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A 240-GHz Wideband Ridged Waveguide Filter Based on MEMS Process

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Abstract

Terahertz (THz) bandpass filter (BPF) is one of important components in some detectors for astronomical observations. In this paper, a BPF with a relative bandwidth of 50% centered at 240 GHz is presented. This wideband BPF is made up of six ridged waveguide resonators and developed by silicon-based micro-electro-mechanical systems (MEMS) process. The transmission response of the filter is measured by a quasi-optical setup incorporating a sensitive superconducting mixer, and the result is in good agreement with the simulated one. Details of the design, simulation, and measurement are discussed in this paper.

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Acknowledgements

This work is supported by the National Natural Science Foundation of China under Grant Nos. 11127903, 11190012, and 11422326.

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Authors and Affiliations

  1. School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China

    Jiangqiao Ding & Wen Wu

  2. Purple Mountain Observatory, Chinese Academy of Sciences and Key Laboratory of Radio Astronomy, Nanjing, 210008, China

    Jie Hu, Dong Liu, Daowei Wang & Shengcai Shi

Authors
  1. Jiangqiao Ding
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  2. Jie Hu
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  3. Dong Liu
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  4. Daowei Wang
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  5. Shengcai Shi
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  6. Wen Wu
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Correspondence to Jiangqiao Ding.

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Ding, J., Hu, J., Liu, D. et al. A 240-GHz Wideband Ridged Waveguide Filter Based on MEMS Process. J Infrared Milli Terahz Waves 38, 283–291 (2017). https://doi.org/10.1007/s10762-016-0332-3

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  • DOI: https://doi.org/10.1007/s10762-016-0332-3

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