. Lang Zhao
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Contributions

JJ contributed to the conception of the study, performed the experiment, and wrote the manuscript. YF helped analyze study data. LZ contributed to the review and revision of original draft and supervision of research activities. JT helped manage and coordinate the entire experimental process and provided financial support for the experiment.

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Correspondence to Lang Zhao or Jinkui Tang.

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All co-authors have contributed to the work, seen and agreed with the contents of the manuscript. The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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Jiao, J., Fan, Y., Chen, C. et al. Preparation, characterization, and application of Nd-doped ceria-coated silica nanoparticles for chemical mechanical polishing. J Mater Sci 58, 18014–18028 (2023). https://doi.org/10.1007/s10853-023-09103-0

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