Abstract
This paper presents the development work on d31 mode piezoelectric vibration energy harvester. The device structure consists of a fixed-free type cantilever beam with a seismic mass attached at the free end of the beam. On top of the cantilever beam, a ZnO piezoelectric layer is sandwiched between two metal electrodes. The harvester is designed using an FEM tool CoventorWare. The simulations are carried out to estimate the resonance frequency, mises stress, optimal load resistance, and generated power. The optimized design is then implemented using a five mask SOI bulk micromachining process. The fabricated harvester is characterized for frequency response using Polytec MSA-500 Micro System Analyzer. The experimental resonance frequency is found to be 235.38 Hz. The harvester is also evaluated for generated open-circuit voltage when subjected to harmonic acceleration. The open-circuit peak-to-peak voltage for 0.1 g acceleration is found to be 306 mV.
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References
Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Meas Sci Technol 17(12):R175–R195
Deng L, Fang Y, Wang D, Wen Z (2018) A MEMS based piezoelectric vibration energy harvester for fault monitoring system. Microsyst Technol 24(9):3637–3644
Fang H-B, Liu J-Q, Xu Z-Y, Dong L, Wang L, Chen D, Cai B-C, Liu Y (2006) Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting. Microelectron J 37(11):1280–1284
Lee BS, Lin SC, Wu WJ, Wang XY, Chang PZ, Lee CK (2009) Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J Micromech Micromach 19(6):065014
Liu H, Tay CJ, Quan C, Kobayashi T, Lee C (2011) Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power. J Microelectromech Syst 20(5):1131–1142
Morimoto K, Kanno I, Wasa K, Kotera H (2010) High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers. Sens Actuators A 163(1):428–432
Park JC, Park JY, Lee Y-P (2010) Modelling and characterization of piezoelectric d33-mode MEMS energy harvester. J Microelectromech Syst 19(5):1215–1222
Roundy S, Wright PK (2004) A piezoelectric vibration based generator for wireless electronics. Smart Mater Struct 13(5):1131–1142
Roundy S, Leland ES, Baker J, Carleton E, Reilly E, Lai E, Otis B, Rabaey JM, Wright PK, Sundararajan V (2005) Improving power output for vibration-based energy scavengers. IEEE Pervasive Comput 4(1):28–36
Sodano HA, Inman DJ, Park G (2004) A review of power harvesting from vibration using piezoelectric materials. Shock Vib Dig 36(3):197–205
Acknowledgements
This research work was supported by Council of Scientific and Industrial Research (CSIR) under Emeritus Scientist’s Scheme No. 21(1011)/16/EMR-II.
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Singh, R., Pant, B.D. & Jain, A. Simulations, fabrication, and characterization of d31 mode piezoelectric vibration energy harvester. Microsyst Technol 26, 1499–1505 (2020). https://doi.org/10.1007/s00542-019-04684-w
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DOI: https://doi.org/10.1007/s00542-019-04684-w