Abstract
A thin film shape memory alloy bimorph actuator developed by depositing CuAlNi shape memory alloy (SMA) on a curved Kapton polyimide sheet substrate can be used in position control without any biasing element or external sensor. Self-sensing capability makes SMA best suited for small size and low weight applications in the fields of medicine and aerospace. The dynamic behaviour of the bimorph actuator is analyzed with various inputs such as step, pulse and sine voltages, with and without load. The actuation of SMA bimorph exhibits nonlinear hysteresis. Also, the results show that some oscillations are present during heating when the bimorph is not loaded and these oscillations are absent/eliminated when under load. The SMA bimorph actuator’s performances are approximated as the ARX441 model using the system identification technique. Further, the self-sensing model of the SMA bimorph actuator is developed using polyfit and ANN techniques and verified with the actual values.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Abdullah EJ, Soriano J, de Bastida F, Garrido I, Abdul Majid DL (2020) Accurate position control of shape memory alloy actuation using displacement feedback and self-sensing system. Microsyst Technol. https://doi.org/10.1007/s00542-020-05085-0
Akash K, Shukla AK, Mani Prabu SS, Narayane DC, Kanmanisubbu S, Palani IA (2017a) Parametric investigations to enhance the thermomechanical properties of CuAlNi shape memory alloy Bi-morph. J Alloy Compd 720:264–271. https://doi.org/10.1016/j.jallcom.2017.05.255
Akash K, Mani-Prabu SS, Shukla AK, Nath T, Karthick S, Palani IA (2017b) Investigations on the life cycle behaviour of Cu-Al-Ni/polyimide shape memory alloy bi-morph at varying substrate thickness and actuation conditions. Sens Actuators A Phys 254:28–35. https://doi.org/10.1016/j.sna.2016.12.008
Akash K, Jain AK, Karmarkar G, Jadhav A, Narayane DC, Patra N, Palani IA (2018) Investigations on actuation characteristics and life cycle behaviour of CuAlNiMn shape memory alloy bimorph towards flappers for aerial robots. Mater Des 144:64–71. https://doi.org/10.1016/j.matdes.2018.02.013
Al-Humairi SNS (2020) Cu-based shape memory alloys: modified structures and their related properties. Recent advancements in the metallurgical engineering and electrodeposition. IntechOpen. https://doi.org/10.5772/intechopen.86193
Asua E, Feutchwanger J, García-Arribas A, Etxebarria V (2010) Sensorless control of SMA-based actuators using neural networks. J Intell Mater Syst Struct 21(18):1809–1818. https://doi.org/10.1177/1045389x10388965
Fu Y, Du H, Huang W, Zhang S, Hu M (2004) TiNi-based thin films in MEMS applications: a review. Sens Actuators, A 112(2–3):395–408. https://doi.org/10.1016/j.sna.2004.02.019
Fu YQ, Luo JK, Flewitt AJ, Huang WM, Zhang S, Du HJ, Milne WI (2009) Thin film shape memory alloys and microactuators. Int J Comput Mater Sci Surf Eng 2(3/4):208. https://doi.org/10.1504/ijcmsse.2009.027483
Jain A, Kopa A, Pan Y, Fedder GK, Xie H (2004) A two-axis electrothermal micromirror for endoscopic optical coherence tomography. IEEE J Sel Top Quantum Electron 10(3):636–642. https://doi.org/10.1109/jstqe.2004.829194
Jayachandran S, Akash K, Mani Prabu SS, Manikandan M, Muralidharan M, Brolin A, Palani IA (2019) Investigations on performance viability of NiTi, NiTiCu, CuAlNi and CuAlNiMn shape memory alloy/Kapton composite thin film for actuator application. Compos B Eng 176:107182. https://doi.org/10.1016/j.compositesb.2019.107182
Josephine SRD, Sunjai NS, Dhanalakshmi K (2014) Beam balancing ball driven by shape memory alloy: prospective actuator for stabilised control. IFAC Proc Vol 47(1):577–584. https://doi.org/10.3182/20140313-3-in-3024.00152
Khan S, Sai Y, Mani-Prabu SS, Palani IA, Umarikar AC, Singh P (2018) Active control of smart shape memory alloy composite flapper for aerodynamic applications. Procedia Comput Sci 133:134–140. https://doi.org/10.1016/j.procs.2018.07.017
Lan C-C, Fan C-H (2010) An accurate self-sensing method for the control of shape memory alloy actuated flexures. Sens Actuators, A 163(1):323–332. https://doi.org/10.1016/j.sna.2010.07.018
Lan C-C, Lin C-M, Fan C-H (2011) A self-sensing microgripper module with wide handling ranges. IEEE/ASME Trans Mechatron 16(1):141–150. https://doi.org/10.1109/tmech.2009.2037495
Leester-Schädel M, Hoxhold B, Lesche C, Demming S, Büttgenbach S (2008) Micro actuators on the basis of thin SMA foils. Microsyst Technol 14(4–5):697–704. https://doi.org/10.1007/s00542-008-0600-9
Malik AF, Shoaib M, Naseem S, Riaz S (2008) Modeling and designing of RF MEMS switch using ANSYS. In: 2008 4th International Conference on Emerging Technologies. https://doi.org/10.1109/icet.2008.4777472
Quandt E, Holleck H (1995) Materials development for thin film actuators. Microsyst Technol 1(4):178–184. https://doi.org/10.1007/bf01371492
Acknowledgements
The authors sincerely acknowledge the support from Mechatronics and Instrumentation Laboratory, Indian Institute of Technology Indore for fabricating the CuAlNi/Polyimide SMA Bimorph samples.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Vetriselvi, V., Dhanalakshmi, K. & Geetha, M. Modelling and analysis of the dynamic response and self-sensing behaviour of CuAlNi /polyimide bimorph actuator. Microsyst Technol 30, 93–103 (2024). https://doi.org/10.1007/s00542-023-05579-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-023-05579-7