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Cubic centimeter robot based on inertial stick–slip driving

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Abstract

In order to achieve the nano-operation in a limited space, a precision motion platform with a cubic centimeter volume based on the principle of inertial stick–slip driving is proposed in this paper. The mechanical structure and the operating principle are discussed. Kinematic models are used to analyze the performance of the prototype. To investigate the working performance of the prototype, a series of experiments are carried out. Experimental results show that the displacement outputs is related to the parameters of the electrical signal. The maximum moving speed of the platform reaches 13.1 mm/s when the driving frequency is 3.1 kHz. The maximum single step displacement reaches 4.8 μm. Through proper driving voltage and frequency, the proposed prototype can produce a satisfactory velocity.

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References

  • Dsouza RD, Navin KP, Theodoridis T et al (2018) Design, fabrication and testing of a 2 DOF compliant flexural microgripper. Microsyst Technol 24(9):3867–3883

    Article  Google Scholar 

  • Hui X, Onal C, Régnier S et al (2011) Automated control of AFM based nanomanipulation. Atomic force microscopy based nanorobotics. Springer, Berlin

    Google Scholar 

  • Hunstig M (2017) Piezoelectric inertia motors—a critical review of history. Concept Des Appl Perspect 2017(6):7

    Google Scholar 

  • Jiang TY, Ng TY, Lam KY (2000) Optimization of a piezoelectric actuator actuator. Sens Actuator 84(1/2):81–94

    Article  Google Scholar 

  • Kudela P, Radzienski M, Ostachowicz W et al (2018) Structural Health Monitoring system based on a concept of Lamb wave focusing by the piezoelectric array. Mech Syst Signal Process 2018(108):21–32

    Article  Google Scholar 

  • Lee SW, Ahn KG, Ni J (2007) Development of a piezoelectric multi-axis stage based on stick-and-clamping actuation technology. Smart Mater Struct 16(6):2354–2367

    Article  Google Scholar 

  • Liang C, Wang F, Tian Y et al (2017) Design of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation. In: IEEE international conference on manipulation, manufacturing and measurement on the nanoscale. IEEE, pp 318–322

  • Meyer C, Sqalli O, Lorenz H et al (2005) Slip-stick step-scanner for scanning probe microscopy. Rev Sci Instrum 76(6):965

    Article  Google Scholar 

  • Nah SK, Zhong ZW (2007) A microgripper using piezoelectric actuation for micro-object manipulation. Sens Actuator A Phys 133(1):218–224

    Article  Google Scholar 

  • Nomura Y, Aoyama H (2007) Development of inertia driven micro robot with nano tilting stage for SEM operation. Microsyst Technol 13(8–10):1347–1352

    Article  Google Scholar 

  • Peng Y, Cao J, Guo Z et al (2015) A linear actuator for precision positioning of dual objects. Smart Mater Struct 24(12):125039

    Article  Google Scholar 

  • Tang H, Li Y, Huang J (2012) Design and analysis of a dual-mode driven parallel XY micromanipulator for micro/nanomanipulations. Arch Proc Inst Mech Eng Part C J Mech Eng Sci 226(12):3043–3057

    Article  Google Scholar 

  • Yoshihiro N, Hisayuki A (2007) Development of inertia driven micro robot with nano tilting stage for SEM operation. Microsyst Technol 13(8–10):1347–1352

    Google Scholar 

  • Zhang ZM, An Q, Li JW et al (2012) Piezoelectric friction–inertia actuator—a critical review and future perspective. Int J Adv Manuf Technol 2012(62):669–685

    Article  Google Scholar 

  • Zhong BW, Zhu J, Jin ZQ et al (2019) Improved inertial stick-slip movement performance via driving waveform optimization. Precis Eng 55:260–267

    Article  Google Scholar 

Download references

Acknowledgements

The work was supported by the National Natural Science Foundation of China (No. 51875378), the Jiangsu province Natural Science Foundation (No. BK20181439) and the Suzhou science and technology development project (No. SYG201720).

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Authors and Affiliations

  1. The College of Mechanical and Electrical Engineering, Soochow University, Suzhou, China

    Bowen Zhong, Bin Liu, Ziqi Jin, Zhenhua Wang & Lining Sun

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  1. Bowen Zhong
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  2. Bin Liu
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  3. Ziqi Jin
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  4. Zhenhua Wang
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  5. Lining Sun
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Correspondence to Bowen Zhong.

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Zhong, B., Liu, B., Jin, Z. et al. Cubic centimeter robot based on inertial stick–slip driving. Microsyst Technol 26, 437–445 (2020). https://doi.org/10.1007/s00542-019-04557-2

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  • DOI: https://doi.org/10.1007/s00542-019-04557-2

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