We consider the design and spectral characteristics of a photodiode with a graded n-i-p junction made by implantation of As and P into silicon with resistivity 1 kiloohm·cm. The quantum effi ciency of the photodiode is higher than 90 % in the spectral range 530–700 nm.
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 81, No. 2, pp. 321–323, March–April, 2014.
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Blynski, V.I., Holub, E.S. & Lemeshevskaya, A.M. Silicon Photodiode for Visible Spectral Region. J Appl Spectrosc 81, 317–319 (2014). https://doi.org/10.1007/s10812-014-9930-9
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DOI: https://doi.org/10.1007/s10812-014-9930-9