Abstract
Versatile multilayer designs based on a transparent conductive oxide (TCO)/metal/TCO structure are proposed to overcome the trade-off between their electrical and optical properties. The overall performance of the investigated multilayer designs based on ZnO/metal/ZnO and indium tin oxide (ITO)/metal/ITO structures is compared based on their Haacke figure of merit (FoM) at λ = 550 nm. The influence of both the thickness and position of the inserted silver and gold ultrathin metallic layer (ML) on the electrode FoM is studied. To address the trade-off between transparency and conductivity, a new hybrid approach combining the proposed multilayer designs and particle swarm optimization is conducted. The optimized multilayer design with the ITO/Ag/ITO structure is found to open a new avenue towards the achievement of ultrahigh FoM values of 135 × 10−3 Ω−1, superior to those found to date, with a high transmittance above 95% and a reduced sheet resistance of 4.7 Ω × sq−1. This enhancement can be attributed to the dual effects of the enhanced light management induced by effectively modulating the ML geometry and the reduced sheet resistance. The proposed design methodology therefore bridges the gap between high transparency and low sheet resistance, becoming suitable for use in high-performance optoelectronic applications.
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Wanga, T., Lib, B., Rena, N., Huang, L., Li, H.: Influence of Al/Cu thickness ratio and deposition sequence on photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering. Mater. Sci. Semicond. Process. 91, 73–80 (2019)
Kim, J.H., Yer, I.H.: Characterization of ZnO nanowires grown on Ga-doped ZnO transparent conductive thin films: effect of deposition temperature of Ga-doped ZnO thin films. Ceram. Int. 42, 3304–3308 (2016)
Park, Y., Nehm, F., Müller-Meskamp, L., Vandewal, K., Leo, K.: Optical display film as flexible and light trapping substrate for organic photovoltaics. Opt. Express 24, 974 (2016)
Guillén, C., Herrero, J.: TCO/metal/TCO structures for energy and flexible electronics. Thin Solid Films 520, 1–17 (2011)
Benhaya, A., Djeffal, F., Kacha, K., Ferhati, H., Bendjerad, A.: Role of ITO ultra-thin layer in improving electrical performance and thermal reliability of Au/ITO/Si/Au structure: an experimental investigation. Superlattices Microstruct. 120, 419–426 (2018)
Sharma, V., Vyas, R., Bazylewski, P., Chang, G.S., Asokan, K., Sachdev, K.: Probing the highly transparent and conducting SnOx/Au/SnOx structure for futuristic TCO applications. RSC Adv. 6, 29135–29141 (2016)
Wei, W., Hong, R., Wang, J., Tao, C., Zhang, D.: Electron-beam irradiation induced optical transmittance enhancement for Au/ITO and ITO/Au/ITO multilayer thin films. J. Mater. Sci. Technol. 33, 1107–1112 (2017)
Shakiba, M., Kosarian, A., Farshidi, E.: Effects of processing parameters on crystalline structure and optoelectronic behavior of DC sputtered ITO thin film. J. Mater. Sci.-Mater. Electron. 28, 787–797 (2017)
Taha, H., Jiang, Z.T., Yin, C.Y., Henry, D.J., Zhao, X., Trotter, G., Amri, A.: Novel approach for fabricating transparent and conducting SWCNTs/ITO thin films for optoelectronic applications. J. Phys. Chem. C 122, 3014–3027 (2018)
Girtan, M.: Comparison of ITO/metal/ITO and ZnO/metal/ZnO characteristics as transparent electrodes for third generation solar cells. Sol. Energy Mater. Sol. Cells 100, 153–161 (2012)
Hssein, M., Tuo, S., Benayoun, S., Cattin, L., Morsli, M., Mouchaal, Y., Addou, M., Khelil, A., Bernède, J.C.: Cu–Ag bi-layer films in dielectric/metal/dielectric transparent electrodes as ITO free electrode in organic photovoltaic devices. Org. Electron. 42, 73–180 (2017)
Sharma, V., Kumar, P., Kumar, A., Surbhi, Asokan, K., Sachdev, K.: High-performance radiation stable ZnO/Ag/ZnO multilayer transparent conductive electrode. Solar Energy Mater. Solar Cells 169, 122–131 (2017)
Miao, D., Jiang, S., Shang, S., Chen, Z.: Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering. Vacuum 106, 1–4 (2014)
Chua, C., Wub, H., Huanga, J.: AZO/Au/AZO tri-layer thin films for the very low resistivity transparent electrode applications. Mater. Sci. Eng. B 186, 117–121 (2014)
Lee, S.Y., Park, Y.S., Seong, T.: Optimized ITO/Ag/ITO multilayers as a current spreading layer to enhance the light output of ultraviolet light-emitting diodes. J. Alloys Compd. 776, 960–964 (2019)
