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Design and realization of a universal capacitive readout integrated circuit

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Abstract

This paper introduces a gain-programmable low noise switched capacitor readout circuit for micro-electro-mechanical system (MEMS) accelerometer with signal bandwidth of 200 Hz. A two programmable capacitor arrays are also used to compensate the balanced capacitance offset that comes from the MEMS accelerometer. A brief equivalent model of the MEMS acceleration is introduced to simulate the transient response of the readout circuit. The proposed capacitor readout circuit has been fabricated in a three-metal two-poly 0.35 μm CMOS process. Measured results show that the readout circuit can sense difference and single capacitor with 78.1 dB dynamic.

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Acknowledgments

Project supported by the Program for New Century Excellent Talents in University of Ministry of Education of China (NCET-11-0975), by the National Natural Science Foundation of China (Grant No. 61274043) and by the State Key Program of National Natural Science of China (Grant No. 61233010).

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Authors and Affiliations

  1. Faculty of Material, Optoelectronics and Physics, Xiangtan University, Xiangtan, 411105, China

    Mengliang Liu, Liang Xie & Xiangliang Jin

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  1. Mengliang Liu
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  2. Liang Xie
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  3. Xiangliang Jin
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Correspondence to Xiangliang Jin.

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Liu, M., Xie, L. & Jin, X. Design and realization of a universal capacitive readout integrated circuit. Analog Integr Circ Sig Process 82, 449–456 (2015). https://doi.org/10.1007/s10470-014-0470-2

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  • DOI: https://doi.org/10.1007/s10470-014-0470-2

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