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Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

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Abstract

The dispersion curves of bulk waves propagating in both AlN and ZnO film bulk acoustic resonators (FBARs) are presented to illustrate the mode flip of the thickness-extensional (TE) and 2nd thickness-shear (TSh2) modes. The frequency spectrum quantitative prediction (FSQP) method is used to solve the frequency spectra for predicting the coupling strength among the eigen-modes in AlN and ZnO FBARs. The results elaborate that the flip of the TE and TSh2 branches results in novel self-coupling vibration between the small-wavenumber TE and large-wavenumber TE modes, which has never been observed in the ZnO FBAR. Besides, the mode flip leads to the change in the relative positions of the frequency spectral curves about the TE cut-off frequency. The obtained frequency spectra can be used to predict the mode-coupling behaviors of the vibration modes in the AlN FBAR. The conclusions drawn from the results can help to distinguish the desirable operation modes of the AlN FBAR with very weak coupling strength from all vibration modes.

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Acknowledgements

This work was also partly supported by the specialized research projects of Huanjiang Laboratory, Zhuji, Zhejiang Province.

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Authors and Affiliations

  1. Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province and Department of Engineering Mechanics, Zhejiang University, Hangzhou, 310027, China

    Zinan Zhao & Weiqiu Chen

  2. Huanjiang Laboratory, Zhuji, Zhejiang Province, 311816, China

    Zinan Zhao & Weiqiu Chen

  3. Suzhou HunterSun Electronics Co., Ltd., Suzhou, Jiangsu Province, 215124, China

    Nian Li

  4. School of Marine Science and Technology, Northwestern Polytechnical University, Xi’an, 710072, China

    Yilin Qu

Authors
  1. Zinan Zhao
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  2. Nian Li
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  3. Yilin Qu
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  4. Weiqiu Chen
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Corresponding author

Correspondence to Weiqiu Chen.

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Conflict of interest Weiqiu CHEN is an editorial board member for Applied Mathematics and Mechanics (English Edition) and was not involved in the editorial review or the decision to publish this article. The authors declare no conflict of interest.

Additional information

Project supported by the National Natural Science Foundation of China (Nos. 11872329, 12192211, and 12072315), the Natural Science Foundation of Zhejiang Province of China (No. LD21A020001), the National Postdoctoral Program for Innovation Talents of China (No. BX2021261), and the China Postdoctoral Science Foundation Funded Project (No. 2022M722745)

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Zhao, Z., Li, N., Qu, Y. et al. Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode. Appl. Math. Mech.-Engl. Ed. 44, 2187–2206 (2023). https://doi.org/10.1007/s10483-023-3056-6

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  • DOI: https://doi.org/10.1007/s10483-023-3056-6

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