Abstract
Sputter deposition is a versatile and industrially important deposition technique for thin films, with increasing demand for matching the characteristics of thin film materials to specific requirements. The actual film properties are largely determined by sputtering parameters such as pressure conditions, temperature and power settings. By means of various X-ray diffraction and scattering techniques, it is shown that the characterization of film formation and growth is feasible in real time at synchrotron sources, thus adding an important dimension to the fundamental understanding of the evolution of thin film microstructure. In particular, grazing incidence small-angle X-ray scattering, grazing incidence X-ray powder diffraction and X-ray reflectometry are used in a complementary manner to study the influence of deposition temperature and substrate choice on the crystallization kinetics and growth of polycrystalline BaTiO\(_3\) films.
Similar content being viewed by others
References
Franz G (2009) Low pressure plasmas and microstructuring technology. Springer, Berlin
Ohring M (1991) Materials science of thin films. Wiley, New York
Thornton JA (1974) Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings. J Vacuum Sci Technol 11:666
Thornton JA (1977) High rate thick film growth. Annu Rev Mater Sci 7:239–260
Thornton JA (1986) The microstructure of sputter-deposited coatings. J Vacuum Sci Technol A Vacuum Surf Films 4:3059
Anders A (2010) A structure zone diagram including plasma-based deposition and ion etching. Thin Solid Films 518:4087–4090
Walter P, Dippel A-C, Pflaum K, Wernecke J, van den Hurk J, Blume J, Klemradt U (2015) A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines. Rev Sci Instr 86:053906
Tynell T, Karppinen M (2015) Inorganic–organic superlattice thin films by atomic/molecular layer deposition. In: Mele P, Endo T, Arisawa S, Li C, Tsuchiya T (eds) Oxide thin films, multilayers, and nanocomposites. Springer, Cham. https://doi.org/10.1007/978-3-319-14478-8_9
Wainer E, Solomon AN (1942) The structure of ferroelectric sodium niobate at room temperature. Titanium Alloy Manufacturing Co. Report No. 8, 3
Wul BM, Goldman IM (1945) Dielectric constant of barium titanate as a function of strength of an alternating field. Compt Rend Acad Sci URSS 46:154–57
Ogawa T (1947) On barium titanate ceramics. Busseiron Kenkyo (in Japanese) 6:1–27
Gonzalo JA, Jimenez B (2005) Ferroelectricity. Wiley, VCH Verlag Weinheim
Lines ME, Glass AM (2001) Principles and application of ferroelectrics and related materials. Oxford University Press Inc, New York
d Araujo CP, Scott JF, Taylor GW (1996) Ferroelectric thin films: synthesis and basic properties. Gordon and Breach Publishers, Amsterdam
Rödel J, Jo W, Seifert KTP, Anton EM, Granzow T, Damjanovic D (2009) Perspective on the development of lead-free piezoceramics. J Am Ceram Soc 92:1153–1177
Valencia S, Crassous A, Bocher L, Garcia V, Moya X, Cherifi RO, Deranlot C, Bouzehouane K, Fusil S, Zobelli A, Gloter a, Mathur ND, Gaupp A, Abrudan R, Radu F, Barthélémy A, Bibes M (2011) Interface-induced room-temperature multiferroicity in batio3. Nat Mater 10:753–8
Tenne DA, Bruchhausen A, Lanzillotti-Kimura ND, Fainstein A, Katiyar RS, Cantarero A, Soukiassian A, Vaithyanathan V, Haeni JH, Tian W, Schlom DG, Choi KJ, Kim DM, Eom CB, Sun HP, Pan XQ, Li YL, Chen LQ, Jia QX, Nakhmanson SM, Rabe KM, Xi XX (2006) Probing nanoscale ferroelectricity by ultraviolet Raman spectroscopy. Science 313:1614–6
Depla D, Mahieu S (2008) Reactive sputter deposition. Springer, Berlin
Schwartzkopf M, Buffet A, Körstgens V (2013) From atoms to layers: in situ gold cluster growth kinetics during sputter deposition. Nanoscale 5:5053–5062