Kima, J.H., Kim, D., Kimb, S.K., Yoo, Y.Z., Lee, J.H., Kim, S.W., Seong, T.Y.: Highly flexible Al-doped ZnO/Ag/Al-doped ZnO multilayer films deposited on PET substrates at room temperature. Ceram. Int. 42, 3473–3478 (2016)
Hsu, C.L., Lin, Y.H., Wang, L.K., Hsueh, T.J., Chang, S.P., Chang, S.J.: Tunable UV- and visible-light photoresponse based on p-ZnO nanostructures/n-ZnO/glass peppered with Au nanoparticles. ACS Appl. Mater. Interfaces 9, 14935–14944 (2017)
Hsu, C.L., Wu, H.Y., Fang, C.C., Chang, S.P.: Solution-processed UV and visible photodetectors based on Y-doped ZnO nanowires with TiO2 nanosheets and Au nanoparticles. ACS Appl. Energy Mater. 76, 393–399 (2018)
Bastús, N.G., Piella, J., Puntes, V.F.: Quantifying the sensitivity of multipolar (dipolar, quadrupolar and octapolar) surface plasmon resonances in silver nanoparticles: the effect of size, composition and surface coating. Langmuir 12, 290–300 (2016)
Lee, S.Y., Cho, E.-S., Kwon, S.J.: The optical analyses of the multilayer transparent electrode and the formation of ITO/Mesh-Ag/ITO multilayers for enhancing an optical transmittance. Appl. Surf. Sci. 487, 990–999 (2019)
Farmani, A.: Three-dimensional FDTD analysis of a nanostructured plasmonic sensor in the near-infrared range. J. Opt. Soc. Am. B 36, 401–407 (2019)
Gao, E., Liu, Z., Li, H., Xu, H., Zhang, Z., Luo, X., Xiong, C., Liu, C., Zhang, B., Zhou, F.: Dynamically tunable dual plasmon-induced transparency and absorption based on a single-layer patterned graphene metamaterial. Opt. Express 27, 13884–13894 (2019)
Atlas User’s manual: Device Simulation Software (2012)
Ferhati, H., Djeffal, F.: New high performance ultraviolet (MSM) TiO2/glass photodetector based on diffraction grating for optoelectronic applications. Optik 127, 7202–7209 (2016)
Ferhati, H., Djeffal, F., Srairi, F.: Enhancement of the absorbance figure of merit in amorphous-silicon pin solar cell by using optimized intermediate metallic layers. Optik 130, 473–480 (2017)
Clerc, M., Kennedy, J.: The particle swarm—explosion, stability, and convergence in a multidimensional complex space. J. IEEE Trans. Evolut. Comput. 73, 6–58 (2002)
Djeffal, F., Lakhdar, N.: A two-dimensional analytical model of subthreshold behavior to study the scaling capability of deep submicron double-gate GaN-MESFETs. J. Comput. Electron. 10, 382–387 (2011)
Djeffal, F., Bendib, T., Benzid, R., Benhaya, A.: An approach based on particle swarm computation to study the nanoscale DG MOSFET-based circuits. Turk. J. Electr. Eng Comput. Sci. 18, 1131–1140 (2010)
Ferhati, H., Djeffal, F.: Role of gradual gate doping engineering in improving phototransistor performance for ultra-low power applications. J. Comput. Electron. 15, 550–556 (2016)
Bencherif, H., Djeffal, F., Ferhati, H.: Performance enhancement of Pt/TiO2/Si UV-photodetector by optimizing light trapping capability and interdigitated electrodes geometry. Superlattices Microstruct. 97, 303–312 (2016)
Kim, B.K., Lee, B.H., Cho, K.-S., Lee, S.Y.: Simulation and optimization of layer thickness of amorphous oxide SIZO/Ag/SIZO multilayer to enhance transmittance of transparent electrodes without sacrificing sheet resistance. J. Alloys Comp. 798, 622–627 (2019)
Sibin, K.P., Selvakumar, N., Kumar, A., Dey, A., Sridhara, N., Shashikala, H.D., Sharma, A.K., Barshilia, H.C.: Design and development of ITO/Ag/ITO spectral beam splitter coating for photovoltaic-thermoelectric hybrid systems. Sol. Energy 141, 118–126 (2017)
El Hajj, A., Lucas, B., Chakaroun, M., Antony, R., Ratier, B., Aldissi, M.: Optimization of ZnO/Ag/ZnO multilayer electrodes obtained by ion beam sputtering for optoelectronic devices. Thin Solid Films 520, 4666–4668 (2012)
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The authors gratefully acknowledge the financial support of the General Directorate for Scientific Research and Technological Development (DGRSDT), Algeria.
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Ferhati, H., Djeffal, F. Performance assessment of TCO/metal/TCO multilayer transparent electrodes: from design concept to optimization. J Comput Electron 19, 815–824 (2020). https://doi.org/10.1007/s10825-020-01459-9
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DOI: https://doi.org/10.1007/s10825-020-01459-9