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Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer

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Abstract

A general equation of the interference signal of white-light scanning interferometer (WSI) and its Fourier transform are derived. Based on these equations, a new method for elimination of a dispersion effect in WSI is proposed to measure exactly a reflecting surface position. A dispersion phase caused by the two sides of unequal length in a beam splitter is detected with a spectrally resolved interferometer (SRI). A spectral distribution is obtained by using Fourier transform from an interference signal detected with a WSI. The spectral phase of the SRI is subtracted from the spectral phase of the WSI to get a dispersion-free spectral phase, which provides an improved complex-valued interference signal where a position of zero phase is almost equal to a position of maximum amplitude. An accurate measurement is achieved by using the position of zero phase.

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Acknowledgements

This research was supported by National Natural Science Foundation of China (NSFC) (61275203, 61505059 and 61575070), the Fujian Province Science Funds for Distinguished Young Scholar (No. 2015J06015) and the Natural Science Foundation of Fujian Province of China (No. 2014J05007).

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Authors and Affiliations

  1. Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen, 361021, Fujian, China

    Song-Jie Luo, Osami Sasaki, Yong-Xin Liu, Xiao-Yan Li, Zhi-Li Lin & Ji-Xiong Pu

  2. Emeritus Prof., Niigata University, Niigata, 950-2181, Japan

    Osami Sasaki

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  1. Song-Jie Luo
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  2. Osami Sasaki
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  3. Yong-Xin Liu
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  4. Xiao-Yan Li
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  6. Ji-Xiong Pu
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Correspondence to Song-Jie Luo.

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Luo, SJ., Sasaki, O., Liu, YX. et al. Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer. Opt Rev 24, 27–32 (2017). https://doi.org/10.1007/s10043-016-0291-x

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  • DOI: https://doi.org/10.1007/s10043-016-0291-x

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