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Influence of fast neutron irradiation on the phase composition and optical properties of homogeneous SiOx and composite Si–SiOx thin films

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Abstract

Layers and devices utilizing semiconductor nanocrystals have been the subjects of intensive research due to applications in opto- and microelectronic devices, solar cells, detectors, memories and in many more fields. We have shown previously that those nanocrystals in dielectric matrices undergo a substantial reformation during electron irradiation. The research of the interaction between semiconductor nanoclusters and irradiation is important for both the intentional modification of the structures and for understanding the stability of those devices under harsh, radiative conditions (e.g. space, nuclear, medical diagnosis, or similar applications). In the present research, we investigated the influence of neutron irradiation on substoichiometric silicon oxide. We investigated both homogeneous case and inhomogeneous case of matrices with silicon nanoclusters. We found that a fast neutron flux of 5.5 × 1013 neutrons/cm2 s and a fluence of 3.96 × 1017 neutrons/cm2 induce phase separation in the homogeneous films, whereas it decreases the volume fraction of the amorphous silicon phase caused by the reducing size of amorphous nanoclusters in the inhomogeneous films.

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Acknowledgements

We would like to thank K. Gmeling for performing neutron irradiation of the samples. P. Petrik is grateful for support from the OTKA K131515 project. The Bulgarian co-authors thank the European Regional Development Fund, Ministry of Economy of Bulgaria, Operational Programme “Development of the Competitiveness of the Bulgarian economy” 2007–2013, Contract No BG161PO003-1.2.04-0027-C0001, for purchasing the Bruker Vertex 70 spectrophotometer.

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Authors and Affiliations

  1. Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784, Sofia, Bulgaria

    Diana Nesheva, Temenuga Hristova-Vasileva, Irina Bineva & Krassimira Antonova

  2. Centre for Energy Research, Konkoly Thege Miklos ut 29-33, 1121, Budapest, Hungary

    Zsolt Fogarassy, Margit Fabian, Attila Sulyok & Peter Petrik

  3. Faculty of Physics, Sofia University “St. Kliment Ohridski”, 5 James Bourchier, Blvd., 1164, Sofia, Bulgaria

    Evgenia Valcheva

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  1. Diana Nesheva
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Correspondence to Peter Petrik.

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Nesheva, D., Fogarassy, Z., Fabian, M. et al. Influence of fast neutron irradiation on the phase composition and optical properties of homogeneous SiOx and composite Si–SiOx thin films. J Mater Sci 56, 3197–3209 (2021). https://doi.org/10.1007/s10853-020-05338-3

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