Bommel S, Kleppmann N, Weber C, Spranger H, Schäfer P, Novak J, Roth S, Schreiber F, Klapp S, Kowarik S (2014) Unravelling the multilayer growth of the fullerene c60 in real time. Nat Commun 5:5388
Liu T, Hou J, Wang B, Bai F, Chen H, Gao L, Cao Y, He H, Wang J, Wang N, Cao G, Guo Z (2016) Correlation between the in-plain substrate strain and electrocatalytic activity of strontium ruthenate thin films in dye-sensitized solar cells. J Mater Chem A 00:1–7
Baudelet F, Belkhou R, Briois V, Al E (2005) SOLEIL a new powerful tool for materials science. Oil Gas Sci 60:849–874
Seeck O, Deiter C, Pflaum K, Bertam F, Beerlink A, Franz H, Horbach J, Schulte-Schrepping H, Murphy BM, Greve M, Magnussen O (2011) The high-resolution diffraction beamline p08 at petra iii. J Synchrotr Radiat 19:30–8
Dawiec A, Garreau Y, Bisou J, Hustache S, Kanoute B, Picca F, Renaud G, Coati A (2016) Real-time control of the beam attenuation with XPAD hybrid pixel detector. J Instrum 11:P12018–P12018
Yoneda Y (1963) Anomalous surface reflection of X rays. Phys Rev 131:2010–2013
Renaud G, Garreau Y, Betinelli P, Tournieux A, Bisou J, Monteiro P, Elattaoui X (2013) Beamline fast and automatic attenuation system for X-ray detectors at Synchrotron Soleil. J Phys Confer Ser 425:8–12
Parratt L (1954) Surface studies of solids by total reflection of X-rays. Phys Rev. https://doi.org/10.1103/PhysRev.95.359
Bauer E (1958) Phänomenologische Theorie der Kristallabscheidung an Oberflächen. I. Zeitschrift fur Kristallographie 110:372–394
Ohring M (1995) The materials science of thin films. In: Vacuum, vol 46. Academic Press, San Diego, Chap 7, p 85, 2nd ed
Ohring M (1995) The materials science of thin films. In: Vacuum, vol 46. Academic Press, San Diego, Chap 5, p 85, 2nd ed
Oura K, Lifshits V, Saranin A, Zotov A, Katayama M (2003) Surface science: an introduction. Advanced texts in physics. Springer, Berlin
Franz G (2009) Low pressure plasmas and microstructuring technology. Springer, Berlin, Chap 4, pp 69–102
Burle J, Fisher JM, Ganeva M, Pospelov G, Van Herck W, Wuttke J (2017) BornAgain: simulate and fit grazing incidence small-angle scattering.
Vogel W (1998) X-ray diffraction from clusters. Cryst Res Technol 33
Qiao L, Bi XF (2009) Microstructural orientation, strain state and diffusive phase transition of pure argon sputtered BaTiO3 film. J Phys D Appl Phys 42:175508
David W, Shankland K, McCusker L, Bärlocher C (Eds) (2002) Structure determination from powder diffraction data. Oxford University Press. https://oxford.universitypressscholarship.com/view/10.1093/acprof:oso/9780199205530.001.0001/acprof-9780199205530. Accessed 22 Sep 2020
Fultz B, Howe JM (2007) Transmission electron microscopy and diffractometry of materials, 3rd Edn), p 58
Rachwal JD (2010) X-ray diffraction applications in thin films and (100) silicon substrate stress analysis, Ph.D. thesis
Acknowledgements
The authors gratefully acknowledge K. Pflaum, J. Blume, L. Wilke, M. Fleck and H. Zink and the FS-EC group. Because of their work and efforts, the sputtering unit is operational. We further thank F. Bertram, R. Doehrmann, K. Schlage and U. Ruett from the FS-PE group for fruitful discussions and help during the different beam times. For help in creating the graphic Fig. 1., we are indebted to J. Frerichs.
Author information
Authors and Affiliations
Corresponding author
Additional information
Handling Editor: M. Grant Norton.
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Walter, P., Wernecke, J., Scholz, M. et al. In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition. J Mater Sci 56, 290–304 (2021). https://doi.org/10.1007/s10853-020-05337-4
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10853-020-05337-4